• Title/Summary/Keyword: Quartz Glass Crucible

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Status of Quartz Glass Crucible (석영유리 도가니 국내외 현황)

  • Noh, Sunghun;Kang, NamHun;Yun, Heuikeun;Kim, Hyeong-Jun
    • Ceramist
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    • v.22 no.4
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    • pp.452-463
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    • 2019
  • A quartz glass crucible is the essential material for manufacturing silicon ingots such as semiconductors and solar cells. Quartz glass crucibles for semiconductors and solar cells are made similar, but differ in surface purity, structure and durability. Recently, ultra high purity synthetic glass crucibles for semiconductors have become more important due to foreign problems. In Korea, it has succeeded in producing 28-inch quartz glass crucibles through the past 10 years. However, 32-inch synthetic quartz glass for the production of silicon ingots for semiconductors is not up to the level of advanced technology, and the technology gap is expected to be 2 to 3 years. In order to overcome these technological gaps and localize synthetic quartz glass ware, close cooperation between production companies and demand companies and localization of synthetic quartz glass powder must also be made. In addition, if government support can be added, faster results can be expected.

A study on the brownish ring of quartz glass crucible for silicon single crystal ingot (실리콘 단결정 잉곳용 석영유리 도가니의 brownish ring에 대한 연구)

  • Jung, YoonSung;Choi, Jae Ho;Min, Kyung Won;Byun, Young Min;Im, Won Bin;Noh, Sung-Hun;Kang, Nam-Hun;Kim, Hyeong-Jun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.3
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    • pp.115-120
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    • 2022
  • A brown ring (hereinafter referred to as BR) on the inner surface of a quartz glass crucible used in the manufacturing process of a silicon ingot for semiconductor wafers was studied. BR is 20~30 ㎛ in size and has an asymmetric brown ring shape. The size and distribution of BR were different depending on the crucible location, and the size and distribution of BR were the largest and most abundant in the round part with the highest crucible temperature during Si ingot growth. BR contains cristobalite, which has a higher coefficient of thermal expansion than quartz glass, so it is considered that surface cracks appear. The color development of BR and pin holes are presumed to be due to oxygen vacancies.

Interpretation of the Asymmetric Color and Shape of Brownish Ring in Quartz Crucible

  • Jung, YoonSung;Choi, Jae Ho;Min, Kyung Won;Byun, Young Min;Im, Won Bin;Kim, Hyeong-Jun
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.50-52
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    • 2022
  • Brownish rings (BRs) with white interiors are formed during the manufacture of silicon ingots in quartz glass crucibles. These BRs inhibit the yield of silicon ingots. However, the composition and mechanism of the formation of these BRs remain unclear thus far. Therefore, in this study, we analyzed the color and shape of these BRs. Raman analysis revealed that the brown and white colors appear owing to oxygen deficiency rather than crystallization from excess oxygen supply as previously assumed. Moreover, the dark shade of the brown areas depends on the degree of oxygen deficiency and the asymmetrical width of the brown areas is attributed to the direction of the molten silicon flow, which is influenced by the rotation and heat of the ingot crucible.

Study on the Color of High Index Glass Containing $TiO_2$ ($TiO_2$ 함유 고굴절솔 유리의 착색에 관한 연구)

  • 김병훈
    • Journal of the Korean Ceramic Society
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    • v.17 no.4
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    • pp.203-207
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    • 1980
  • The optical absorption of high index glasses of the system TiO2-BaO-B2O3 prepared from the raw materials for an optical waveguide glass has been measured in the near ultraviolet region. The amount of Ti3+ in the glass could be reduced to a level less than 5 ppm by melting a batch added with pure nitric acid, using a fused quartz crucible in an oxygen gas atmosphere. The ultra-pure glass of 10mm thick prepared in such a way did not show any appreciable color even for the one containing 30 mol% TiO2 and having refractive index nD of 1.84 and Abbe's number vD of 28.8. The wavelength of ultraviolet absorptin edge was longer for the glass of higher index and higher dispersdion. The melting of a TiO2 containing glass in a platinum crucible resulted in a coloration of the glass due to the dissolved plutinum from the crucible, which was more intense for the one containing larger amount of TiO2.

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Study on the crystallization of quartz glass crucibles for preparation of single crystal silicon (단결정 실리콘 제조용 석영유리도가니의 결정화에 대한 연구)

  • Lim, Jong Won;Kim, Tae Huei;Park, Kyung Bong
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.28 no.3
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    • pp.99-105
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    • 2018
  • In order to avoid un-uniform crystallization on the surface of a quartz glass crucible that is known to affect the production yield of the single crystal silicon, Ba (barium) was selected as a crystallization promotor and the inner surface of the crucible was coated using Ba (barium hydroxide octahydrate)-solution by the spray pyrolysis method. For un-coated crucible, it was found that the crystallization of its surface started at $1350^{\circ}C$, and at $1450^{\circ}C$ the surface was uniformly crystallized with ${\beta}$-cristobalite phase. It was found that the crucible coated with Ba began to be crystallized from $1000^{\circ}C$ and was uniformly crystallized on the crucible surface at $1300^{\circ}C$. In this case, ${\alpha}$-cristobalite and needle-shaped $BaSi_2O_5$ phase were created and disappeared as a crystal phase, and the ${\beta}$-cristobalite phase was eventually evenly distributed over the Ba-coated crucible surface.

Study on Recycling of Scraps from Process of Silicon-single-crystal for Semiconductor

  • Lee, Sang-Hoon;Lee, Kwan-Hee;Hiroshi Okamoto
    • Proceedings of the IEEK Conference
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    • 2001.10a
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    • pp.705-710
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    • 2001
  • So for the quartz-glassy crucible wastes which was used for pulling up silicon-single-crystal ingot have simply reused for refractory raw-materials, or exhausted. This study is concerned on the advanced recycling-technology that is obtained by the proper micro-particle preparation process in order to fabricate fine amorphous silica filler for EMC (Epoxy Molding Compound). Therefore, this paper will deal with the physical, chemical and thermal pre-treatment process for efficient impurity removal and with the proper micro-particle process for producing the amorphous silicafiller. In view of the results, if the chemical, physical and thermal pre-treatment process for efficient elimination of impurity was passed, the purity of wasted fused glassy crucible is almost equal to the its of first anhydrous quartz glass. Thus, it was understood that this wasted fused glassy crucible was sufficient value of recycling, though it was damaged. When the ingot was fabricated, Phase transformation of crystallization by heat treatment (heat hysteresis phenomenon) was not changed. So, it was understood that as fused silica in the amorphous state, as It is, recycling possibility was very high

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A study on the calcination process of synthetic silica powder for quartz glass crucibles (석영유리 도가니용 합성 실리카 분말의 하소공정에 관한 연구)

  • Yang, Jae-Kyo;Jin, Yun-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.32 no.4
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    • pp.128-135
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    • 2022
  • The inside of a quartz glass crucible for semiconductor processing, called a transparent layer, is manufactured using synthetic silica powder. Bubbles existing in the transparent layer of the crucible cause a problem of reducing the quality of the crucible as well as the yield of the silicon ingot. Therefore, the main goal of the synthetic silica powder, which is the raw material of the transparent layer, is to minimize the bubble generation factor. For this purpose, in the case of synthetic silica powder, it is necessary to minimize silanol groups, carbon and pores. In this study, synthetic silica gel was prepared using the sol-gel method, and changes in carbon content and specific surface area were investigated according to calcination temperature and dwelled time in a two-stage calcination process. The first-stage calcination process was performed between 500℃ and 600℃ and the second-stage calcination process was performed between 1000℃ and 1100℃. The dwelled time was carried out from 10 minutes to a maximum of 12 hours. The carbon content of the powder calcined at 1000℃ for 1 hour was 0.0031 wt.%, and the specific surface area of the powder calcined at 1100℃ for 12 hours was 16.6 m2/g.

Scientific Analysis and Conservation Treatment of the Kettle Excavated from Hwangnam-dong, Gyeongju (경주(慶州) 황남동(皇南洞) 출토(出土) 철부(鐵釜)의 보존처리(保存處理) 및 과학적분석(科學的分析))

  • Moon, Sunyoung;Jeon, Ikhwan;Yu, Heisun
    • Conservation Science in Museum
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    • v.4
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    • pp.23-32
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    • 2003
  • As the kettle excavated from a site in Hwangnam-dong, Gyeongju was presumed to have been used as a melting crucible in a glass production workplace, we decided to prove its usage by scientific analysis. First, we performed conservation treatment to find the original status of the kettle, and then SEM-EDS and XRD analysis of the five corrosions created on the surface of the kettle. The fragment of the spout, which played a crucial role for the kettle to be considered as a melting crucible, was discovered during the conservation treatment. So the mouth rim of the kettle was restored to perfection. When we observed the microstructure of the metal sample, it was proved to be cast iron gradually cooled without heat treatment. In the corrosion products, the main components were Fe and O and other components such as P, Si, Ca, and S were found. The main compounds were quartz, vivianite, goetheite, akaganite, lepidocrocite, hematite, etc. Although these components were used as raw materials for making glass, these were found not in the melting status but mere raw materials. This can be an evidence to show these site where the kettle was excavated had been a glass production workplace. However, it is not sure that the kettle was used as a melting crucible. Moreover, if we consider the organic mold and sand clay accumulated in the well site when the kettle was excavated at first, we can see this as a formative factor of the corrosions of the kettle. Therefore, we concluded that the kettle is a typical cast iron and was not used as a melting crucible of glass.

Accelerated testing for evaluating bubble quality within quartz glass crucibles used for manufacturing silicon single crystal ingots (실리콘 단결정 잉곳 제조용 석영유리 도가니 내 기포 품질평가를 위한 가속시험)

  • Gyu Bin Lee;Seung Min Kang;Jae Ho Choi;Young Min Byeon;Hyeong-Jun Kim
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.33 no.3
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    • pp.91-96
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    • 2023
  • To verify the quality of bubbles during the use of quartz glass crucibles (QC), an appropriate accelerated testing method was proposed. The bubble state of discarded waste crucibles obtained from actual Czochralski (Cz) processes was analyzed, and optimal heat treatment conditions were suggested by varying temperature, pressure, and time using the QC test piece. By subjecting the samples to heat treatment at 1450℃, 0.4 Torr, and 40 hours, it was possible to control the bubble size and density to a similar level as those generated in the actual Cz process. In particular, by selecting a relatively lower pressure of 0.4 Torr compared to the typical range of 10~20 Torr applied in the Cz process, the time required for accelerated bubble formation testing could be reduced. However, it was determined that increasing the heat treatment temperature to 1550℃ led to the phenomenon of Ostwald ripening, resulting in larger bubbles and a rapid decrease in density. Therefore, it was concluded that it was not a suitable condition for the desired b ake test.

Material Characteristics and Clay Source Interpretation of Crucibles in Baekje Kingdom Excavated from the Ssangbukri Site in Buyeo, Korea (부여 쌍북리 유적 출토 백제 도가니의 재료학적 특성과 원료의 산지해석)

  • Kim, Ji-Young;Park, Jin-Young;Park, Dae-Sun;Lee, Chan-Hee
    • Journal of Conservation Science
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    • v.26 no.1
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    • pp.1-12
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    • 2010
  • The crucibles of Baekje Kingdom from the Ssangbukri Site which were used for glass and metal melting had light brown, grayish blue and grayish brown colored bodies. In thin section, the crucibles contained numerous quartz grains and pottery fragments. The surface was covered with fine grained quartz for thermal resistance. Based on decomposition of mica group minerals and formation of mullite detected by X-ray diffraction analysis, it was inferred that all crucibles have been fired over $1,000^{\circ}C$. It was also found that firing temperature has exceeded $1,100^{\circ}C$ in some crucibles because feldspar was not detected. The maximum temperature was assumed at $1,200^{\circ}C$. The magnetic susceptibility values and geochemical characteristics sorted out the crucibles into two groups that differed from the characteristics of the local soils. This reflected geological setting of the site where the alluvium was formed from two kinds of surrounding rock masses, granite gneiss and biotite granite. However, the local soils had similarities with the crucibles in weathering degree and geochemical behavior of major elements. In consequence, it was considered that the raw clay of the crucibles was supplied from the local area of the site.