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Study on the crystallization of quartz glass crucibles for preparation of single crystal silicon

단결정 실리콘 제조용 석영유리도가니의 결정화에 대한 연구

  • Lim, Jong Won (School of Advanced Materials Engineering, Andong National University) ;
  • Kim, Tae Huei (School of Advanced Materials Engineering, Andong National University) ;
  • Park, Kyung Bong (School of Advanced Materials Engineering, Andong National University)
  • 임종원 (안동대학교 공과대학 신소재공학부) ;
  • 김태희 (안동대학교 공과대학 신소재공학부) ;
  • 박경봉 (안동대학교 공과대학 신소재공학부)
  • Received : 2018.03.30
  • Accepted : 2018.05.17
  • Published : 2018.06.30

Abstract

In order to avoid un-uniform crystallization on the surface of a quartz glass crucible that is known to affect the production yield of the single crystal silicon, Ba (barium) was selected as a crystallization promotor and the inner surface of the crucible was coated using Ba (barium hydroxide octahydrate)-solution by the spray pyrolysis method. For un-coated crucible, it was found that the crystallization of its surface started at $1350^{\circ}C$, and at $1450^{\circ}C$ the surface was uniformly crystallized with ${\beta}$-cristobalite phase. It was found that the crucible coated with Ba began to be crystallized from $1000^{\circ}C$ and was uniformly crystallized on the crucible surface at $1300^{\circ}C$. In this case, ${\alpha}$-cristobalite and needle-shaped $BaSi_2O_5$ phase were created and disappeared as a crystal phase, and the ${\beta}$-cristobalite phase was eventually evenly distributed over the Ba-coated crucible surface.

본 연구에서는 단결정 실리콘 제조수율에 영향을 미치는 것으로 알려진 석영도가니 표면의 불균일한 결정화를 피하기 위해, 결정화촉진제로 Ba이 포함된 코팅용액을 제조하여 분무열분해법으로 코팅 후, 열처리에 따른 석영도가니 표면의 결정화를 조사하였고, 다음과 같은 결과를 얻었다. 코팅하지 않은 도가니의 경우 온도가 상승함에 따라 $1350^{\circ}C$에서부터 결정화가 진행되는 것을 알 수 있었으며, $1450^{\circ}C$가 되어서야 균일하게 결정화가 되는 것을 확인하였으며, 결정상은 ${\beta}$-cristobalite로 확인되었다. Ba이 코팅된 도가니는 $1000^{\circ}C$부터 결정화가 진행되고 $1300^{\circ}C$에서 전체적으로 도가니 표면에 균일하게 결정화가 진행되는 것을 알 수 있었다. Ba이 코팅된 도가니는 결정상으로 ${\alpha}$-cristobalite와 침상 결정의 $BaSi_2O_5$이 생성되었다가 소멸하며, ${\beta}$-cristobalite 상이 최종적으로 균일한 결정상으로 남는 것을 알 수 있다.

Keywords

References

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