• 제목/요약/키워드: Pyramid texturing

검색결과 16건 처리시간 0.036초

실리콘 웨이퍼 표면의 saw mark 밀도에 따른 피라미드 구조의 영향 (Effect on the Pyramid Structure with Saw Mark Density of Silicon Wafer Surface)

  • 이민지;박정은;이영민;강상묵;임동건
    • Current Photovoltaic Research
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    • 제5권2호
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    • pp.59-62
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    • 2017
  • Surface texturing is affected the uniformity and size of pyramid with saw mark defect density. To analysis the influence of the saw mark defect density, we textured various si wafer. When the texturing process proceeds without the saw mark removal, silicon wafer of low-saw mark defect density showed small pyramid size of $3.5{\mu}m$ with the lowest average value of the reflectance of 10.6%. When texturing carried out after removal of the saw mark using the TMAH solution, we obtained a reflectance of about 11% and the large pyramid size of $5{\mu}m$. As a result, saw mark wafers showed a better pyramid structure than saw mark-free wafer. This result showed that saw mark can take place more smooth etching by the KOH solution and saw mark-free wafer is determined to be a factor that have a higher reflectance and a large pyramid.

결정질 실리콘 태양전지 표면 역 피라미드 구조의 특성 분석 (Influence of Inverted Pyramidal Surface on Crystalline Silicon Solar Cells)

  • 양지웅;배수현;박세진;현지연;강윤묵;이해석;김동환
    • Current Photovoltaic Research
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    • 제6권3호
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    • pp.86-90
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    • 2018
  • To generate more current in crystalline silicon solar cells, surface texturing is adopted by reducing the surface reflection. Conventionally, random pyramid texturing by the wet chemical process is used for surface texturing in crystalline silicon solar cell. To achieve higher efficiency of solar cells, well ordered inverted pyramid texturing was introduced. Although its complicated process, superior properties such as lower reflectance and recombination velocity can be achieved by optimizing the process. In this study, we investigated optical and passivation properties of inverted pyramid texture. Lifetime, implied-Voc and reflectance were measured with different width and size of the texture. Also, effects of chemical rounding at the valley of the pyramid were observed.

탄산나트륨용액을 이용한 실리콘 태양전지의 이방성 텍스쳐링에 관한 연구 (Investigation of anisotropic texturing for silicon solar cells with sodium carbonate solutions)

  • 이은주;김도완;이현우;이수홍
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.177-178
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    • 2006
  • We investigate anisotropic texturing method for crystalline silicon solar cells with sodium carbonate solutions. Texturing temperature have a large effect on the density of pyramid. The dependence of the surface reflectance on solution temperature and the etching time was investigated. The surface morphology was observed by scanning electron microscope and the surface reflectance was evaluated. The reflection from the silicon surface in the wavelength range 400 to 1000nm is reduced to about 12%.

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실리콘 태양전지의 피라미드와 반구형 표면 조직화 (Pyramid and Half-Sphere Type of Surface Texturing for Si-Solar Cell)

  • 표대승;조준환;홍표환;이종현;김봉환;조찬섭
    • 센서학회지
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    • 제22권6호
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    • pp.433-438
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    • 2013
  • In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about $1{\mu}m$ pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.

웨이퍼 접착 텍스쳐링을 이용한 결정질 실리콘 태양전지 고효율화 연구 (Texturing of Two Adhered Wafers for High Efficiency Crystalline Silicon Solar Cells)

  • 임형래;주광식;노시철;최정호;정종대;서화일
    • 반도체디스플레이기술학회지
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    • 제13권3호
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    • pp.21-25
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    • 2014
  • The texturing is one of the most important processes for high efficiency crystalline silicon solar cells. The rear side flatness of silicon solar cell is very important for increasing the light reflectance and forming uniform back surface field(BSF) region in manufacturing high efficiency crystalline silicon solar cells. We investigated texturing difference between front and rear side of wafer by texturing of two adhered wafers. As a result, the flatter rear side was obtained by forming less pyramid size compared to the front side and improved reflectance of long wavelength and back surface field(BSF) region were also achieved. Therefore, the texturing of two adhered wafers can be expected to improve the efficiency of silicon solar cells due to increased short circuit current(Isc).

Laser Texturing한 평행 스러스트 베어링의 윤활특성 : 제4보 - 딤플 형상의 영향 (Lubrication Characteristics of Laser Textured Parallel Thrust Bearing : Part 4 - Effect of Dimple Shape)

  • 박태조
    • Tribology and Lubricants
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    • 제27권6호
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    • pp.338-343
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    • 2011
  • Laser surface texturing (LST) methods are widely applied now to reduce friction and improve reliability of machine components such as thrust bearings, mechanical face seals and piston rings, etc. In this paper, the effect of dimple shapes on the lubrication characteristics of parallel thrust bearing are studied using a commercial computational fluid dynamics (CFD) code, FLUENT. Pressure and streamline distributions, variations of supporting load, leakage flow rate and friction force, are compared for three different dimple sectional shapes such as circle, pyramid and rectangle type. The lubrication characteristics are highly affected by dimple shapes and number of dimples. The pyramid type dimple shape can support the highest load while the rectangle type is the best in friction reduction.

고효율 다결정 실리콘 태양전지 제작을 위한 나노크기의 피라미드 텍스쳐 제작 (Nanoscale Pyramid Texture for High Efficiency Multi-Crystalline Silicon Solar Cells)

  • 허종;박민준;지홍섭;김진혁;정채환
    • Current Photovoltaic Research
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    • 제5권1호
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    • pp.25-27
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    • 2017
  • Nanoscale textured black silicon has attracted intensive attention due to its great potential as applications in multicrystalline silicon-based solar cells. It absorbs sunlight over a broad range of wavelengths but introduces large recombination centers, non-uniform doping into cell. In this study, we present a metal-assisted chemical etching technique plus alkaline etching process to fabricate nanoscale pyramid structures with optimized condition. To make the structures, silver nanoparticles-loaded mc-Si wafer was submerged into $H_2O_2/HF$ solution first for nanohole texturing the wafer and textured wafer etched again with KOH solution for making nanoscale pyramid structures. The average reflectivity (350-1050 nm) is about 8.42% with anti-reflection coating.

마이크로 컨텍 프린팅 기법을 이용한 결정질 실리콘 태양전지의 전면 텍스쳐링 (Front-side Texturing of Crystalline Silicon Solar Cell by Micro-contact Printing)

  • 홍지화;한윤수
    • 한국전기전자재료학회논문지
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    • 제26권11호
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    • pp.841-845
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    • 2013
  • We give a textured front on silicon wafer for high-efficiency solar cells by using micro contact printing method which uses PDMS (polydimethylsiloxane) silicon rubber as a stamp and SAM (self assembled monolayer)s as an ink. A random pyramidal texturing have been widely used for a front-surface texturing in low cost manufacturing line although the cell with random pyramids on front surface shows relatively low efficiency than the cell with inverted pyramids patterned by normal optical lithography. In the past two decades, the micro contact printing has been intensively studied in nano technology field for high resolution patterns on silicon wafer. However, this promising printing technique has surprisingly never applied so far to silicon based solar cell industry despite their simplicity of process and attractive aspects in terms of cost competitiveness. We employ a MHA (16-mercaptohexadecanoic acid) as an ink for Au deposited $SiO_2/Si$ substrate. The $SiO_2$ pattern which is same as the pattern printed by SAM ink on Au surface and later acts as a hard resist for anisotropic silicon etching was made by HF solution, and then inverted pyramidal pattern is formed after anisotropic wet etching. We compare three textured surface with different morphology (random texture, random pyramids and inverted pyramids) and then different geometry of inverted pyramid arrays in terms of reflectivity.

표면 거칠기와 분포 상태에 따른 Si-셀 효율에 관한 연구 (Study on the Efficiency of Si-cell Depending on the Texturing)

  • 오데레사
    • 한국진공학회지
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    • 제20권3호
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    • pp.189-194
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    • 2011
  • 실리콘 태양전지는 KOH 에칭 용액을 이용하여 texturing 시간을 다르게 하는 방법으로 표면의 texturing 상태를 다양하게 제작하였다. 그리고 $POCl_3$ 공정을 이용하여 n형 불순물을 도핑하여 pn접합을 만들었으며, 알루미늄 후면전극과 은 전면전극을 이용하여 Si-cell을 제작하였다. 피라미드 구조가 가장 크고 표면에 고르게 형성된 태양전지 셀에서 F.F. 계수가 높게 나타났으며, 효율도 높게 나타났다. texturing 형성이 잘 이루어진 셀인 경우 빛을 많이 흡수할 수 있고 회로 내부적으로는 직렬저항성분이 감소하여 단락전류성분이 현저히 증가하게 되어 최종적으로 효율이 증가되는 것을 확인하였다.

표면결함식각 및 반사방지막 열처리에 따른 태양전지의 효율 개선 (Silicon Solar Cell Efficiency Improvement with surface Damage Removal Etching and Anti-reflection Coating Process)

  • 조찬섭;오정화;이병렬;김봉환
    • 반도체디스플레이기술학회지
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    • 제13권2호
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    • pp.29-35
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    • 2014
  • In this study general solar cell production process was complemented, with research on improvement of solar cell efficiency through surface structure and thermal annealing process. Firstly, to form the pyramid structure, the saw damage removal (SDR) processed surface was undergone texturing process with reactive ion etching (RIE). Then, for the formation of smooth pyramid structure to facilitate uniform doping and electrode formation, the surface was etched with HND(HF : HNO3 : D.I. water=5 : 100 : 100) solution. Notably, due to uniform doping the leakage current decreased greatly. Also, for the enhancement and maintenance of minority carrier lifetime, antireflection coating thermal annealing was done. To maintain this increased lifetime, front electrode was formed through Au plating process without high temperature firing process. Through these changes in two processes, the leakage current effect could be decreased and furthermore, the conversion efficiency could be increased. Therefore, compared to the general solar cell with a conversion efficiency of 15.89%, production of high efficiency solar cell with a conversion efficiency of 17.24% was made possible.