Browse > Article
http://dx.doi.org/10.21218/CPR.2017.5.2.059

Effect on the Pyramid Structure with Saw Mark Density of Silicon Wafer Surface  

Lee, Min Ji (Department of IT Convergence, Korea National University of Transportation)
Park, Jeong Eun (Department of Electronic Engineering, Korea National University of Transportation)
Lee, Young Min (Department of IT Convergence, Korea National University of Transportation)
Kang, Sang Muk (Department of IT Convergence, Korea National University of Transportation)
Lim, Donggun (Department of IT Convergence, Korea National University of Transportation)
Publication Information
Current Photovoltaic Research / v.5, no.2, 2017 , pp. 59-62 More about this Journal
Abstract
Surface texturing is affected the uniformity and size of pyramid with saw mark defect density. To analysis the influence of the saw mark defect density, we textured various si wafer. When the texturing process proceeds without the saw mark removal, silicon wafer of low-saw mark defect density showed small pyramid size of $3.5{\mu}m$ with the lowest average value of the reflectance of 10.6%. When texturing carried out after removal of the saw mark using the TMAH solution, we obtained a reflectance of about 11% and the large pyramid size of $5{\mu}m$. As a result, saw mark wafers showed a better pyramid structure than saw mark-free wafer. This result showed that saw mark can take place more smooth etching by the KOH solution and saw mark-free wafer is determined to be a factor that have a higher reflectance and a large pyramid.
Keywords
c-Si solar cell; Saw mark; Texturing; TMAH; Pyramid structure;
Citations & Related Records
연도 인용수 순위
  • Reference
1 H.A. Aulich et al., "Large Scale Crystallisation and Wafer Production - The Way to 2020", 25th European Photovoltaic Solar Energy Conference Exhibition/5th World Conference on Photovoltaic Energy Conversion, pp.1066-1072, 2010.
2 MARTIN A. Green et al, "High-Efficiency Silicon Solar Cells", IEEE, NO.5, pp. 679-683, 1984.
3 J. S. Kim et al., "Low reflectance in crystalline si solar cell using RIE texturing", 23th EUPVSEC, pp. 1499-1502, 2008.
4 D. S. Ruby, S. H. Zaihi, and S. Narayanan, "Plasma-texturization for multicrystalline silicon solar cells", 28th IEEE, pp. 75-78, 2000.
5 E. Yablonovitch, "Statistical ray optics", Journal of the Optical Society of America, Vol. 72, No. 7, pp.899-907, 1982.   DOI
6 B. M. Damiani, and A. Rohatgi, "Development of RIE-Textured silicon solar cells", IEEE, pp. 371-374, 2000.