• Title/Summary/Keyword: Pulsed Laser deposition

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X-Band Phased Array Antenna Using Ferroelectric $(Ba,Sr)TiO_3$ Coplanar Waveguide Phase Shifter

  • Moon, Seung-Eon;Ryu, Han-Cheol;Kwak, Min-Hwan;Kim, Young-Tae;Lee, Su-Jae;Kang, Kwang-Yong
    • ETRI Journal
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    • v.27 no.6
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    • pp.677-684
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    • 2005
  • A phased array antenna was fabricated using four-element ferroelectric phase shifters with a coplanar waveguide (CPW) transmission line structure based on a $Ba_{0.6}Sr_{0.4}TiO_3(BST)/MgO$ structure. Epitaxial BST films were deposited on MgO (001) substrates by pulsed laser deposition. To attain the large differential phase shift and small losses for a ferroelectric CPW phase shifter, an impedance-matching-part adding technique between the effective transmission line and connecting cable was used. The return loss and insertion loss for this techniqueadapted BST CPW device were improved with respect to those for a normal BST CPW device. For an X-band phased array antenna system consisting of ferroelectric BST CPW phase shifters, power divider, dc block, patch antenna, and programmed dc power, the steering beam could be tilted by $15^{\circ}$ in either direction.

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Synthesis of Semiconducting $KTaO_3$ Thin films (KTaO3 Thin Film의 Semiconducting 합성)

  • Koo, Ja-Yl;Ohm, Woo-Yong;Ahn, Chang-Hwan;Bae, Hyung-Jin
    • Proceedings of the IEEK Conference
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    • 2006.06a
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    • pp.981-982
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    • 2006
  • In this study, the synthesis and semiconducting properties of cation and defect-doped KTaO3 film is reported. KTaO3is an important material for optoelectronic and tunable microwave applications. It is an incipient ferroelectric with a cubic structure that becomes ferroelectric when doped with Nb. the films were grown on (001) MgO single crystal substrates using pulsed-laser deposition. Semiconducting behavior is achieved by inducing oxygen vacancies in the KTaO3 lattice via growth in a hydrogen atmosphere. The resistivity of semiconducting KTaO3:Ca films was as low as 10cm, and n-type semiconducting behavior was indicated. Hall mobility and carrier concentration were 0.27 cm2/Vs and 3.21018cm-3.

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Mechanical Characteristics of ZnO Thin Films on Si Substrates by Nano Indentation Technology (나노인덴테이션기법을 이용한 ZnO/Si 박막의 기계적 특성)

  • Yoon, Han-Ki;Jung, Hun-Chae;Sohn, Jong-Yoon;Yu, Yun-Sik
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.138-143
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    • 2004
  • Recently there has been a great world-wide interest in developing and characterizing new nano-structured materials. These newly developed materials are often prepared in limited quantities and shapes unsuitable for the extensive mechanical testing. The development of depth sensing indentation methods have introduced the advantage of load and depth measurement during the indentation cycle. In the present work, ZnO thin films are prepared on Si(111), Si(100) substrates at different temperatures by pulsed laser deposition(PLD) method. Because the potential energy in c-axis is low, the films always show c-axis orientation at the optimized conditions in spite of the different substrates. Thin films are investigated by X-ray diffractometer and Nano indentation equipment. From these measurements it is possible to get elastic modulus and hardness of ZnO thin films on Si substrates.

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Microwave performance of High Tc Superconducting Double Ring Resonator (고온초전도 박막을 이용한 두 고리형 공진소자의 고주파 특성)

  • Song, Seung-Yong;Lee, Jo-Yong;Choe, Seon-Ung;Song, Gi-Yeong
    • Korean Journal of Materials Research
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    • v.7 no.5
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    • pp.431-433
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    • 1997
  • We investigated a double ring resonator(DRR)device to improve the resonating Q value of a superconductor resonator. To make a DRR device, we made a large area YBCO film on a MgO substrate by pulsed laser deposition(PLD). Thetransition temperature was 88 K and the film was uniformly deposited. We also deposited 500$\AA$SrTiO$_{3}$on the YBCO thin film to protect the superconducting properties from degradation. The loaded Q value was measured as 50000 from simulation and as 2000 from experiment near 10GHz at 77K.

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Effects of Codoping with Fluorine on the Properties of ZnO Thin Films

  • Heo, Young-Woo;Norton, D.P.
    • Journal of the Korean Ceramic Society
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    • v.43 no.11 s.294
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    • pp.738-742
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    • 2006
  • We report on the effects of co-doping with fluorine on properties of ZnO thin films grown by pulsed-laser deposition. The transport characteristics of Ag-F and Li-F codoped ZnO films were determined by Hall-effect measurements at room temperature. Ag-F codoped ZnO films showed n-type semiconducting behaviors. An ambiguous carrier type was observed in Li-F codoped ZnO films grown at a temperature of 500$^{\circ}C$ with the oxygen pressures of 20 and 200 mTorr. The qualities of the codoped ZnO films were studied by X-ray diffraction, atomic force microscopy, X-ray photoemission spectroscopy, and photoluminescence.

UV and visible emission intensity control of ZnO thin films for light emitting device applications (발광소자 응용을 위한 ZnO 박막의 자외선 및 가시광 발광 세기 제어)

  • 강홍성;심은섭;강정석;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.108-111
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    • 2001
  • ZnO thin films on (001) sapphire substrates knave been deposited by pulsed laser deposition(PLD) technique for light emitting device applications. We have controlled the emission intensity of UV and visible light, depending on film thickness and various post-annealing time. UV emission became strong as the thickness of ZnO thin films increased. The intensity of visible light was strong as post-annealing temperature increased. The optical properties of the ZnO thin films were characterized by PL(photoluminescence) and the structural properties of the ZnO were characterized by XRD for the application of ZnO light emission device.

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Highly-Efficient Optical Gating in Vanadium Dioxide Junction Device

  • Lee, Yong-Wook
    • Journal of Sensor Science and Technology
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    • v.20 no.4
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    • pp.230-233
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    • 2011
  • In this paper, highly-efficient optical gating in a junction device based on vanadium dioxide($VO_2$) thin film grown by a sol-gel method was investigated as a gate terminal of a three-terminal device using infrared light with a wavelength of ~1554.6 nm. Due to the photoinduced phase transition, the threshold voltage of the $VO_2$ junction device, at which the device current abruptly jumps, could be tuned with a sensitivity of ~96.5 V/W by adjusting the optical power of the infrared light directly illuminating the device. Compared with the tuning efficiency of the previous device fabricated using $VO_2$ thin film deposited by a pulsed laser deposition method, the threshold voltage of this device could be tuned by ~76.8 % at an illumination power of ~39.8 mW resulting in a tuning efficiency of ~1.930 %/mW, which is ~4.9 times larger than the previous device.

Characterization of Al:ZnO thin films deposited at different substrate temperatures (기판 온도변화에 따른 Al-ZnO 박막의 특성)

  • No, I.J.;Shin, P.K.;Lee, C.;Kim, Y.H.;Ji, S.H.;Lim, Y.C.;Chung, M.Y.
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.242-243
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    • 2007
  • Highly transparent conducting aluminum-doped zinc oxide (AZO) thin films were deposited on Corning glass substrate using an Nd:YAG pulsed laser deposition technology. AZO thin films deposited with 650nm thickness showed the best electrical properties of the electrical resistivity of $4.6{\times}10^{-4}[{\Omega}{\cdot}cm]$, a carrier concentration of $9.3{\times}10^{20}[cm^{-3}]$, and a carrier mobility of $31[cm^2/V{\cdot}s]$. Besides, the optical transmittance spectra in visible region (200-800nm) of AZO thin films show an high average transmittance over 90%.

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Characterization of Al:ZnO thin films deposited at different oxygen pressure (산소 분위기압의 변화에 따른 Al:ZnO 박막의 특성)

  • No, I.J.;Kim, Il;Shin, P.K.;Song, J.H.;Kim, Y.W.;Kim, C.Y.;Jeung, Y.S.
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1349-1350
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    • 2007
  • Epitaxial thin films of aluminum-doped zinc oxide (AZO) have been deposited on commercial corning glass using an Nd:YAG pulsed laser deposition technology. The structural, electrical and optical properties of these films were investigated as a function of oxygen pressure. The experimental results show that the electrical resistivity of films deposited at 5 mTorr with substrate temperature of $300^{\circ}C$ were $4.633{\times}10^{-4}$. The average transmission of AZO thin films in the visible range were over 90%.

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Frequency Response of Superconducting Filter with Center Frequency 22 GHz (22 GHz 초전도 필터의 주파수 응답 특성 분석)

  • 김철수;송석천;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.794-797
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    • 2000
  • The fabrication of high quality superconducting thin films using pulsed laser deposition (PLD) has been reported to find optimized processing conditions and to make the millimeter-wave devices. High temperature superconducting (HTS) YBCO films were prepared on MgO (10${\times}$10${\times}$0.5mm) substrates by the PLD. The 3 pole bandpass filter with the center frequency of 22 GHz for satellite communication was designed consisting of hairpin coupled-lines to reduce the configuration in size. YBCO films are c-axis oriented and show superconductive transition temperatures of 88∼89 K with the transition widths < 0.5 K. The insertion loss of passband at 70 K was about 5 dB. The measured frequency response of superconducting filter will be compared with the simulation result.

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