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http://dx.doi.org/10.4191/KCERS.2006.43.11.738

Effects of Codoping with Fluorine on the Properties of ZnO Thin Films  

Heo, Young-Woo (Department of Inorganic Materials Engineering, Kyungpook National University)
Norton, D.P. (Department of Materials Science and Engineering, University of Florida)
Publication Information
Journal of the Korean Ceramic Society / v.43, no.11, 2006 , pp. 738-742 More about this Journal
Abstract
We report on the effects of co-doping with fluorine on properties of ZnO thin films grown by pulsed-laser deposition. The transport characteristics of Ag-F and Li-F codoped ZnO films were determined by Hall-effect measurements at room temperature. Ag-F codoped ZnO films showed n-type semiconducting behaviors. An ambiguous carrier type was observed in Li-F codoped ZnO films grown at a temperature of 500$^{\circ}C$ with the oxygen pressures of 20 and 200 mTorr. The qualities of the codoped ZnO films were studied by X-ray diffraction, atomic force microscopy, X-ray photoemission spectroscopy, and photoluminescence.
Keywords
ZnO; p-type; Codoping;
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