• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.456-459
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• 2002

This paper describes fabrication and characteristics of ceramic pressure sensor for working at high temperature. The proposed pressure sensor consists of a Ta-N thin-film, patterned on a Wheatstone bridge configuration, sputter deposited onto thermally oxidized Si membranes with an aluminium interconnection layer. The fabricated pressure sensor presents a low temperature coefficient of resistance, high sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.097~1.21mV/$V{\cdot}kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.55 no.2
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• pp.89-93
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• 2006

Recently as a people recognize a safety more about a high and large buildings the importance of a fire-damper which supplies fresh air into the building in case of fire increases greatly. Therefore, in this paper a fire-damper using a micro-controller is designed and fabricated. In the design of fire-damper a pressure sensor is modeled as a capacitor and the p-spice is used as a circuit simulator PIC16F72 is used as a micro-controller to drive a pressure sensor and to display a pressure value from the pressure sensor and to drive a motor to open and close a damper. A photo-coupler is used to protect a motor from a overcurrent.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.561-564
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• 2000

Silicon capacitive pressure sensor has been fabricated by using electrochemical etching stop and silicon-to-glass electrostatic bonding technique. A diaphragm structure is designed to compensate the nonlinear response. A cavity is etched into the silicon to the depth of 2$\mu\textrm{m}$ by anisotropic etching in 20wt.% TMAH solution at 80$^{\circ}C$. A fabricated sensor showed 3.3 pF zero-pressure capacitance, 297 pp.m/mmHg sensitivity, and a 7.4 7%F.S. nonlinear response in a 0-1 kgf/cm$^2$pressure range.

• International journal of advanced smart convergence
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• v.8 no.2
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• pp.227-236
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• 2019

In this study, we develop a Korotkoff sound based automatic blood pressure measurement device including sensor, hardware, and analysis algorithm. PVDF-based sensor pattern was developed to function as a vibration sensor to detect of Korotkoff sounds, and the film's output was connected to an impedance-matching circuit. An algorithm for determining starting and ending points of the Korotkoff sounds was established, and clinical data from subjects were acquired and analyzed to find the relationship between the values obtained by the auscultatory method and from the developed device. The results from 86 out of 90 systolic measurements and 84 out of 90 diastolic measurements indicate that the developed device pass the validation criteria of the international protocol. Correlation coefficients for the values obtained by the auscultatory method and from the developed device were 0.982 and 0.980 for systolic and diastolic blood pressure, respectively. Blood pressure measurements based on Korotkoff sound signals obtained by using the developed PVDF film-based sensor module are accurate and highly correlated with measurements obtained by the traditional auscultatory method.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.15 no.11
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• pp.3875-3891
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• 2021

In this study, a Velostat pressure sensor was manufactured to develop a plantar pressure measurement system and a C#-based application was developed to monitor and collect plantar pressure data in real time. In order to evaluate the characteristics of the proposed plantar pressure measurement system, the accuracy of plantar pressure index and personal classification was verified by comparing with MatScan, a commercial plantar pressure measurement system. As a result, the output characteristics according to the weight of the Velostat pressure sensor were evaluated and a trend line with the reliability of r² = 0.98 was detected. The Root Mean Square Error(RMSE) of the weighted area was 11.315 cm², the RMSE of the x coordinate of Center of Pressure(CoP_x) was 1.036 cm and the RMSE of the y coordinate of Center of Pressure(CoP_y) was 0.936 cm. Finally, inaccuracy of personal classification, the proposed system was 99.47% and MatScan was 96.86%. Based on the advantage of being simple to implement and capable of manufacturing at low cost, it is considered that it can be applied to various fields of measuring vital signs such as sitting posture and breathing in addition to the plantar pressure measurement system.

• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.1-5
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• 2008

In this paper, we fabricated pressure difference type gas flow sensor using only dry etching technology by ICP-RIE(inductive coupled plasma reactive ion etching). The sensor's structure consists of a common shear stress type piezoresistive pressure sensor with an orifice fabricated in the middle of the sensor diaphragm. Generally, structure like diaphragm is fabricated by wet etching technology using TMAH, but we fabricated diaphragm by only dry etching using ICP-RIE. To equalize the thickness of diaphragm we applied insulator($SiO_2$) layer of SOI(Si/$SiO_2$/Si-sub) wafer as delay layer of dry etching. Size of fabricated diaphragm is $1000{\times}1000{\times}7\;{\mu}m^3$ and overall chip $3000{\times}3000{\times}7\;{\mu}m^3$. We measured the variation of output voltage toward the change of gas pressure to analyze characteristics of the fabricated sensor. Sensitivity of fabricated sensor was relatively high as about 1.5mV/V kPa at 1kPa full-scale. Nonlinearity was below 0.5%F.S. Over-pressure range of the fabricated sensor is 100kPa or more.

• IEMEK Journal of Embedded Systems and Applications
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• v.6 no.4
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• pp.209-214
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• 2011

This study suggests a Healthcare System for elderly and disabled who have mobility impairment and use a wheelchair for long time. Seating long time in a wheelchair without reducing pressure causes high risk of developing pressure sores. Pressure sores come with great deal of pain and often lead to develop complication. Not only it takes time and effort to treat pressure sores but also increases medical expenses. Therefore, we will develop a device to help to prevent pressure sores by measuring pressure distribution while seating in a wheelchair and wirelessly send information to user device to check pressure distribution in real time. The equipment to measure body pressure is composed of FSR sitting mat which is a sensor measuring part and an user terminal which is a monitoring part. The designed mat is matrix formed FSR sensor to measure pressure. The sensor send measured data to the controller which is connected to the end of the mat, and then the collected data are sent to an user terminal through a bluetooth. Developing a pressure monitoring system will help to prevent those who have mobility impairment to manage pressure sores and furthermore relieve their burden of medical expenses.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.380-382
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• 2007

As the society changes more to the aging society in future, many healthcare product are developed and distributed more on the market. The digital wrist band tye blood pressure device for home use are popular already in the market. It is useful for checking blood pressure level at home and control of hypertension. Especially. It is very essential home device to check the health condition of blood circulation disease. Nowadays many product types are available. But the measurement accuracy of blood pressure is not enough compared to the mechanical type. It needs to be upgraded to assure the precise health data enough to use in the hospital. The structure, feature and output signal of capacitor type pressure sensors are analyzed. An improved design fa capacitor sensor is suggested. It shows more precise health data after use on a wrist band type health unit. They can be applied for remote u-health medical service.

• Journal of the Korean Society of Clothing and Textiles
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• v.46 no.5
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• pp.827-835
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• 2022

Clothing pressure is considered the essential factor affecting the comfort of clothing, so it is crucial that it is measured precisely. The purpose of this study is to construct a prototype using the Adafruit Flora as the Arduino system, which can be used as a wearable framework for easy, low-cost, and precise clothing pressure measurement. The study also aims to determine how best to conduct the procedure of sensor calibration. To optimize the accuracy of the sensors, the calibration procedure was implemented using mathematical methods that combined polynomial and exponential regression in a hybrid approach. The prototype can easily measure clothing pressure even during active movements, as seen in the detection of stable signals. In addition, since the system was specifically proposed as a wearable patch that can be easily attached and removed as necessary, it can also be used to standardize the value of clothing pressure in each movement.

• Journal of Sensor Science and Technology
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• v.32 no.1
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• pp.22-30
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• 2023

Innovative and advanced technologies, including robots, augmented reality, virtual reality, the Internet of Things, and wearable medical equipment, have largely emerged as a result of the rapid evolution of modern society. For these applications, pressure monitoring is essential and pressure sensors have attracted considerable interest. To improve the sensor performance, several new designs of pressure sensors have been researched based on resistive, capacitive, piezoelectric, optical, and triboelectric types. In particular, optical pressure sensors have been actively studied owing to their advantages, such as robustness to noise and remote sensing capability. Herein, a review of recent research on optical pressure sensors with self-powered sensing, remote sensing, high spatial resolution, and multimodal sensing capabilities is presented from the viewpoints of design, fabrication, and signal processing.