• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.414-420
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• 2015

In this study, the linear quadratic Guassian loop transfer recovery (LQG/LTR) control technique was combined with an integrator and applied to an inchworm having piezoelectric actuators for precise motion tracking. The piezoelectric actuator showed nonlinear response characteristics, including hysteresis, due to its ferroelectric characteristics and the residual displacement phenomenon. This paper proposes a feedback control scheme using the LQG/LTR controller with an integrator to improve the ability to track the response to complex input signals and to suppress the phenomenon of hysteresis and residual vibration. Experimental results show that the developed feedback control system for an inchworm can track the various motion contours quickly without residual vibration or overshoot.

• Journal of Institute of Convergence Technology
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• v.3 no.1
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• pp.1-8
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• 2013

High-precision surface actuator, in which in-plane motion is realized by not two-dimensional actuator superposing linear actuators but integrated planar actuator, has been developed to cope with the severe target performance like precise motion with large envelope. It is very difficult to accomplish the performance with the traditional actuating principle. So, various methods have been tried to break through the problem. This paper discusses some meaningful trials performed in the Nano Measurement and Precision Motion Control Lab. of Korea National University of Transportation.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.12
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• pp.45-52
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• 1995

A prototype of a linear piezoelectric actuator is developed and its dynamic behaviors are investigated. The actuator consists of a driving tip with two stacked piezoelectric elements and a slider. Dynamic characteristics of slider over various vibration lici of the driving tip and changes of normal force acting on the vibratory tip are examined through experiments. The moving direction of slider can be controlled by changing a phase angle between input signals applied to piezoelectric elements. A change of phase difference between input signals also have a great influence on the vibration locus of driving tip. Changes of slider motion due to different vibration loci are examined by experiments.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2000.04a
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• pp.291-296
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• 2000

Liner DC motors are widely used for servo-actuator, which would be applied for semiconductor equipments and precise machining systems. we have been developed linear DC motor with high speed, acceleration and position accuracy. From performance test, the position accuracy. From performance test, the position and repeatability accuracy were able to be controlled with 10 ${\mu}{\textrm}{m}$ and $\pm$1 ${\mu}{\textrm}{m}$, respectively. The highest acceleration and speed were obtained 3 G and 2m/sec, respectively. Static thrust force was 270N, and then error was 25%.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.465-472
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• 2012

This paper describes a new robust control algorithm which can be used to enhance the positioning performance of an ultra-precision positioning system. The working table is supported by flexure hinges and moved by a piezoelectric actuator, whose position is measured by an ultra-precise linear encoder. The system dynamics is very complicated because the movement of the table is governed by both the mechanical characteristics and those of the PZT actuator. So that, the dynamics of the stage was modeled roughly in this paper, and the overall system was formularized to solve the small gain problem. A series of experiments was conducted in order to verify the usefulness of the proposed algorithm. From the experimental results, the positioning performance such as the accuracy, the rise time and the hysteresis nonlinearity were greatly improved.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.4
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• pp.3-9
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• 2007

Existing long range piezoelectric motors with friction based transmission mechanisms are limited by the axial load capacity. To overcome this problem, a new linear piezoelectric motor using one piezoelectric actuator combined with a novel stepping mechanism is reported in this paper. To obtain both long range and fine accuracy, dual positioning control strategy consisting of coarse positioning and fine positioning is used. Coarse positioning is used for long travel range by accumulating motion steps obtained by piezoelectric actuator. This is followed by fine positioning where required accuracy is obtained by fine motion displacement of piezoelectric actuator. This prototype is able to provide resolution of 20 nanometers and withstand a maximum axial load of 300N. At maximum load condition, the positioner can move forward to a travel distance of 5mm at a maximum speed of 0.4 mm/sec. This design of nanopositioner can be used in applications for ultra precision positioning and grinding operations where high axial force capacity is required.

• The Transactions of the Korean Institute of Electrical Engineers B
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• v.48 no.5
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• pp.241-248
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• 1999

Recently, many linear motion generators and motors are rapidly finding applications that ranges from short stroke linear motion vibrators, such as dynamic cone type loudspeakers to stirling engine driven linear reciprocating alternators, compressors, textile machines etc. The stroke-length may go up to 2m, and the maximum speed is in the range of 5 to 10m/s with oscillating frequency as high as 15 kHz. Therefore, the linear oscillating actuators(LOAs) may be considered as variable speed drivers of precise controller with stoke-length and reversal periods during the reciprocating motion. In this paper, the design, fabrication, experiments, and extraction of control parameters of a moving coil type LOA for driving of linear reciprocating motion control systems, are treated. The actuator consists of the NdFeB permanent magnets with high specific energy as the stator produced magnetic field, a coil-wrapped nonmagnetic hollow rectangular bobbin structure, and an iron core as a pathway for magnetic flux. Actually, the design is accomplished by using FEM analysis for the basic configuration of a magnetic circuit, and characteristic equations for coil design. In order to apply as the drivers of a linear motion reciprocating control system, the control parameters and circuit parameters, such as input voltage-stoke, exciting frequency-stoke, coil inductance and so on, are extracted from the analysis and experiments on concerning a fabricating LOA.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.4
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• pp.59-67
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• 2003

This paper presents a new approach for the use of smart materials, piezoelectric materials of PVDF and PZT, for vibration attenuation of a planar parallel manipulator. Since lightweight linkages of parallel manipulators deform under high acceleration/deceleration, an active damper is needed to attenuate vibration due to structural flexibility of linkages. Based on the dynamic model of a planar parallel manipulator, an active damping controller is developed, which consists of a PD feedback control scheme, applied to linear electrical motors, and a linear velocity feedback (L-type) scheme applied to either PVDF layer or PZT actuator(5). Simulation results show that piezoelectric materials yield good damping performance, resulting in precise manipulations of a planar parallel manipulator.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.