International Journal of Precision Engineering and Manufacturing

  • 제8권4호
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  • Pages.3-9
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  • 2007
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  • 2234-7593(pISSN)
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  • 2005-4602(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

Long Range and High Axial Load Capacity Nanopositioner Using Single Piezoelectric Actuator and Translating Supports

  • Juluri, Bala Krishna (School of Mechanical and Aerospace Engineering, Nanyang Technological University) ;
  • Lin, Wu (School of Mechanical and Aerospace Engineering, Nanyang Technological University) ;
  • Lim, Lennie E N (School of Mechanical and Aerospace Engineering, Nanyang Technological University)
  • 발행 : 2007.10.01
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초록

Existing long range piezoelectric motors with friction based transmission mechanisms are limited by the axial load capacity. To overcome this problem, a new linear piezoelectric motor using one piezoelectric actuator combined with a novel stepping mechanism is reported in this paper. To obtain both long range and fine accuracy, dual positioning control strategy consisting of coarse positioning and fine positioning is used. Coarse positioning is used for long travel range by accumulating motion steps obtained by piezoelectric actuator. This is followed by fine positioning where required accuracy is obtained by fine motion displacement of piezoelectric actuator. This prototype is able to provide resolution of 20 nanometers and withstand a maximum axial load of 300N. At maximum load condition, the positioner can move forward to a travel distance of 5mm at a maximum speed of 0.4 mm/sec. This design of nanopositioner can be used in applications for ultra precision positioning and grinding operations where high axial force capacity is required.

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