1 |
Ngoi, K. A., Wu, L. and Lim, E. N., 'New linear piezoelectric motor with self-lock feature,' Japanese Journal of Applied Physics, Part 2: Letters, Vol. 39, No. 2B, pp. 1311-1313, 2000
DOI
ScienceOn
|
2 |
Physik Instrumente(PI) 'Product Catalog: Nanopositioning,' Physik Instrumente (PI), pp. 1.24-1.25, 1998
|
3 |
May, W. G., 'Piezoelectric electromechanical translational apparatus,' US Patent No: 3902084, 1975
|
4 |
Kartaschew, I., Vishnevsky, V., Gultiaeva, L. and Lavrinenko, V., 'Piezoelectric motor,' Russian patent, CCCP No. 851560
|
5 |
Elfizy, A. T., Bone, G. M. and Elbestawi, M. A., 'Design and control of a dual stage feed drive,' International Journal of Machine Tools and Manufacture, Vol. 45, No. 2, pp. 153-165, 2005
DOI
ScienceOn
|
6 |
Yamagata, Y. and Higuchi, T., 'A micropositioning device for precision automatic assembly using impact force of piezoelectric elements,' In Proc. IEEE conference of Robotics and Automation, Vol. 1, pp. 666-671, 1995
|
7 |
Renishaw Transducer System Ltd., 'Laser Measurement system- User Manual,' Renishaw Transducer System Ltd., U.K., 1989
|
8 |
Fukada, S. and Nishimura, K., 'Nanometric positioning over a one-millimeter stroke using a flexure guide and electromagnetic linear motor,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 49-53, 2007
과학기술학회마을
|
9 |
Pohl, D. W., 'Dynamic piezoelectric translation devices,' Review of Scientific Instruments, Vol. 58, No. 1, pp. 54-57, 1987
DOI
|
10 |
Sato, K., Murayama, Y., Imada, S. and Shimokohbe, A., 'An active lead screw mechanism-a lead screw with backlash control for ultra precision positioning,' In Proc. ASPE Annu. Meeting, pp. 112-115, 1992
|
11 |
Zhu, Z., 'Design of a linear piezomotor for positioning feed drives,' PhD thesis, Univ. of Connecticut, Hartford, CT, 1995
|
12 |
Miyashita, M., Kanai, A. and Yoshioka, J., 'Design concept of ultraprecision and high stiffness feed system based on differentialforce operation, and the application,' In Proc. ASPE Annu. Meeting, pp. 126-129, 1992
|
13 |
Fukada, S., 'Present and future technology of ultraprecision positioning,' Fuji Techno System, pp. 658-663, 2000
|
14 |
Moon, C. W., Lee, S. H. and Chung, J. K., 'New inchworm type actuator with I/Q heterodyne interferometer feedback for a long stroke precision stage,' International Journal of Precision Engineering and Manufacturing, Vol. 6, No. 2, pp. 34-39, 2005
과학기술학회마을
|
15 |
Uchino, K., 'Piezoelectric actuators and ultrasonic motors,' Kluwer Academic Publishers, 1996
|
16 |
Isobe, H., Fushimi, M., Ootsuka, M. and Kyusojin, A., 'Noncontact transportation of flat panel substrate by combined ultrasonic acoustic viscous and aerostatic forces,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 2, pp. 44-48, 2007
과학기술학회마을
|