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http://dx.doi.org/10.7735/ksmte.2012.21.3.465

Design of a Controller for Enhancing Positioning Performance of a PZT Driven Stage  

Park, J.S. (휴니드)
Jeong, Kyu-Won (충북대학교 기계공학부)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.21, no.3, 2012 , pp. 465-472 More about this Journal
Abstract
This paper describes a new robust control algorithm which can be used to enhance the positioning performance of an ultra-precision positioning system. The working table is supported by flexure hinges and moved by a piezoelectric actuator, whose position is measured by an ultra-precise linear encoder. The system dynamics is very complicated because the movement of the table is governed by both the mechanical characteristics and those of the PZT actuator. So that, the dynamics of the stage was modeled roughly in this paper, and the overall system was formularized to solve the small gain problem. A series of experiments was conducted in order to verify the usefulness of the proposed algorithm. From the experimental results, the positioning performance such as the accuracy, the rise time and the hysteresis nonlinearity were greatly improved.
Keywords
Ultra-precision stage; Flexure hinge; Piezoelectric actuator; Hysteresis; Robust control; Feed-forward compensator;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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