• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1394-1397
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• 2005

The object of this study was to design of micro stage, which is one of the equipments embodied in ultra precision positioning mechanism. Design factors for micro stage were decided a roundness of hinge, a thickness of hinge, a thickness of stage, a length of arms and a clearance of division. To obtain the $1^{st}$ natural frequency and equivalent stresses, FEM simulation was performed using the table of orthogonal arrays and Taguchi method was used to determine the optimal design parameters. As results of this study, the size of 1st natural frequency and equivalent stresses on micro stage was influenced significantly by a thickness of hinge and a length of arm.

• 한국정보통신학회논문지
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• 제10권7호
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• pp.1332-1337
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• 2006

이동로봇의 위치추정오차를 검출하는 방법으로 칼만필터의 잔류오차를 최소적응알고리즘으로 검사하여 시스템의 이상유무를 확인할 수 있음을 알아보았다. 이동로봇의 이상유무판별에 칼만필터를 적용하기 위한 모델로는 위치이동에 기여하는모터부분의 모델만을 사용하였고, 칼만필터의 잔류오차에 나타나는 바이어스성분의 검출로 이상유무를 판별할 수 있음을 확인하였다. 이동로봇의 동특성모델을 이용하여 이동로봇의 위치추정에 나타나는 오차를 판별할 수 있는 제안된 방법은 다른 부가적인 외부장치가 없이 사용될 수 있는 장점이 있다 . 칼만필터는 모터의 구동전류를 추정하고, 이 잔류오차에 적응자기동조필터를 적용하여 백색잡음의 성질을 지닌 잔류오차를 판별하게 된다. 이동로봇의 모델에 가능한 상황을 가정하여 구성한 시뮬레이션의 결과들은 제안된 방법이 위치추정 오차의 판별에 사용될 수 있음을 보여주고 있다.

• International Journal of Precision Engineering and Manufacturing
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• 제8권2호
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• pp.70-74
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• 2007

This paper describes the development of a nano-positioning system for nanoscale science and engineering. Conventional positioning systems, which can be expensive and complicated, require the use of laser interferometers or capacitive transducers to measure nanoscale displacements of the stage. In this study, a new self-displacement sensing (SDS) nano-stage was developed using mechanical magnification of its displacement signal. The SDS nano-stage measured the displacement of its movement using a position-sensitive photodiode (PSPD), a laser source, and a hinge-connected rotating mirror plate. A beam from a laser diode was focused onto the middle of the plate with the rotating mirror. The position variation of the reflected beam from the mirror rotation was then monitored by the PSPD. Finally, the PSPD measured the amplified displacement as opposed to the actual movement of the stage via an optical lever mechanism, providing the ability to more precisely control the nanoscale stage. The displacement amplification process was modeled by structural analysis. The simulation results of the amplification ratio showed that the distance variation between the PSPD and the mirror plate as well as the length L of the mirror plate could be used as the basic design parameters for a SDS nano-stage. The PSPD was originally designed for a total travel range of 30 to 60 mm, and the SDS nano-stage amplified that range by a factor of 15 to 25. Based on these results, a SDS nano-stage was fabricated using principle of displacement amplification.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• 한국정밀공학회지
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• 제31권3호
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• pp.277-283
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• 2014

This paper presents the design, optimization and fabrication of a piezo driven micro-positioning stage constructed using a 3D-printer. 3D printing technology provides many advantageous aspects in comparison to traditional manufacturing techniques allowing more rapid prototyping freedom in design, etc. Micro-positioning stages have traditionally been made using metal materials namely aluminum. This paper investigates the possibility of fabricating stages using ABS material with a 3D printer. CAE simulations show that equivalent motion amplification can be achieved compared to a traditional aluminum fabricated stage while the maximum stress is 30 times less. This leads to the possibility of stages with higher magnification factors and less load on the driving piezo element. Experiment results agree with the simulation results. A micro-position stage was fabricated using a 3D printer with ABS material. The motion amplification is very linear and 50 nm stepping was demonstrated.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.503-504
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 춘계학술대회 논문집
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• pp.75-76
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• 2012

• 대한기계학회논문집A
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• 제22권2호
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• pp.372-379
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• 1998

A new 6 degrees-of-freedom micro stage, based on parallel mechanisms and actuated by using piezoelectric elements, has been developed for the application of micro positioning such as semiconductor manufacturing devices, high precision optical measurement systems, and high accurate machining. The micro stage structure consists of a base platform and an upper platform(stage). The base platform can effectively generates planar motion with yaw motion, while the stage can do vertical motion with roll and pitch motions with respect to the base platform. This separated structure has an advantage of less interference among actuators. The forward and inverse kinematics of the micro stage are discussed. Also, through linearization of kinematic equations about an operating point on the assumption that the configuration of the micro stage remains essentially constant throughout a workspace is performed. To maximize the workspace of the stage relative to fixed frame, an optimal design procedure of geometric parameter is shown. Hardware description and a prototype are presented. The prototype is about 150mm in height and its base platform is approximately 94mm in diameter. The workspace of the prototype is obtained by computer simulation. Kinematic calibration procedure of the micro stage and its results are presented.

• Journal of Mechanical Science and Technology
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• 제20권11호
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• pp.1834-1847
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• 2006

A robust minimum-time control (RMTC) strategy is addressed and it is extended to the dual-stage servo design. Rather than conventional switching type sub-optimal controls, it is a reference following control approach where the predetermined minimum-time trajectory (MTT) is tracked by the perturbation compensator based feedback controller. First, the minimum-time trajectory for a mass-damper system is derived. Then, the perturbation compensator to achieve robust tracking performance in spite of model uncertainty and external disturbance is suggested. The RMTC is also applied to the dual-stage positioner which consists of coarse actuator and fine one. To best utilize the actuation redundancy of the dual-stage mechanism, a null-motion controller to actively regulate the relative motion between the two stages is formulated. The performance of RMTC is validated through simulation and experiment.

• 한국정밀공학회지
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• 제24권3호
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• pp.124-133
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• 2007

Active vibration isolation systems need the following performance specifications which are different from those of existing positioning systems: usage of seismic sensors, strict suppression of phase lead/lag in signal processing for sensors and actuators, excellent control in low frequency range and so on. In consideration of such specifications, a 3-DOF precision stage for vibration isolation is designed and modeled based on the physical characteristics. Then the major parameters such as spring constants and damping coefficients are valued by the system identification method using empirical transfer function. Finite element analysis is used as a verification and simulation tool throughout this research. This paper lays the foundation for the future research on the control of the active vibration isolation system.