1 |
Jager, G., Hausotte, T., Manske, E., Buchner, H. J., Mastylo, R., Dorozhovets, N., Fubl, R. and Grunwald, R., 'Nanometrology-Nanopositioning-and Nanomeasuring Machine with integrated Nanoprobes,' Materials Science Forum, Vol. 505-507, pp. 7-12, 2006
DOI
|
2 |
Fan, K. C. and Chen, M. J., 'A 6-degree-of-freedom measurement system for the accuracy of X-Y stages,' Precision Engineering, Vol.24, pp.15-23, 2000
DOI
ScienceOn
|
3 |
Hutter, J. L., 'Comment on Tilt of Atomic Force Microscope Cantilevers: Effect on Spring Constant and Adhesion Measurements,' Langmuir, Vol. 21, pp.2630-2632, 2005
DOI
ScienceOn
|
4 |
Butt, H. J., Cappella, B. and Kappl, M., 'Force measurements with the atomic force microscope : Technique, interpretation and applications,' Surface Science Reports, Vol. 59, pp.1-152, 2005
DOI
ScienceOn
|
5 |
Beaulieu, L. Y., Godin, M., Laroche, O., Tabard-Cossa, V. and Grutter, P., 'Calibrating laser beam deflection system for use in atomic force microscopes and cantilever sensors,' Applied Physics Letters, Vol.88, pp.083108:1-083108:3, 2005
|
6 |
Vikram, C. S. and Caulfield, H. J., 'Position-sensing detector for logical operations using incoherent light,' Optical Engineering, Vol.44, pp.115201:1-115201:4, 2005
|
7 |
Huang, M. Z., Shi, L. Z., Wang, Y. X., Ni, Y., Li, Z. Q. and Ding, H. F., 'Development of a new signal processor for tetralateral position sensitive detector based on single-chip microcomputer,' Review of Science instruments, Vol. 77, pp.083301:1-083301:5, 2006
|
8 |
Jywe, W. Y. and Teng, Y. F., 'New nano-contouring measurement techniques for a nano-stage,' International Journal of Machine Tools & Manufacture, Vol.46, No.7-8, pp.869-877, 2005
DOI
ScienceOn
|
9 |
Binnig, G., Rohrer, H., Gerber, Ch. and Weibel, E., 'Surface studies by scanning tunneling microscopy,' Phys. Rev. Lett., Vol.49, No.57, pp.57-61, 1982
DOI
|
10 |
Binnig, G., Quate, C. F. and Gerber, Ch., 'Atomic force microscope,' Phys. Rev. Lett., Vol.56, No.930, pp.930-933, 1986
DOI
ScienceOn
|
11 |
Pohl, D. W., Denk, W. and Lanz, M., 'Optical stethoscopy: Image recording with resolution ,' Appl. Phys. Lett., Vol.44, No.7, pp.651-653, 1984
DOI
ScienceOn
|
12 |
Kim, E. Y., Lee, S. J. and Lee, D. W., 'A Study of Behavior Characteristics of Nano-Stage According to Hinge Structure,' Proceeding of the KSMPE Autumn Conference, pp.75-80, 2005
|