A Study on Design of Micro Stage using Design of Experiment

실험계획법을 이용한 마이크로 스테이지 설계에 관한 연구

The object of this study was to design of micro stage, which is one of the equipments embodied in ultra precision positioning mechanism. Design factors for micro stage were decided a roundness of hinge, a thickness of hinge, a thickness of stage, a length of arms and a clearance of division. To obtain the $1^{st}$ natural frequency and equivalent stresses, FEM simulation was performed using the table of orthogonal arrays and Taguchi method was used to determine the optimal design parameters. As results of this study, the size of 1st natural frequency and equivalent stresses on micro stage was influenced significantly by a thickness of hinge and a length of arm.