Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2005.06a
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- Pages.1394-1397
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- 2005
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- 2005-8446(pISSN)
A Study on Design of Micro Stage using Design of Experiment
실험계획법을 이용한 마이크로 스테이지 설계에 관한 연구
Abstract
The object of this study was to design of micro stage, which is one of the equipments embodied in ultra precision positioning mechanism. Design factors for micro stage were decided a roundness of hinge, a thickness of hinge, a thickness of stage, a length of arms and a clearance of division. To obtain the
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