• Journal of Surface Science and Engineering
• /
• v.54 no.6
• /
• pp.365-370
• /
• 2021

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y₂O₃ coated parts used for semiconductor and display plasma process equipment. CF₄, O₂, and Ar mixed gas were used for the plasma environment, and respective alconox, surfactant, and piranha solution was used for the cleaning process. After APS-Y₂O₃ was exposed to CF₄ plasma, the surface changed from Y₂O₃ to YF₃ and a large amount of carbon was deposited. For this reason, the plasma corrosion resistance was lowered and contamination particles were generated. We performed a cleaning process to remove the defect-inducing surface YF₃ layer and carbon layer. Among three cleaning solutions, the piranha cleaning process had the highest detergency and the alconox cleaning process had the lowest detergency. Such results could be confirmed through the etching amount, morphology, composition, and accumulated contamination particle analysis results. Piranha cleaning process showed the highest detergency, but due to the very large thickness reduction, the base metal was exposed and a large number of contaminated particles were generated. In contrast, the surfactant cleaning process exhibit excellent properties in terms of surface detergency, etching amount, and accumulated contamination particle analysis.

• Journal of Welding and Joining
• /
• v.14 no.6
• /
• pp.109-118
• /
• 1996

Al$_2$O$_3$-TiO$_2$powders of six different compositions were plasma-sprayed on Ti substrate. The spray powders and the spray coated layers were analysed and compared using SEM and X-RD. The elastic properties (specific elastic constant and damping coefficient) of the coated specimens were measured in order to select the optimum composition range of ceramics for use in a speaker diaphragm. A correlation between the microstructure and elastic properties was also investigated. When $Al_2$O$_3$powders with 0- 13% TiO$_2$were plasma sprayed, the coated layers were composed of metastable y-Al$_2$O$_3$with small amount of $\alpha$-Al$_2$O$_3$and the content of $\alpha$-Al$_2$O$_3$was increased with TiO$_2$content. Specific elastic constant was rapidly increased with 2 and 13% TiO$_2$addition to $Al_2$O$_3$. The internal damping was nearly unchanged with TiO$_2$content The specific elastic constant seemed to be dependent on the content of $\alpha$-Al$_2$O$_3$in the coated layer.

• Journal of Powder Materials
• /
• v.22 no.6
• /
• pp.413-419
• /
• 2015

Lanthanum zirconate, $La_2Zr_2O_7$, is one of the most promising candidates for next-generation thermal barrier coating (TBC) applications in high efficient gas turbines due to its low thermal conductivity and chemical stability at high temperature. In this study, bulk specimens and thermal barrier coatings are fabricated via a variety of sintering processes as well as suspension plasma spray in lanthanum zirconates with reduced rare-earth contents. The phase formation, microstructure, and thermo-physical properties of these oxide ceramics and coatings are examined. In particular, lanthanum zirconates with reduced rare-earth contents in a $La_2Zr_2O_7-4YSZ$ composite system exhibit a single phase of fluorite or pyrochlore after fabricated by suspension plasma spray or spark plasma sintering. The potential of lanthanum zirconate ceramics for TBC applications is also discussed.

• The Korean Journal of Ceramics
• /
• v.4 no.4
• /
• pp.340-344
• /
• 1998

Failure mechanisms were investigated for the two layer thermal barrier coatings consisting of NiCrAlY bond coat and $ZrO_2$-8wt.% $Y_2O_3$ ceramic coating during cyclic oxidation. $Al_2O_3$ developed at the ceramic coating/bond coat interface first, followed by the Cr/Ni rich oxides such as $NiCr_2O_4$ and $Ni(Al, Cr)_2O_4$ during cyclic oxidation. It was observed that the spalling of ceramic coatings took place primarily within the NiCrAlY bond coat oxidation products or at the interface between the bond coat oxidation products and zirconia based ceramic coating or the bond coat. It was also observed that the fracture within these oxidation products occurred with the formation of $Ni(Cr, Al)_2O_4$ spinel or Cr/Ni rich oxides. It was therefore concluded that the formation of these oxides was a life-limiting event for the thermal barrier coatings.

• Journal of Surface Science and Engineering
• /
• v.31 no.2
• /
• pp.91-100
• /
• 1998

NiCrAlY/YSZ(8wt%$Y_2O_3-ZrO_2$) functionally graded thermal barrier coating (FGC) layers on a Co-base superalloy (HAYNESS 188) substrate were fabstrate were fabicated using Ar shielded single torch air plasma spraying method. Functional grading with the stepwise compositional change throughout layer thickness. Microstructural observation trvealed a successful fabrication of NiCrAlY/YSZ FGC. From the results of the curvature measurement, adhesive strength measurement and thermal shock test for the FGC, it was concluded that the optimum conditions of functionally graded coating layer thinkness and compositional pattern exit to enhance the properties of FGC, which is closely related to the internal residual stess distribution witin it.

• Journal of the Microelectronics and Packaging Society
• /
• v.21 no.3
• /
• pp.25-29
• /
• 2014

Plasma organic thin film for PCB surface finish is a potential replacement of the conventional PCB finishes because of environment-friendly process, high corrosion-resistance and long shelf life over 1 year. In this study, solder joint properties of the plasma organic surface finish were estimated and compared with OSP surface finish. The plasma surface finish was deposited by chemical vapor deposition from fluorine-based precursors. The thickness of the plasma organic coating was 20 nm. Sn-3.0Ag-0.5Cu (SAC305) solder was used as solder joint materials. From a salt spray test, the plasma organic coating had higher corrosion resistance than the OSP surface finish. The spreadability of SAC305 on plasma organic coating was higher than that on OSP surface finish. SEM and TEM micrographs showed that the interfacial microstructure of the plasma surface finish sample were similar to that of the OSP sample. Solder joint strength of the plasma finish sample was also similar to that of the OSP finished sample.

• Korean Journal of Materials Research
• /
• v.25 no.10
• /
• pp.571-576
• /
• 2015

The effects of coating thickness on the delamination and fracture behavior of thermal barrier coating (TBC) systems were investigated with cyclic flame thermal fatigue (FTF) and thermal shock (TS) tests. The top and bond coats of the TBCs were prepared by electron beam-physical vapor deposition and low pressure plasma spray methods, respectively, with a thickness ratio of 2:1 in the top and bond coats. The thicknesses of the top coat were 200 and $500{\mu}m$, and those of the bond coat were 100 and $250{\mu}m$. FTF tests were performed until 1140 cycles at a surface temperature of $1100^{\circ}C$ for a dwell time of 5 min. TS tests were also done until more than 50 % delamination or 1140 cycles with a dwell time of 60 min. After the FTF for 1140 cycles, the interface microstructures of each TBC exhibited a sound condition without cracking or delamination. In the TS, the TBCs of 200 and $500{\mu}m$ were fully delaminated (> 50 %) within 171 and 440 cycles, respectively. These results enabled us to control the thickness of TBC systems and to propose an efficient coating in protecting the substrate in cyclic thermal exposure environments.

• Journal of Welding and Joining
• /
• v.26 no.4
• /
• pp.50-54
• /
• 2008

In this research, anode for SOFC has been manufactured from two different kinds of feedstock materials through thermal spraying process and the properties of the coatings were characterized and compared. One kind of feedstock was manufactured from spray drying method which includes nano-components of NiO, YSZ (300 nm) and graphite. And the other is manufactured by blending the micron size NiO coated graphite, YSZ and graphite powders as feedstock materials. Microstructure, mechanical properties and electrical conductivity of the coatings as-sprayed, after oxidation and after hydrogen reduction containing nano composite which is prepared from spray-dried powders were evaluated and compared with the same properties of the coatings prepared from blended powder feedstock. The coatings prepared from the spray dried powders has better properties as they provide larger triple phase boundaries for hydrogen oxidation reaction and is expected to have lower polarization loss for SOFC anode applications than that of the coatings prepared from blended feedstock. A maximum electrical conductivity of 651 S/cm at $800^{\circ}C$ was achieved for the coatings from spray dried powders which much more than that of the average value.

• Journal of Korean Ophthalmic Optics Society
• /
• v.15 no.4
• /
• pp.313-317
• /
• 2010

Purpose: The purpose of this study was to investigate the surface characteristics of plasma electrolytic oxidation (PEO) surface treatment on AZ31 magnesium alloy eyeglass frames. Methods: The plasma electrolytic oxidation (PEO) surface was created by varying the DC voltage. The oxidation layer of coating was measured using phase analysis by X-ray diffraction. The microstructural morphology was observed using a scanning electron microscopy. Coating layer and the concentration of elements were investigated using the energy dispersive X-ray spectra. Results: The MgO XRD peak was increased as the voltage increased, and the density of the surface oxide film was also increased. The changes in the composition of the EDS also showed a good agreement. Conclusions: The compound oxide crystallization of PEO oxide film layer was done by increasing formation of MgO as the voltage increased. The treatment at 65V and 60 sec showed the best results at surface state, contact angles and salt spray test.

• Proceedings of the KWS Conference
• /
• 2003.05a
• /
• pp.111-113
• /
• 2003

The existing heating unit is indirect-heating method that make use or the nichrome wire or halogen lamp. The indirect-heating method has the demerits of long warming time, high power consumption and many organization parts. In this study, the heating unit of direct-heating method manufactured as being the thermal spray coating of conductive heating material on the surface of heating unit in order to improve the demerits of indirect-heating method. And YSZ added Ni-20Cr that had moderate electrical resistivity was chosen of the conductive heating material.