• 한국생산제조학회지
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• 제23권4호
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• pp.361-367
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• 2014

Ultra-precision positioning plays a crucial role in emerging technologies such as electronics, bioengineering, optics, and various nanofabrication technologies. As a result, various nanopositioning methods have been presented. In particular, nanopositioning using a flexure mechanism and piezo-electric actuator is one of the most valuable methods because of its friction-free motion and subnanometer-scale motion resolution. In this study, a rotational nanoactuator based on a right-circular flexure mechanism and piezo-electric actuator was developed through a consideration of the kinematics and structural deformation. An experimental setup was constructed to verify the performance expectation. Consequently, it was demonstrated that the developed system had a maximum rotational angle of about 0.01 rad, as well as sufficient linearity with respect to the input voltage.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.118-122
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• 2000

Recently, High accuracy and precision are required in various industrial field especially, semiconductor manufacturing apparatus, Ultra precision positioning apparatus, Information field and so on. Positioning technology is a very important one among them. For composition of this technology, the development of system with high speed and high resolution is needed. At start point and end position vibration must be repressed on this system for composition of position control. This vibration is arisen nose, is increased setting time, is reduced accuracy. Especially, repressed for the lead with high speed. The small actuator with high speed and high resolution is need to repression against this residual vibration. This actuator is, for example, piezo actuator, piezoelectric material that converting from electronic signal to mechanical force is adequate material, beacause of control of control to position and force. In this study, piezo electric material is used to actuator, ultra precision positioning apparatus with stage of hinge structure is designed, simulation is performed, control performance is tested by producing apparatus. For easy usage and stability in industrial field, we perform to simulation and to position control test by digital PID controller.

• 한국마린엔지니어링학회:학술대회논문집
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• 한국마린엔지니어링학회 2006년도 전기학술대회논문집
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• pp.33-34
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• 2006

In this study, a prototype piezo-driven Injector. as a new method driven by piezoelectric energy, has been designed and fabricated based on the concept of inverse piezo-electric effect to overcome the major drawbacks of conventional solenoid-driven injector with a fixed and slow control of injection rate. The effects of an electric control between the solenoid valve and piezo-ceramic stack for injector needle's driving on the dynamic characteristics were usually investigated. We found that this piezo-electric actuator has the main advantage to drastically reducing the time of injector nozzle opening, as well to exert higher force output levels.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1995년도 춘계학술대회 논문집
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• pp.40-62
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• 1995

A micro positioning system using piezoelectric actuators have very wide application region such as ultra-precision machine tool optical device measurement system. In order to keep a high precision displacement resolution it to useful to take a position sensor and feedback of the error. From the practical point of view high-resolution displacement sensor systems are very expensive and it is difficult to make such a sensitive sensor work properly in a poor operational environment of industry. In this study a piezo-electric micro-depth control system which does not require position sensor but piezoelectric voltage feedback has been developed. It is driven by hysteresis-considering reference input voltage calculated in advance and actuator/sensor characteristics of piezoelectric materials. From the result of experiments a fast and stable response of micro-depth control system has been achieved and an efficient technique to control the piezoelectric actuator suggested.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Journal of Mechanical Science and Technology
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• 제19권5호
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• pp.1194-1205
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• 2005

The common-rail injection systems, as a new diesel injection system for passenger car, have more degrees of freedom in controlling both the injection timing and injection rate with the high pressure. In this study, a piezo-driven injector was applied to a high pressure common-rail type fuel injection system for the control capability of the high pressure injector's needle and firstly examined the piezo-electric characteristics of a piezo-driven injector. Also in order to analyze the effect of injector's needle response driven by different driving method on the injection, we investigated the diesel spray characteristics in a constant volume chamber pressurized by nitrogen gas for two injectors, a solenoid-driven injector and a piezo-driven injector, both equipped with the same injection nozzle with sac type and 5-injection hole. The experimental method for spray visualization was based on back-light photography technique by utilizing a high speed framing camera. The macroscopic spray propagation was geometrically measured and characterized in term of the spray tip penetration, spray cone angle and spray tip speed. For the evaluation of the needle response of the above two injectors, we indirectly estimated the needle's behavior with an accelerometer and injection rate measurement employing Bosch's method was conducted. The experimental results show that the spray tip penetrations of piezo­driven injector were longer, on the whole, than that of the solenoid-driven injector. Besides we found that the piezo-driven injector have a higher injection flow rate by a fast needle response and it was possible to control the injection rate slope in piezo-driven injector by altering the induced current.

• 대한기계학회논문집A
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• 제25권11호
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• pp.1881-1886
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• 2001

A numerical method for actuating performance evaluation of LIPCA proposed using a finite element method. Fully coupled formulations for piezo-electric materials were introduced and 3-dimensional eight-node incompatible element was used. After verifying the developed code with typical examples, the center deflections of LIPCA were calculated and compared with the experimental result, which were in fairly agreement.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.924-927
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• 2004

Measurements of fluctuating wall pressures were made with a linear array of 16 piezo-electric transducers beneath a fully-developed turbulent boundary layer. The piezoelectric bimorph actuator applied in this experiment has bonding structures of each polarity to make out-of-plane displacements rather than in-plane ones by using piezoelectric effect To specify the boundary layer characteristics at the location where the actuation was applied, the wall friction coefficients and $Re_\theta$ were measured by using the CPM method. The actuating frequency for the bimorph film was determined according to the priori bursting frequency from boundary layer parameters. The reduction of convecting energies in wave-number space was clearly observed at the specified actuating frequencies.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.475-476
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• 2007

• 한국정밀공학회지
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• 제24권10호
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• pp.19-24
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• 2007