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http://dx.doi.org/10.7735/ksmte.2014.23.4.361

Development of Rotational Nanoactuator Based on Four-Bar Linkage  

Jeong, Young Hun (School of Mechanical Engineering, Kyungpook National Univ.)
Publication Information
Journal of the Korean Society of Manufacturing Technology Engineers / v.23, no.4, 2014 , pp. 361-367 More about this Journal
Abstract
Ultra-precision positioning plays a crucial role in emerging technologies such as electronics, bioengineering, optics, and various nanofabrication technologies. As a result, various nanopositioning methods have been presented. In particular, nanopositioning using a flexure mechanism and piezo-electric actuator is one of the most valuable methods because of its friction-free motion and subnanometer-scale motion resolution. In this study, a rotational nanoactuator based on a right-circular flexure mechanism and piezo-electric actuator was developed through a consideration of the kinematics and structural deformation. An experimental setup was constructed to verify the performance expectation. Consequently, it was demonstrated that the developed system had a maximum rotational angle of about 0.01 rad, as well as sufficient linearity with respect to the input voltage.
Keywords
Flexure; Nanopositioning; Rotational nanoactuator; Four-bar linakage; Piezo-electric stack actuator;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
연도 인용수 순위
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