Browse > Article

Machining Technology of Micro Lens Array using Fast Tool Servo  

Yang, Sun-Choel (한국기초과학지원연구원 연구장비개발부/초정밀가공팀)
Kook, Myung-Ho (한국기초과학지원연구원 연구장비개발부/초정밀가공팀)
Won, Jong-Ho (충남대학교 기계공학과)
Publication Information
Keywords
Fast tool servo; Micro lens array; Ultra precision machining; Piezo electric actuator;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Kim, H. S., Jung, B. C., Ahn, H. S. and Song, S. H., 'Accurate Positioning of Piezoelectric Actuator for Fast Tool Servo in Ultraprecision Machine' Proceedings of the KSPE Autumn Conference, pp. 446-449, 1997
2 Kim, E. J., Song, S. H., Kim, M. G. and Kim, T.H., 'Ultra-Precision Machining Using Fast Tool Servo and On-Machine Form Measurement of Large aspheric Mirrors,' J. of KSPE, Vol. 17, No. 4, pp. 129-134, 2000
3 Song, J. W., Kim, S. H., Song, H. S. and Kim, H. S., 'Precision Position Control of a Fast Tool Servo Using Piezoelectric Actuators,' J. of KSPE, Vol. 14, No. 10, pp. 50-57, 1997
4 Yi, A. Y. and Li, L., 'Design and fabrication of a micro lens array by use of a slow tool servo,' Optics letters, Vol. 30, No. 13, pp. 1707-1709, 2005   DOI   ScienceOn
5 Ku, S. S., Larsen, G. and Cetinkunt, S., 'Fast tool servo control for ultra-precision machining at extremely low feed rates,' Mechatronics: mechanics, electronics, control, Vol. 8, No.4, pp. 381-393, 1998   DOI   ScienceOn
6 Lee, S. H., Lee, C. H. and Kim, G. S., 'A study on the optimal control of Long Stroke Fast Tool Servo Systems,' Proceedings of the KSPE Autumn Conference, pp. 818-821, 2004