• Journal of the Optical Society of Korea
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• v.3 no.1
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• pp.1-9
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• 1999

We have studied the sensitivity of four different phase shift measurement schemes with a Mach-Zehnder interferometer. The input light is considered to be in a coherent state and the detectors are assumed to be ideal with the quantum efficiency of unity. It is shown by direct calculation of the operators corresponding to the measurement schemes that the uncertainty of the phase-shift measurement is limited to the classical one $\frac{1}{\sqrt{m}}$(m is the average number of the photons in the input state) regardless of the phase-shift measurement schemes.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.8
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• pp.1530-1535
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• 1992

An optical method of phase shifting interferometry is presented for the 3-dimensional profile measurement of mirror surfaces with nanometer resolution. A series of optical interferometric fringes are generated by comparing the surface to be measured with a reference flat. The fringes are captured by a CCD camera and then analyzed to obtain actual surface profile. Detailed principles are described along with necessary image processing algorithms. finally, several measurement examples are discussed which were performed on lapped surfaces, hard discs, and semiconductor wafers.

• Journal of IKEEE
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• v.8 no.1 s.14
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• pp.128-135
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• 2004

This paper proposes a phase measurement algorithm which is based on the recursive implementation of sliding-DFT. The algorithm is designed to have a robust behavior against the erroneous factors of frequency drift, additive noise, and twiddle factor approximation. The size of phase error caused by the finite wordlength implementation of DFT twiddle factors is shown significantly lower than that of magnitude error. The drastic reduction of the phase error is achieved by the exploitation of the quadruplet symmetry characteristics of the approximated twiddle factors in the complex plane. Four channel power-line phase measurement system is also designed and implemented based on the time-multiplexed sharing architecture of the proposed algorithm. The operation of the developed system is also verified by the experiment performed under the test environment implemented with the multi-channel function generator and the on-line interfaced host processor system. The proposed algorithm's features of phase measurement accuracy and its robustness against the finite wordlength effects can provide a significant impact especially for the ASIC or microprocessor based embedded system applications where the enhanced processing speed and implementation simplicity are crucial design considerations.

• Korean Journal of Optics and Photonics
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• v.10 no.4
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• pp.283-288
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• 1999

We investigated the characteristics of surface roughness evaluation using phase-measuring interferometer for a few ten $\AA$ and sub $\AA$-rough substrates. The influence of phase averaging and intensity averaging on the roughness measurement by phase measuring interferometer was investigated and the optimal number of phase and intensity averaging for the least measurement error was searched. For a few ten $\AA$-rough sample, roughness value did not depend so much on the data averaging. Whereas, measurement error for sub $\AA$-rough sample was significantly improved as the number of phase and intensity averaging increased. At the phase averaging of 30 and the intensity averaging of 20, roughness value that measurement error was minimized was obtained, and it was in good agreement with that by optical heterodyne interferometer. Roughness measurement at the optimal data averaging showed also good repeatability error less than 0.01$\AA$.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.6
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• pp.274-278
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• 2005

Voltage transformer(VT) comparison measurement system is usually used for measurements of ratio error and phase angle error of VT made in industry. Both ratio error and phase angle error in VT are critically influenced by values of burden of VT used. External burden effects on both ratio error and phase angle error in VT are theoretically calculated. From the theoretical calculation, a method of evaluation for linearity of ratio error and phase angle error in VT measurement system have been developed using the standard capacitive burdens, with negligible dissipation factor less than 10$^{-4}$. These burden consists of five standard capacitors, with nominal capacitance of 1.1 $\mu$F, 1 $\mu$F, 0.1 $\mu$F, 0.01 $\mu$F, 0.001 $\mu$F. The developed method has been applied in VT measurement system of industry, showing in good consistency and linearity within 0.001 $\%$ between theoretical and measured values.

• Journal of the Optical Society of Korea
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• v.13 no.2
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• pp.245-250
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• 2009

We propose a digital holographic interference analysis method based on a 2-frame phase-shifting technique for measuring an optical mirror surface. The technique using 2-frame phase-shifting digital interferometry is more efficient than multi-frame phase-shifting techniques because the 2-frame method has the advantage of a reduced number of interferograms, and then takes less time to acquire the wanted topography information from interferograms. In this measurement system, 2-frame phase-shifting digital interferograms are acquired by moving the reference flat mirror surface, which is attached to a piezoelectric transducer, with phase step of 0 or $\pi$/2 in the reference beam path. The measurements are recorded on a CCD detector. The optical interferometry is designed on the basis of polarization characteristics of a polarizing beam splitter. Therefore the noise from outside turbulence can be decreased. The proposed 2-frame algorithm uses the relative phase difference of the neighbor pixels. The experiment has been carried out on an optical mirror which flatness is less than $\lambda$/4. The measurement of the optical mirror surface topography using 2-frame phase-shifting interferometry shows that the peak-to-peak value is calculated to be about $0.1779{\mu}m$, the root-mean-square value is about $0.034{\mu}m$. Thus, the proposed method is expected to be used in nondestructive testing of optical components.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1936-1938
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• 2004

In this paper, we discussed measurement method of PD (Partial Discharge) of 22.9[kV] cable. Cable rail track laying portable detector that can detect partial discharge of cable connection ashes by on-line done spot way to detect Lemke equipment and high broadcasting CT sensor that use antenna sensor using ICM mounting was explained. Because measurement corona signal is very big, analysis of partial discharge is difficult state, we used connector. It could be attenuated by 2 times. We found out that corona signal which generated on B phase is flowed on A phase and C phase. It could measure that partial discharge of A phase happens actually. We could confirm that partial discharge of about 250 ${\sim}$ 300 [pC] on A phase is dangerous.

• Proceedings of the KIEE Conference
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• 2004.11c
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• pp.589-591
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• 2004

In this paper, we developed a laser distance measurement(LDM) system based on DSP. We applied PPD(Pulsed Phase Detection) algorithm to the LDM system. The PPD algorithm calculate the distance from the LDM system to the object by using phase detection. Reference waveform at a fixed frequency is sampled by both the inner-loop and outer-loop pulse signal. The LDM system detects the difference of phase between the sampled signals. We obtained an accuracy of ${\sigma}=25.5mm$ from the LDM system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.271-274
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• 2002

The 3-D measurement using interference pattern projection is very attractive because of its high measuring speed and high sensitivity. When a sinusoidal amplitude grating was projected on an object, the surface-height distribution of the object is translated into a phase distribution of the deformed grating image. The patters was generated by a interferometer, and a PZT was used to shift the fringes on the target surface. The phase-acquisition algorithms are so sufficiently simple that high-resolution phase maps using a CCD camera can be generated in a short time. A working system requires a interferometer, a PZT, and a detector array interfaced to a microcomputer. Results of measurements on the diffused test objects are described.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.7
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• pp.149-154
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• 2001

This study discusses a non-contact optical technique, electronic speckle pattern interferometry(ESPI), that is well suited for a deformation measurement of structure. Phase shifting method and unwrapping method have used to make deformation quantitative widely. In this paper, a previous numerical formula for phase shifting method is reconstructed in addition to least square fitting method to improve sensitivity and phase unwrapping based on vertical-horizontal scanning method is applied to analyze in-plane and out-of-plane deformation quantitatively.