• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.372-372
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• 2014

반도체 검출기는 입사되는 X선 에너지에 의하여 이온화되어 발생하는 전자 전공쌍을 수집함으로 방사선 정보를 확인하는 선량계로써 많은 연구와 활용이 이루어지고 있다. 하지만, X선 에너지에 의하여 반도체 검출기에서 발생하는 전기적 신호량이 높지 않기 때문에 누설 전류의 저감이 필수적이다. 누설 전류를 저감시키기 위한 방안으로 반도체 층과 전극 층의 Schottky Contact 구조의 설계, Insulating Layer의 사용, 높은 비저항의 반도체 물질 연구 등이 이루어지고 있다. 하지만, 기존에 누설 전류 저감을 위하여 Insulating Layer를 전극층과 반도체 층 사이에 형성하는 연구에 있어서 Insulating Layer와 반도체 층의 계면 사이에서 발생하는 Charge Trapping으로 인하여 생성되는 신호의 Reproducibility 저하, 동영상 적용의 제한 등의 문제점을 겪어왔다. 이에 본 논문에서는 누설 전류를 저감시킴과 동시에 Charge Trapping의 최소화를 이루기 위하여 Insulating Layer의 두께 최적화 연구를 수행하였다. 본 연구에서 사용한 Insulating Layer는 검출기 표면에 입사하는 X선 정보 손실을 최소화 시키는 동시에 누설 전류와 Charge Trapping을 최소화 시키는 방법으로써 CVD방법으로 검출기 표면에 균일하게 Insulating Layer를 코팅하였다. Insulating 물질은 Parylene을 사용하였으며, 그 중 온도, 습도 등 외부환경에 영향을 적게 받는 type C를 사용하였다. 증착에 사용한 장비의 진공도는 Torr로 설정하여 증착되는 Parylene의 두께가 약 $0.3{\mu}m$가 되게 하였으며, 실험에는 반도체 물질 PbO를 사용하였다. Parylene의 절연 특성은 Dark Current와 Sensitivity를 측정한 SNR을 이용하여 Parylene코팅이 되지 않은 동일 반도체 검출기와의 신호를 비교하였으며 또한 Parylene를 다층 제작한 검출기의 수집 신호량을 비교하였다. 제작한 검출기의 X선 조사 시의 수집 전하량 측정 결과, 100 kVp, 100mA, 0.03s의 X선 조건에서 $1V/{\mu}m$의 기준 시, Parylene를 코팅하지 않은 PbO 검출기의 Dark current는 0.0501 nA/cm2, Sensitivity는 0.6422 nC/mR-cm2, SNR은 12.184이었으며, Parylene단층의 두께인 $0.3{\mu}m$로 증착된 시편의 Dark current는 0.04097 nA/cm2, Sensitivity는 0.53732 nC/mR-cm2으로 Dark current가 감소되고 sensitivity도 감소하였지만 SNR은 13.1150으로 높아진 것을 확인할 수 있었다. Perylene이 $0.6{\mu}m$로 증착된 시편의 경우, Dark Current는 0.04064 nA/cm2, Sensitivity는 0.31473 nC/mR-cm2, SNR은 7.7443으로써 Insulating Layer가 없는 시편보다 SNR이 약 40% 낮아진 것을 확인할 수 있었다. Parylene이 $0.9{\mu}m$로 증착된 시편의 경우 Dark current는 0.0378 nA/cm2, Sensitivity 0.0461 nC/mR-cm2로 Insulating Layer가 없는 시편에 비해 SNR은 약 1/12배 감소한 1.2196이었고, Parylene이 $1.2{\mu}m$로 증착된 시편의 SNR은 1.1252로서 더 감소하였다. 따라서 Parylene을 다층 코팅한 검출기일수록 절연 효과의 영향이 커짐으로써 SNR 비교 시 수집되는 신호량이 줄어드는 것을 확인하였다. 반도체 검출기의 누설 전류를 저감시킴과 동시에 신호 수집율에 영향을 최소화시키기 위하여 Insulating Layer의 두께를 적절하게 설정하여 적용하면 Insulating Layer가 없는 검출기에 비해 누설전류를 최소한으로 줄일 수 있고 신호 검출효율이 감소하는 것을 방지할 수 있을 것이라 사료된다.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.3
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• pp.27-34
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• 2017

We investigated the feasibility of parylene F usage as an intermediate layer between a polydimethylsiloxane (PDMS) substrate and an Au thin-film interconnect as well as the swelling effect of PDMS substrate on the stretchable deformability of an Au thin film. The 150-nm-thick Au film, which was sputtered on a PDMS substrate without a parylene F layer, exhibited an initial resistance of $11.7{\Omega}$ and an overflow of its resistance at a tensile strain of 12.5%. On the other hand, the Au film, which was formed with a 150-nm-thick parylene F layer, revealed an much improved resistance characteristics: $1.21{\Omega}$ as its initial resistance and $246{\Omega}$ at its 30% elongation state. With swelling of PDMS substrate, the resistance of an Au film substantially decreased to $14.4{\Omega}$ at 30% tensile strain.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.996-998
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• 2004

In this study, we tested parylene as the passivation layer for flexible organic light emitting diodes (FOLEDs).Parylene as passivtion layer has several advantages which are good optical transparent and low moisture penetration. For more an effective passivation of FOLEDs, we suggest hybrid passivation layer with parylene and silicon oxide. We compared electrical properties and stability of the device with and without passivation layer. The lifetime of FOLED with hybrid passivation layer was increased over three times than that of non-passivated of FOLED.

• Nuclear Engineering and Technology
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• v.54 no.12
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• pp.4693-4697
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• 2022

Parylene coating was adopted on CdZnTe (CZT) detector as a mechanical protection layer after wet passivation with hydrogen peroxide (H₂O₂) and ammonium fluoride (NH₄F). Wet chemical passivant lose their effectiveness when exposed to the ambient conditions for a long time. Parylene coating could protect the effectiveness of passivation, by mechanically blocking the exposure to the ambient conditions. Stability of CZT detector was tested with the measurement of leakage current density and response to radio-isotopes. When the enough thickness of parylene (>100 ㎛) is adopted, parylene is a promising protection layer thereby ensuring the performance and long-term stability of CZT detectors.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.34D no.8
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• pp.80-86
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• 1997

H:LiNbO$_{3}$ optical modulator buffered by parylene layer, which has a merits in the bandwidth, power consumption and fabrication as compared with conventional SiO$_{2}$ buffered optical modulator, is proposed and analyzed. The dependences of velocity matching condition, charcteristics impedance, and driving voltage on dielectric constants, thickness of buffer layer, and electrode configurations are demonstrated with finite element calculation. And we performed the physical and chemical test of parylene buffer layer deposited on LiNbO$_{3}$ and under Au electrodes.

• Journal of the Korean Physical Society
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• v.73 no.11
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• pp.1787-1793
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• 2018

The power conversion efficiency of perovskite solar cells has reached 23.3%. Although significant developments have been made through intensive studies, the stability issue is still challenging. Passivation of perovskite solar cells with a transparent polymer provides better stability; however, there are a few disadvantages of organic polymer such as low thermal stability, weak adhesion and the lack of water retention ability. In this work, we prepared a dual Parylene-F/C layer with 3-methacryloxypropyltrimethoxysilane, A-174, to combine the advantages of organic and inorganic materials. As a result, A-174 treated dual Parylene-F/C layer demonstrated improved passivation effects compared to a single Parylene layer due to the strong binding of Parylene and the water retention ability by $SiO_2$ formed from A-174. This synergetic effects can be expanded to the combination of other organic materials and organosilane compounds.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.269-270
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• 2005

A hybrid passivation method using parylene and silicon dioxide combination layer for a flexible organic light emitting diode (FOLED) was applied on a polycarbonate substrate. A parylene coating by vapor polymerization method is a highly effective passivation process for the FOLED, and it applies all top surface and the edges of the FOLED device. In order to minimize the permeation of moisture and oxygen from the top surface of the device, an additional layer of silicon dioxide was deposited over the parylene coated layer. It was found that the water vapor transmittance rate (WVTR) of parylene (15 m-in-thickness) / SiO2 (0.3$\mu$m-in-thickness) combination layers deposited on polycarbonate film was decreased under the value of 10-3 g/m2day. The FOLED with the hybrid passivation showed remarkably longer lifetime characteristics in the ambient conditions than the non-passivated FOLED. The lifetime of the passivated FOLED was 400 hours and it was more than ten times over the lifetime of the convectional non-passivated FOLED.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.3
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• pp.85-91
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• 1999

$H:LiNbO_3$ optical modulator with Cu/parylene electrode layer, which has a merits in the bandwidth, power consumption and fabrication conditions as compared with conventional Au/Cr/$SiO_2$, is proposed and fabricated. Analysis and design of optical modulator is performed by finite element calculation. Various unit processes for fabricating the proposed modulator, 1550nm $H:LiNbO_3$ optical waveguide, parylene buffer layer, and CPW Cu electrode, were developed, After dicing and end-face polishing of fabricated modulator chip, optical modulation responses as sawtooth electrical driving voltage has been measured at low frequencies. Properties of optical waveguide had not been changed before and after Cu/parylene electrode processes, which make confirm the reproducible fabrication of optical modulator.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.8
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• pp.754-757
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• 2006

The inorganic multi-layer thin film encapsulation was newly adopted to protect the organic layer from moisture and oxygen. Using the electron beam, sputter, inorganic multi-layer thin-film encapsulation was deposited onto the Polyethylene Terephthalate (PET) and their interface properties between inorganic and organic layer were investigated. In this investigation, the SiON, $SiO_2$ and parylene layer showed the most suitable properties. Under these conditions, the WVTR for PET can be reduced from level of $0.57g/m^2/day$ (bare subtrate) to $1*10^{-5}g/m^2/day$ after application of a SiON and $SiO_2$ layer. These results indicates that the $PET/SiO_2/SiON/Parylene$ barrier coatings have high potential for flexible organic light-emitting diode(OLED) applications.

• Journal of the Korean Society of Radiology
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• v.15 no.6
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• pp.781-788
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• 2021

Due to the high sensitivity to radiation, excessive exposure needs to be prevented by accurately measuring the dose irradiated to the skin during radiation therapy. Although clinical trials use dosimeters such as film, OSLD, TLD, glass dosimeter, etc. to measure skin dose, these dosimeters have difficulty in accurate dosimetry on skin curves. In this study, to solve these problems, we developed a skin dosimeter that can be attached according to human flexion and evaluated its response characteristics. For the manufacture of the dosimeter, lead oxide (PbO) with high atomic number (Z_Pb: 82, Z_O: 8) and density (9.53 g/cm³) and silicon binders that can bend according to human flexion were used. In the case of a dosimeter made of PbO material, the performance degradation has been prevented by using parylene and others due to the presence of degradation due to oxidation, but the previously used parylene is affected by bending, so a new form of passive layer was produced and applied to the skin dosimeter. The characteristic evaluation of the skin dosimeter was evaluated by analyzing SEM, reproducibility, and linearity. Through SEM analysis, bending was evaluated, reproducibility and linearity at 6 MeV energy were evaluated, and applicability was assessed with a skin dosimeter. As a result of observing the dosimeter surface through SEM analysis, the parylene passive layer PbO dosimeter with the positive layer raised to the parylene produced cracks on the surface when bent. On the other hand, no crack was observed in the silicon passive layer PbO dosimeter, which was raised to silicon passive layer. In the reproducibility measurement results, the RSD of the silicon passive layer PbO dosimeter was 1.47% which satisfied the evaluation criteria RSD 1.5% and the linearity evaluation results showed the R² value of 0.9990, which satisfied the evaluation criteria R² 9990. The silicon passive layer PbO dosimeter was evaluated to be applicable to skin dosimeters by demonstrating high signal stability, precision, and accuracy in reproducibility and linearity, without cracking due to bending.