• Title/Summary/Keyword: PLD process

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p-n heterojunction composed of n-ZnO/p-Zn-doped InP (n-ZnO/p-Zn doped InP의 p-n 이종접합 형성에 관한 연구)

  • Shim, Eun-Sub;Kang, Hong-Seong;Kang, Jeong-Seok;Bang, Seong-Sik;Lee, Sang-Yeol
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.126-129
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    • 2001
  • A p-n junction was obtained by the deposition of an n-type ZnO thin film on a p-type Zn-doped InP substrate. The Zn-doped InP substrate has been made by the diffusion of Zn with sealed ampoule technique. The ZnO deposition process was performed by pulsed laser deposition (PLD). The p-n junction was formed and showed a typical I-V characteristic. We will also discuss about the realization of an ultraviolet light-emitting diode (LED). The structure of n-ZnO/p-Zn-doped InP could be a good candidate for the realization of an ultraviolet light-emitting diode or an ultraviolet laser diode.

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Learning Model and Application of New Preceding Layer Driven MLP Neural Network (새로운 Preceding Layer Driven MLP 신경회로망의 학습 모델과 그 응용)

  • 한효진;김동훈;정호선
    • Journal of the Korean Institute of Telematics and Electronics B
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    • v.28B no.12
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    • pp.27-37
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    • 1991
  • In this paper, the novel PLD (Preceding Layer Driven) MLP (Multi Layer Perceptron) neural network model and its learning algorithm is described. This learning algorithm is different from the conventional. This integer weights and hard limit function are used for synaptic weight values and activation function, respectively. The entire learning process is performed by layer-by-layer method. the number of layers can be varied with difficulty of training data. Since the synaptic weight values are integers, the synapse circuit can be easily implemented with CMOS. PLD MLP neural network was applied to English Characters, arbitrary waveform generation and spiral problem.

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p-n Heterojunction Composed of n-ZnO/p-Zn-doped InP

  • Shim, Eun-Sub;Kang, Hong-Seong;Kang, Jeong-Seok;Pang, Seong-Sik;Lee, Sang-Yeol
    • Transactions on Electrical and Electronic Materials
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    • v.3 no.1
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    • pp.1-3
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    • 2002
  • A p-n junction was obtained by the deposition of an n-type ZnO thin film on a p-type Zn-doped InP substrate. The Zn-doped InP substrate has been made by the diffusion of Zn with sealed ampoule technique. The ZnO deposition process was performed by pulsed laser deposition (PLD). The p-n junction was formed and showed typical I-V characteristics. We will also discuss about the realization of an ultraviolet light-emitting diode (LED). The structure of n-ZnO/p-Zn-doped InP could be a good candidate for the realization of an ultraviolet light-emitting diode or an ultraviolet laser diode.

Thin Film Transistor with Transparent ZnO as active channel layer (투명 ZnO를 활성 채널층으로 하는 박막 트랜지스터)

  • Shin Paik-Kyun
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.1
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    • pp.26-29
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    • 2006
  • Transparent ZnO thin films were prepared by KrF pulsed laser deposition (PLD) technique and applied to a bottom-gate type thin film transistor device as an active channel layer. A high conductive crystalline Si substrate was used as an metal-like bottom gate and SiN insulating layer was then deposited by LPCVD(low pressure chemical vapour deposition). An aluminum layer was then vacuum evaporated and patterned to form a source/drain metal contact. Oxygen partial pressure and substrate temperature were varied during the ZnO PLD deposition process and their influence on the thin film properties were investigated by X-ray diffraction(XRD) and Hall-van der Pauw method. Optical transparency of the ZnO thin film was analyzed by UV-visible phometer. The resulting ZnO-TFT devices showed an on-off ration of $10^6$ and field effect mobility of 2.4-6.1 $cm^2/V{\cdot}s$.

p-n heterojunction composed of n-ZnO/p-Zn-doped InP (n-ZnO/p-Zn doped InP의 p-n 이종접합 형성에 관한 연구)

  • 심은섭;강홍성;강정석;방성식;이상렬
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.126-129
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    • 2001
  • A p-n junction was obtained by the deposition of an n-type ZnO thin film on a p-type Zn-doped InP substrate. The Zn-doped InP substrate has been made by the diffusion of Zn with sealed ampoule technique. The ZnO deposition process ws performed by pulsed laser deposition (PLD). The p-n junction was formed and showed a typical I-V characteristic. We will also discuss about the realization of an ultraviolet light-emitting diode (LED). The structure of n-ZnO/p-Zn-doped InP could be a good candidate for the realization of an ultraviolet light-emitting diode or an ultraviolet laser diode.

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Effects of microstructures on ferroelectric properties of PZT thin films prepared by PLD (PLD에 의해 제조된 PZT 박막의 미세구조가 강유전 특성에 미치는 영향)

  • 백동수;김민철;신현용;박용웅;윤석진
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.224-227
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    • 1999
  • Ferroelectric Pb(Zr$\sub$0.52/Ti$\sub$0.48/)O$_3$ thin films were fabricated by pulsed laser deposition, mainly varying process conditions such as substrate temperature, oxygen pressure, and laser energy, PZT films annealed at more than 600$^{\circ}C$ were crystallized into pure perovskite phases regardless of deposition temperatures. Lower deposition temperature of 400$^{\circ}C$ accompanied with post-annealing at 650$^{\circ}C$ resulted in denser microstructures with extremely small grains compated to those of thin films annealed at higher deposition temperatures. Hysteresis curves of thin film with small grains exhibitied good squareness and low leakage characteristics.

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Phase Evolution Behavior of (Bi,Nd)(Fe,Ti)O3 Ceramics and Thin Films ((Bi,Nd)(Fe,Ti)O3 세라믹스와 박막의 상형성 거동)

  • Kim, Kyung-Man;Lee, Hee-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.12
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    • pp.949-955
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    • 2010
  • Nd and Ti co-doped bismuth ferrite $(Bi_{1-x}Nd_x)(Fe_{1-y}Ti_y)O_3$ (x, y = 0, 0.05, 0.1, 0.2) ceramics and thin films were synthesized through the conventional mixed-oxide process and pulsed laser deposition (PLD), respectively. Nd and Ti co-doping effect was examined with emphasis on how these impurities affect phase formation behavior as there could be the improvement in leakage current problems often associated with multiferroic $BiFeO_3$ (BFO) thin films. The lattice constants of BFO ceramics decreased with Nd doping concentration up to 10mol%, while they further decreased with Nd and Ti co-doping to about 20%. BFO thin films obtained by the PLD process revealed random polycrystalline structure. Similar to bulk BFO ceramic, Nd and Ti co-doping effectively suppressed the formation of unwanted secondary phase and thus stabilized the perovskite phase in BFO thin films.

Evaluation of Acceptor Binding Energy of Nitrogen-Doped Zinc Oxide Thin Films Grown by Dielectric Barrier Discharge in Pulsed Laser Deposition

  • Lee, Deuk-Hee;Chun, Yoon-Soo;Lee, Sang-Yeol;Kim, Sang-Sig
    • Transactions on Electrical and Electronic Materials
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    • v.12 no.5
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    • pp.200-203
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    • 2011
  • In this research, nitrogen (N)-doped zinc oxide (ZnO) thin films have been grown on a sapphire substrate by dielectric barrier discharge (DBD) in pulsed laser deposition (PLD). DBD has been used as an effective way for massive in-situ generation of N-plasma under conventional PLD process conditions. Low-temperature photoluminescence spectra of N-doped ZnO thin films provided near-band-edge emission after a thermal annealing process. The emission peak was resolved by Gaussian fitting and showed a dominant acceptor-bound excitation peak ($A^{\circ}X$) that indicated acceptor doping of ZnO with N. The acceptor binding energy of the N acceptor was estimated to be approximately 145 MeV based on the results of temperature-dependent photoluminescence (PL) measurements.

Neural network based modeling of PL intensity in PLD-grown ZnO Thin Films (펄스 레이저 증착법으로 성장된 ZnO 박막의 PL 특성에 대한 신경망 모델링)

  • Ko, Young-Don;Kang, Hong-Seong;Jeong, Min-Chang;Lee, Sang-Yeol;Myoung, Jae-Min;Yun, Ii-Gu
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.252-255
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    • 2003
  • The pulsed laser deposition process modeling is investigated using neural networks based on radial basis function networks and multi-layer perceptron. Two input factors are examined with respect to the PL intensity. In order to minimize the joint confidence region of fabrication process with varying the conditions, D-optimal experimental design technique is performed and photoluminescence intensity is characterized by neural networks. The statistical results were then used to verify the fitness of the nonlinear process model. Based on the results, this modeling methodology can be optimized process conditions for pulsed laser deposition process.

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Effect of the Deposition Time onto Structural Properties of Cu2ZnSnS4 Thin Films Deposited by Pulsed Laser Deposition (펄스 레이저 증착법으로 제작한 Cu2ZnSnS4 박막의 구조 특성 변화에 대한 증착 시간 효과)

  • Byeon, Mirang;Bae, Jong-Seong;Hong, Tae-Eun;Jeong, Euh-Duck;Kim, Shinho;Kim, Yangdo
    • Korean Journal of Materials Research
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    • v.23 no.1
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    • pp.7-12
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    • 2013
  • The $Cu_2ZnSnS_4$ (CZTS) thin film solar cell is a candidate next generation thin film solar cell. For the application of an absorption layer in solar cells, CZTS thin films were deposited by pulsed laser deposition (PLD) at substrate temperature of $300^{\circ}C$ without post annealing process. Deposition time was carefully adjusted as the main experimental variable. Regardless of deposition time, single phase CZTS thin films are obtained with no existence of secondary phases. Irregularly-shaped grains are densely formed on the surface of CZTS thin films. With increasing deposition time, the grain size increases and the thickness of the CZTS thin films increases from 0.16 to $1{\mu}m$. The variation of the surface morphology and thickness of the CZTS thin films depends on the deposition time. The stoichiometry of all CZTS thin films shows a Cu-rich and S-poor state. Sn content gradually increases as deposition time increases. Secondary ion mass spectrometry was carried out to evaluate the elemental depth distribution in CZTS thin films. The optimal deposition time to grow CZTS thin films is 150 min. In this study, we show the effect of deposition time on the structural properties of CZTS thin film deposited on soda lime glass (SLG) substrate using PLD. We present a comprehensive evaluation of CZTS thin films.