• 한국전기전자재료학회논문지
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• 제23권4호
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• pp.327-332
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• 2010

We report on the effect of PET substrate preheating on the characteristics of the flexible and transparent indium tin oxide (ITO) electrode grown by a specially designed roll-to-roll sputtering system for touch panel applications. It was found that electrical and optical properties of the roll-to-roll sputter grown ITO film were critically dependent on the preheating of the PET substrate. In addition, the roll-to-roll sputter-grown ITO film after post annealing test at $140^{\circ}C$ for 90 min showed stable electrical and optical properties. The low sheet resistance and high optical transmittance of the ITO film grown on the preheated PET substrate demonstrate that the preheating process before ITO sputtering is one of the effective way to improve the characteristics of ITO/PET film. Furthermore, the superior flexibility of the ITO electrode grown on the preheated PET substrate indicates that the preheating treatment is a promising technique to obtain robust ITO/PET sample for touch panel applications.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.605-608
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• 2008

The preparation and characteristics of flexible indium tin oxide electrodes grown on polyethylene terephthalate (PET) substrates using a specially designed roll-to-roll sputtering system for use in flexible optoelectronics In spite of low a PET substrate temperature, we can obtain the flexible electrode with a sheet resistance of 47.4 ohm/square and an average optical transmittance of 83.46 % in the green region of 500~550 nm wavelength. Both x-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) analysis results showed that all flexible ITO electrodes grown on the PET substrate were an amorphous structure with a very smooth and featureless surface, regardless of the Ar/$O_2$ flow ratio due to the low substrate temperature, which is maintained by a cooling drum. In addition, the flexible ITO electrode grown on the Ar ion beam treated PET substrates showed more stable mechanical properties than the flexible ITO electrode grown on the wet cleaned PET substrate, due to an increased adhesion between the flexible ITO and the PET substrates.

• 폴리머
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• 제35권3호
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• pp.249-253
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• 2011

PET/PEN 블렌딩에 의하여 발현되는 형태학적 변화가 PET/PEN 블렌드 유연기관 특성에 미치는 영향을 살펴보았다. PET와 PEN의 용융 블렌딩에 따른 two phase 형태학적 변화는 블렌드의 유연기관으로서의 치수안정성을 증가시킴을 알 수 있었다. PET/PEN 필름의 가공조건에 따른 상호에스테르 교환반응은 블렌드의 two phase 형태와 결정화도를 변화시키며 이러한 거시적 형태학적 변화는 유연기관으로서의 PET/PEN 필름의 치수안정성에 영향을 미침을 확인하였다. 결정화도가 높을수록 상호에스테르 교환반응이 낮을수록 PET/PEN 블렌드 필름의 치수안정성이 우수해짐을 알 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 D
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• pp.1795-1796
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• 1999

ITO thin films have been deposited on PET substrate by reactive dc magnetron sputtering without substrate heater and post heat treatment. The electrical and optical properties of as-deposited films are dominated by oxygen gas ratio. As the experimental results, the excellent ITO films are prepared on PET substrate at the operating conditions as follows: operating pressure of 5 mTorr, target-substrate distance of 4.5 cm, dc power of $20{\sim}30W$, and oxygen gas ratio of 10 %. The optical transmittance is above 80 % at 550 nm, and the sheet resistance and resistivity of films are $24{\Omega}$/square and $1.5{\times}10^{-3}{\Omega}cm$, respectively.

• 한국표면공학회지
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• 제32권6호
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• pp.671-676
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• 1999

ITO (indium tin oxide) thin films on PET (polyethylene terephthalate) substrate have been deposited by a dc reactive magnetron sputtering without heat treatments such as substrate heater and post heat treatment. Each sputtering parameter during the sputtering deposition is an important factor for the high quality of ITO thin films deposited on polymeric substrate. Particularly, the material, electrical and optical properties of as-deposited ITO oxide films are dominated by the ratio of oxygen partial pressure. As the experimental results, the excellent ITO films are prepared on PET substrate at the operating conditions as follows : operating pressure of 5 mTorr, target-substrate distance of 45mm, do power of 20~30W, and oxygen gas ratio of 10%. The optical transmittance is above 80% at 550 nm, and the sheet resistance and resistivity of films are 24 Ω/square and $1.5\times$10$^{-3}$ Ωcm, respectively.

• 마이크로전자및패키징학회지
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• 제17권1호
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• pp.19-24
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• 2010

산소 플라즈마 전처리에 의한 PET 기판 위에 Ga이 도핑된 ZnO 투명전극 (GZO)의 특성변화를 고찰하였다. GZO 박막은 RF 마그네트론 스퍼터링 공정에 의해 합성하였으며 GZO 증착 이전에 PET 기판의 표면에너지를 높이고 GZO 박막과의 접촉특성을 향상시키기 위해 산소플라즈마 공정을 적용하였다. 산소 플라즈마 처리공정을 시행함에 따라 GZO 박막의 결정성과 전기적 특성이 향상하였다. RF 파워를 100 W로 하고, 플라즈마 처리시간을 600초로 하였을 때 GZO 박막의 최저 비저항 값인 $1.90{\times}10^{-3}{\Omega}-cm$의 양호한 특성을 확인되었다.

• 폴리머
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• 제35권6호
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• pp.599-604
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• 2011

폴리에스테르 유연기판 제조를 위하여 PET-PEN 공중합체를 합성하고 이들의 형태학적 변화가 유연기판 특성에 미치는 영향을 살펴보았다. 합성된 PET-PEN 공중합체는 DMT/NDC의 조성비에 따라 공중합체 block sequence가 달라짐을 확인하였다. 공중합체에 PET-PEN과 PEN의 block sequence가 증가할수록 유리전이온도가 증가하며 이에 따라 유연기판의 치수안정성이 증가됨을 확인하였으며 DMT/NDC의 조성비가 50/50인 경우, 열팽창계수(CTE)가 최소가 됨을 확인하였다. 합성된 PET-PEN 공중합체는 광투과 특성이 80% 이상을 유지하며 1시간 동안 $280^{\circ}C$에서의 열안정성도 0.4 wt% 이내를 유지하여 유연기판으로 적용이 가능함을 알 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 기술교육전문연구회
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• pp.58-61
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• 2003

ITO (indium tin oxide) thin films on PET (polyethylene terephthalate) substrate have been deposited by a dc reactive magnetron sputtering without heat treatments such as substrate heater and post heat treatment. Each sputtering parameter during the sputtering deposition is an important factor for the high quality of ITO thin films deposited on polymeric substrate. Particularly, the material, electrical and optical properties of as-deposited ITO oxide films are dominated by the ratio of oxygen partial pressure. As the experimental results, the excellent ITO films are prepared on PET substrate at the operating conditions as follows: operating pressure of 5 mTorr,target-substrate distance of 45 mm, dc power of 20-30 W, and oxygen gas ratio of 10 %. The optical transmittance is above 80 % at 550 nm, and the sheet resistance and resistivity of films are $24\;{\Omega}$/square and $1.5{\times}10^{-3}\;cm$, respectively.

• Korean Chemical Engineering Research
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• 제61권3호
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• pp.439-445
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• 2023

본 연구에서는 질산은을 PVA로 환원시켜 은 나노입자를 합성하였으며, 얻어진 은 나노입자에 Carboxymethyl cellulose (CMC)를 첨가시켜 제조된 용액을 PET 기재 위에 코팅함에 의해 항균 특성과 김서림 방지 기능을 갖는 코팅 도막을 제조하였다. 코팅 도막을 80 ℃의 수증기와 접촉 시 코팅되지 않은 PET 기재는 김서림 발생으로 인한 빛의 산란이 발생해 흐려진 결과를 보인 반면에 CMC가 첨가된 은 나노졸로 코팅된 도막은 수증기와의 접촉에도 불구하고 투명한 상태를 유지하여 김서림 방지 기능이 우수하였다. 또한 코팅 도막의 항균성을 그램 양성균인 포도상구균과 그람 음성균인 대장균에 대해 필름 밀착법으로 측정하였다. 코팅되지 않은 PET 기재에서는 많은 포도상구균과 대장균의 집락이 관찰된 반면에 은 나노졸로 코팅된 도막은 포도상구균과 대장균의 성장이 크게 억제되어 항균 효과가 우수하였다.

• 한국재료학회지
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• 제18권1호
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• pp.32-37
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• 2008

The electrical, optical, structural and surface properties of an indium tin oxide (ITO) film grown on a flexible PET substrate using a specially designed roll-to-roll (R2R) sputtering system as a function of the DC power, $Ar/O_2$ flow ratio, and rolling speed is reported. It was observed that both the electrical and optical properties of the ITO film on the PET substrate were critically dependent on the $Ar/O_2$ flow ratio. In addition, x-ray diffraction examination results showed that the structure of the ITO film on the PET substrate was an amorphous structure regardless of the DC power and the $Ar/O_2$ flow ratio due to a low substrate temperature, which was maintained constant by a main cooling drum. Under optimized conditions, ITO film with resistivity of $6.44{\times}10^{-4}{\Omega}-cm$ and transparency of 86% were obtained, even when prepared at room temperature. Furthermore, bending test results exhibited that R2R-grown ITO film had good flexibility which would be applicable to flexible displays and solar cells.