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http://dx.doi.org/10.3740/MRSK.2008.18.1.032

Characteristics of Indium Tin Oxide Films Grown on PET Substrate Grown by Using Roll-to-Roll (R2R) Sputtering System  

Cho, Sung-Woo (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Choi, Kwang-Hyuk (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Bae, Jung-Hyeok (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Moon, Jong-Min (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Jeong, Jin-A (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Jeong, Soon-Wook (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Park, No-Jin (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Kim, Han-Ki (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Publication Information
Korean Journal of Materials Research / v.18, no.1, 2008 , pp. 32-37 More about this Journal
Abstract
The electrical, optical, structural and surface properties of an indium tin oxide (ITO) film grown on a flexible PET substrate using a specially designed roll-to-roll (R2R) sputtering system as a function of the DC power, $Ar/O_2$ flow ratio, and rolling speed is reported. It was observed that both the electrical and optical properties of the ITO film on the PET substrate were critically dependent on the $Ar/O_2$ flow ratio. In addition, x-ray diffraction examination results showed that the structure of the ITO film on the PET substrate was an amorphous structure regardless of the DC power and the $Ar/O_2$ flow ratio due to a low substrate temperature, which was maintained constant by a main cooling drum. Under optimized conditions, ITO film with resistivity of $6.44{\times}10^{-4}{\Omega}-cm$ and transparency of 86% were obtained, even when prepared at room temperature. Furthermore, bending test results exhibited that R2R-grown ITO film had good flexibility which would be applicable to flexible displays and solar cells.
Keywords
indium tin oxide; roll-to-roll sputter; PET; flexible displays and solar cells;
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