Characteristics of Indium Tin Oxide Films Grown on PET Substrate Grown by Using Roll-to-Roll (R2R) Sputtering System |
Cho, Sung-Woo
(Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology)
Choi, Kwang-Hyuk (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) Bae, Jung-Hyeok (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) Moon, Jong-Min (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) Jeong, Jin-A (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) Jeong, Soon-Wook (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) Park, No-Jin (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) Kim, Han-Ki (Department of Information and Nano Materials Engineering, Kumoh National Institute of Technology) |
1 | H.-C. Pan, M.-H. Shiao, C.-Y. Su and C.-N. Hsiao, J. Vac.Sci. Technol., A23, 1187 (2005) DOI ScienceOn |
2 | S. Ishibashi, Y. Higuchi, Y. Ota and K. Nakamura, J. Vac.Sci. Technol., A8, 1399 (1990) DOI |
3 | K. S. Ong, J. Hu, R. Shrestha, F. Ehu and S. J. chua, Thin solid films, 477, 32 (2005) DOI ScienceOn |
4 | L.-J. Meng and M. P. dos Santos, Thin solid films, 322, 56-62 (1998) DOI ScienceOn |
5 | J. Lewis, S. Grego, B. Chalamala, E. Vick and D. Temple, Appl. Phys. Lett., 85, 3450 (2004) DOI ScienceOn |
6 | M. Izu and T. Ellison, Sol. Energy Mater. Sol. Cells, 78, 613 (2003) DOI ScienceOn |
7 | J.-H. Hsieh and C. Li, J. Appl. Phys., 42, 5295 (2003) DOI |
8 | R. B. H. Tahar, T. Ban, Y. Ohya and Y. Takahashi, J. Appl.Phys., 83, 2631 (1998) DOI ScienceOn |
9 | R. B. H. Tahar, T. Ban, Y. Ohya and Y. Takahashi, J. Appl.phys., 83, 5 (1998) |
10 | G. Franz and B. Sotier, J. Vac. Sci. Technol. A, 19, 2541 (2001). |
11 | H. Kim and C. M. Gilmore, J, Appl. Phys., 86, 11 (1999.) |