Effect of Substrate Preheating on the Characteristics of Flexible and Transparent ITO Electrodes Grown by Roll-to-Roll Sputtering for Touch Panel Applications |
Kim, Dong-Ju
(경희대학교 정보전자신소재공학과)
Lee, Won-Young (지.텍(주)) Kim, Bong-Seok (지.텍(주)) Kim, Han-Ki (경희대학교 정보전자신소재공학과) |
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3 | Y.-S., S.-W. Jeong, W.-J. Cho, and H.-K. Kim, "Highly flexible indium zinc oxide electrode grown on PET substrate by cost efficient roll to roll sputtering systems", Thin Solid Films, Vol. 518, p. 3071, 2010. DOI |
4 | H.-Y. Yeom, "A study of the effect of process oxygen on stress evolution in d.c magnetron-deposited tin doped indium oxide", Thin Solid Films, Vol. 411, p. 17, 2002. DOI |
5 | J.-Y. Lee, "Growth and characterization of indium tin oxide thin films deposited on PET substrate", Thin Solid Films, Vol. 515, p. 1634, 2008. |
6 | L. Hao, "Thickness dependence of structural electrical and optical properties of indium tin oxide(ITO) films deposited on PET substrate", Appl. Surf. Sci., Vol. 254, p. 3504, 2008. DOI |
7 | 전자자료사, "최근 터치패널 시장과 기술동향", (월간)반도체-FPD, 통권 제254호, p. 74, 2009. |
8 | 알앤디비즈, “터치스크린 시장 동향”, EIC매거진, 통권 제3호, p. 16, 2009. |
9 | 조성우, 최광혁, 배정혁, 문종민, 정진아, 정순욱, 박노진, 김한기, “롤투롤 스퍼터 시스템을 이용하여 PET 기판에 성막 시킨 ITO박막의 특성 연구”, 한국재료학회지, 18권, 1호, p. 32, 2008. 과학기술학회마을 DOI |
10 | 강자연, 김동원, 조규일, 우병일, 윤환준, “PET 기판위에 버퍼층에 따른 ITO 박막의 부착 및 전기적 광학적 특성 연구”, 한국표면공학회지, 42권, 1호, p. 21, 2009. 과학기술학회마을 DOI |