• Applied Science and Convergence Technology
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• 제23권5호
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• pp.201-210
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• 2014

The influence of electron irradiation and hydrogen adsorption on the electronic structure of the $SrTiO_3$ (001) surface was investigated by ultraviolet photoemission spectroscopy (UPS). Upon electron irradiation of the surface, UPS revealed an electronic state within the band gap (in-gap state: IGS) with the surface kept at $1{\times}1$. This is considered to originate from oxygen vacancies at the topmost surface formed by electron-stimulated desorption of oxygen. Electron irradiation also caused a downward shift of the valence band maximum indicating downward band-bending and formation of a conductive layer on the surface. With oxygen dosage on the electron-irradiated surface, on the other hand, the IGS intensity was decreased along with upward band-bending, which points to disappearance of the conductive layer. The results indicate that electron irradiation and oxygen dosage allow us to control the surface electronic structure between semiconducting (nearly-vacancy free: NVF) and metallic (oxygen de cient: OD) regimes by changing the density of the oxygen vacancy. When the NVF surface was exposed to atomic hydrogen, in-gap states were induced along with downward band bending. The hydrogen saturation coverage was evaluated to be $3.1{\pm}0.8{\times}10^{14}cm^{-2}$ with nuclear reaction analysis. From the IGS intensity and H coverage, we argue that H is positively charged as $H^{{\sim}0:3+}$ on the NVF surface. On the OD surface, on the other hand, the IGS intensity due to oxygen vacancies was found to decrease to half the initial value with molecular hydrogen dosage. H is expected to be negatively charged as $H^-$ on the OD surface by occupying the oxygen vacancy site.

• 반도체디스플레이기술학회지
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• 제14권4호
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• pp.25-29
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• 2015

In this study, RF magnetron sputtering was used to investigate the relationship between oxygen vacancy and carrier concentration in a GZO film on an amorphous structure. RF power was fixed at 50W and Ar flow was changed on a glass plate to create a thin film at room temperature. The transmittance of Al-adopted amorphous GZO was measured at 85% or higher; therefore, the transmittance was shown to be outstanding in all films. The hall mobility was also shown to be higher at the film showing the high transmittance at a short-wavelength, whereas the optical energy gap was shown to be higher at the film with high oxygen vacancy. The oxygen vacancy at the amorphous oxide semi-conductor increased the optical energy gap while it was not directly involved in increasing the mobility. The oxygen vacancy increases the carrier concentration while lowering the quality of amorphous structure; such factor, therefore affected the mobility. The increase of amorphous property is a direct way to increase the mobility of amorphous oxide semi-conductor.

• 한국결정성장학회지
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• 제17권5호
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• pp.192-195
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• 2007

Structural and electronic properties of bulk GaN with nitrogen vacancy($V_N$), oxygen substitution on nitrogen site($O_N$), and complex of nitrogen vacancy and oxygen substitution on nitrogen site($V_N-O_N$) were investigated using the first principle calculations. It was found that stability of defect formation is dependent on the epilayer growth conditions. The complex of $V_N-O_N$ is energetically the most favorable state in a condition of Ga-rich, however, oxygen substitution in nitrogen site is the most favorable state in N-rich condition. The electronic property of complex with negative charge states at $\Gamma$ point was changed from semiconductor to metal. On the contrary, the properties of nitrogen vacancy except for neutral charge state have shown the semiconductor characteristics at $\Gamma$ point. In the oxygen substitution on nitrogen site, the energy differences between conduction band minimum and Fermi level were smaller than that of defect-free GaN.

• 한국정보통신학회논문지
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• 제21권10호
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• pp.1827-1832
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• 2017

본 연구는 산화물반도체의 저항을 이용한 메모리소자를 만들기 위해서 $V_2O_5$ 를 산소가스를 이용하여 증착하고 열처리를 하였다. 산소의 유량이 많을수록 산소공공의 형성을 위하여 높은 열처리온도가 필요하였으며, 산소공공은 쇼키접합을 형성하면서 전기적인 특성이 저항성 메모리소자에 적합한 구조로 만들어지고 있었다. $V_2O_5$ 박막은 열에 의한 이온화 반응에 의하여 산소공공이 형성되었으며, 전압 혹은 전류제어 가능한 저항성 메모리 소자를 위하여 쇼키접합이 +전압과 -전압에서 균형있게 이루어지는 것이 요구되며, 쇼키접합은 150도 혹은 200도에서 열처리가 이루어진 경우 쇼키접합이 잘 형성되는 것을 확인할 수 있었다. $V_2O_5$ 음이온인 산소공공은 역방향전압 혹은 순방향 전압인지에 따라서 저항이 변하면서 쓰기/지우기 상태로 전기적인 동작이 이루어졌으며 저항성메모리로서 구동을 하는 것을 확인하였다.

• 한국정보통신학회논문지
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• 제22권4호
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• pp.664-669
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• 2018

본 연구는 투명산화물반도체의 전기적인 특성과 산소공공과의 관계를 알아보기 위해서 $TiO_2$ 박막을 증착하여 MIM 구조를 만들어서 전압전류 특성을 관찰하였다. 산소공공은 XPS분석으로 이루어졌으며, 커패시턴스를 측정하여 전하의 용량이 많은 곳에서 산소공공이 어떤 영향을 주는가에 대하여도 조사하였다. 열처리를 통하여 결정질구조로 변하는 $TiO_2$ 박막은 산소공공이 가장 낮은 곳에서 커패시턴스 값이 가장 높았으며, 전하의 양이 많았다. 따라서 전하의 양이 많은 $TiO_2$박막이 $CO_2$ 가스에 대하여 가장 잘 민감하게 반응하는 것을 확인하였다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2007년도 추계학술발표대회 및
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• pp.19.2-19.2
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• 2007

• 한국전기전자재료학회논문지
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• 제18권2호
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• pp.109-115
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• 2005

The study of Oxygen Vacancy on SnO$_2$ thin films grown by thermal chemical vapor deposition were investigated with different substrate temperature. X-ray diffraction showed that the crystallinity of the grown thin films increased with increasing substrate temperature. Two narrow peaks and two broad peaks were observed from the photoluminescence measurements at 6 K. The intensity and shape of the broad peaks were changed with increasing substrate temperature. It was concluded that the origin of the broad peak at 2.4 eV was due to oxygen vacancies and that of peak at 3.1 eV was related to structural defects. Hall effect measurements showed that the carrier density was decreased as increasing deposition time from 10 to 30 min., but increased for the deposition of 60 min.

• Korean Chemical Engineering Research
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• 제57권5호
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• pp.701-705
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• 2019

알칼라인 조건에서의 산소발생 반응(oxygen-evolution reaction: OER)은 다양한 에너지 시스템에 중요한 반응으로 여겨지고 있다. 큰 overpotential을 감소시키기 위해 다양한 촉매들이 개발되고 있으며, 그 중 NiO는 높은 활성도에 대한 가능성으로 인해 연구가 활발하게 진행되고 있다. 촉매의 표면에서 OER에 대한 메커니즘은 정확하게 규명되지는 않았지만, 산화물 촉매에서 Ni 또는 O vacancy와 같은 결함들은 많은 전기화학반응에서 활성점으로 여겨진다. 따라서, 본 연구에서는 nitrogen을 ethylenediamine을 이용하여 NiO의 O위치에 치환하여 Ni vacancy를 형성하고 그로 인해서 OER의 activity와 내구성에 어떠한 영향을 미치는지에 대해 분석해 보았다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.293-294
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• 2008

CaO stabilized cubic-$HfO_2$ is studied by using Density Functional Theory with GGA. When a Ca atom is substituted for a Hf atom, an oxygen vacancy is produced to satisfy the charge neutrality condition. When the oxygen vacancy is located at the first nearest site from the Ca atom, the total energy of $HfO_2$ is the most favorable. We calculate the energy barriers for the oxygen vacancy migration. The energy barriers between the first and the second nearest sites, the second and the third nearest sites, and the third and fourth nearest sites are 0.2, 0.5, 0.24 eV, respectively. The oxygen vacancies at the third and fourth nearest sites from the Ca atom represent the oxygen vacancies in undoped $HfO_2$. Therefore, the energy barrier for oxygen migration in $HfO_2$ gate dielectricis is 0.24eV, which can explain a leakage origin of gate dielectric.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.340-341
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• 2012

In this work, we investigated the effects of temperature stress on flatband voltage (VFB) shifts of HfO2-SiO2 double gate dielectrics devices. Fig. 1 shows a high frequency C-V of the device when a positive bias for 10 min and a subsequent negative bias for 10 min were applied at room temperature (300 K). Fig. 2 shows the corresponding plot when the same positive and negative biases were applied at a higher temperature (473.15 K). These measurements are based on the BTS (bias temperature stress) about mobile charge in the gate oxides. These results indicate that the positive bias stress makes no difference, whereas the negative bias stress produces a significant difference; that is, the VFB value increased from ${\Delta}0.51$ V (300 K, Fig. 1) to ${\Delta}14.45$ V (473.15 K, Fig. 2). To explain these differences, we propose a mechanism on the basis of oxygen vacancy in HfO2. It is well-known that the oxygen vacancy in the p-type MOS-Cap is located within 1 eV below the bottom of the HfO2 conduction band (Fig. 3). In addition, this oxygen vacancy can easily trap the electron. When heated at 473.15 K, the electron is excited to a higher energy level from the original level (Fig. 4). As a result, the electron has sufficient energy to readily cross over the oxide barrier. The probability of trap about oxygen vacancy becomes very higher at 473.15 K, and therefore the VFB shift value becomes considerably larger.