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http://dx.doi.org/10.4313/JKEM.2005.18.2.109

A Study of Oxygen Vacancy on SnO2 Thin Films  

Jeong, Jin (조선대학교 물리학과)
Choi, Seung-Pyung (조선대학교 물리학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.18, no.2, 2005 , pp. 109-115 More about this Journal
Abstract
The study of Oxygen Vacancy on SnO$_2$ thin films grown by thermal chemical vapor deposition were investigated with different substrate temperature. X-ray diffraction showed that the crystallinity of the grown thin films increased with increasing substrate temperature. Two narrow peaks and two broad peaks were observed from the photoluminescence measurements at 6 K. The intensity and shape of the broad peaks were changed with increasing substrate temperature. It was concluded that the origin of the broad peak at 2.4 eV was due to oxygen vacancies and that of peak at 3.1 eV was related to structural defects. Hall effect measurements showed that the carrier density was decreased as increasing deposition time from 10 to 30 min., but increased for the deposition of 60 min.
Keywords
SnO$_2$; Thin films; Photoluminescence; Hail effect; Oxygen vacancy;
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  • Reference
1 Z. M. Jarzebski and J. P. Maraton. 'Physical properties of $SnO_2$ materials', J. Electrochem. Soc., Vol. 123, p. 199, 1976
2 V. Vasu and A. Subrahmanyam, 'Electrical and optical properties of sprayed $SnO_2$ films',Thin Solid Film., Vol. 193/194, p. 973, 1990
3 A. Tsunashima, 'Preparation and properties of antimony-doped $SnO_2$ films by thermal decomposition of tin 2 ethyhexanoate', J. Mater. Sci., Vol. 21, p. 2731, 1986
4 H. Pink, L. Treitinger, and L. Vite, 'Preapration of fast detecting $SnO_2$ gas sensors', Jpn. J. Appl. Phys.,Vol. 19, No. 3, p. 513, 1980
5 K. Ihokura and J. Watson, 'The stannic oxide gas sensor principles and applications', CRC Press, Boca Raton, FL,1994
6 J. I. Jung, B. C. Kim, S. H. Chang, and J. J. Kim, 'Effect of sintering atmosphere and dopant addition on the densification of $SnO_2$ ceramics', J. Kor. Ceram. Soc., Vol. 34, p. 1221, 1997
7 김혜동, 박민수, 이범주, 안병태, 'Spray pyrolysis 방법으로 증착된 $SnO_2$ 박막의 전기 및 광학적 특성', 한국재료학회지, 6권, 2호, p. 145, 1996
8 G. Blattner and C. Klingshim, 'Impurity transition in the photoluminescence spectra of $SnO_2$', Solid State Comrnun.,Vol. 33, p. 341, 1980
9 J. S. Park and H. G. Kim,'Thermal analysis of the Bi-Sr-Ca-Cu-O system by and Electrical properties', J. Appl. Phys., Vol. 65, No.2, p. 877, 1989
10 T. W. Kim,D. U. Lee,and Y. S. Yoon,'Microstructural,electrical,and optical properties of $SnO_2$ nanocrystallinen thin films grown on InP(100) substrate for applications as gas sensor device', J. Appl. Phys., Vol. 88, No.6, p. 3759, 2000
11 Per Kofstad, 'Nonstoichiometry, Diffusion,and Electrical Conductivity in Binary Metal Oxides', Jon Willy & Sons, New York, p. 221, 1972