• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2001년도 추계종합학술대회
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• pp.634-639
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• 2001

In this paper, we discuss optimum process conditions of Hemispherical Grained Silicon formation for high density DRAM'S capacitor. In optimum process renditions, the phosphorous concentration, storage polysilicon deposition temperature and thickness of hemispherical grain silicon are in the range of 3.0-4.0E19atoms/㎤, 53$0^{\circ}C$ and 40(equation omitted), respectively. in the 64M bit DRAM capacitor using optimum process conditions, limit thickness of nitride is about 65(equation omitted). The results obtained in this study are applicable to process control and HSG-Si formation for high reliability and high density DRAM's capacitor.

• International journal of advanced smart convergence
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• 제10권1호
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• pp.159-165
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• 2021

Electronic devices used in the mobile environments fabricated under the plasma conditions in high vacuum system. Especially for the development of advanced electronic devices, high quality plasma as the process conditions are required. For this purpose, the variable conductance throttle valves for controllable plasma employed to the high vacuum system. In this study, we analyzed the effects of throttle valve applications on vacuum characteristics simulated to obtain the optimum design modelling for plasma conditions of high vacuum system. We used commercial simulator of vacuum system, VacSim(multi) on this study. Reliability of simulator verified by simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably in plasma process.

• 한국기계가공학회지
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• 제11권1호
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• pp.1-6
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• 2012

The polishing of silicon wafers has an important role in semiconductor manufacturing. Generally, getting a flat surface such as a mirror is the purpose of the process. The wafer surface roughness is affected by many variables such as the characteristics of the carrier head unit, operation, speed, the pad and slurry temperature. Optimum process conditions for experimental temperature, pH value, down-force, slurry ratio are investigated, time is used as a fixed factor. This study carried out a series of experiments at varying platen, chuck rpm and oscillation cpm taking particular note of the difference between the rpm and the affect it has on the surface roughness. In this experiment determine the optimum conditions for polishing silicone wafers.

• 산업기술연구
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• 제13권
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• pp.3-17
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• 1993

The composting process is a suitable to dispose the livestock manure in terms of resources recovery. However the performence of composting process is greatly affected by the environmental conditions such as characteristics of manure, type of the bulking agent, initial moisture contents, temperature, recycle and so on. The purpose of this study is to evaluate the optimum environmental conditions of composting process for livestock manures. The analytical results indicated that no bulking agent was necessary for the cow manure because of the proper C/N ratio. However the pig manure required a bulking agent since the pig manure had not only low in C/N ration but poor ventilation characteristics. In addtion, the initial miosture content for optimum composting appeared to be about 60%. The temperature control was also an essential factor to enhance the activity of thermophilic microorganisms in the laboratory composting unit. It was further found that the recycle of composts may contributed the completion of composting precess as well as C/N ratio reduction and moisture control.

• Nuclear Engineering and Technology
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• 제54권9호
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• pp.3235-3241
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• 2022

The Korea Atomic Energy Research Institute (KAERI) is planning the construction of the KIJANG Research Reactor (KJRR) for stable supply of ⁹⁹Mo. The Fission ⁹⁹Mo Production Process (FMPP) of KJRR produces solid waste such as spent uranium cake and alumina cake, and liquid waste in the form of intermediate level liquid waste (ILLW) and low level liquid waste (LLLW). This study thus established the operating range and optimum operating conditions for the cementation of ILLW from FMPP. It also evaluated whether cement waste form samples produced under optimum operational conditions satisfy the waste acceptance criteria (WAC) of a disposal facility in Korea (Korea radioactive waste agency, KORAD). Considering economic feasibility and safety, optimum operational conditions were achieved at a w/c ratio of 0.55, and the corresponding salt content was 5.71 wt%. The cement waste form samples prepared under optimum operational conditions were found to satisfy KORAD's WAC when tested for structural stability and leachability. The results indicate that the proposed cementation conditions for the disposal of ILLW from FMMP can be effectively applied to KJRR's disposal facility.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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• pp.74.2-74.2
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• 2011

A simulation study on synthesis gas process in GTL process was carried out in order to find optimum operation conditions for GTL (gas-to-liquid) pilot plant design. Optimum operating conditions for synthesis gas process were determined by changing reaction variables such as feed temperature and pressure. During the simulation, overall synthesis process was assumed to proceed under steady-state conditions. It was also assumed that physical properties of reaction medium were governed by RKS (Redlich-Kwong-Soave) equation. The effect of temperature and pressure on synthesis gas process $H_2$/CO ratio were mainly examined. Simulation results were also compared to experimental results to confirm the reliability of simulation model. Simulation results were reasonably well matched with experimental results.

• 반도체디스플레이기술학회지
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• 제16권3호
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• pp.41-46
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• 2017

This study aims to select suitable co-solvents and to obtain optimal process conditions in order to improve process efficiency and productivity through experimental results obtained under various experimental conditions for the etching and rinsing process using liquid carbon dioxide and supercritical carbon dioxide. Acetone was confirmed to be effective through basic experiments and used as the etching solution for MEMS-wafer etching in this study. In the case of using liquid carbon dioxide as the solvent and acetone as the etching solution, these two components were not mixed well and showed a phase separation. Liquid carbon dioxide in the lower layer interfered with contact between acetone and Mems-wafer during etching, and the results after rinsing and drying were not good. Based on the results obtained under various experimental conditions, the optimum process for treating MEMS-wafer using supercritical CO2 as the solvent, acetone as the etching solution, and methanol as the rinsing solution was set up, and MEMS-wafer without stiction can be obtained by continuous etching, rinsing and drying process. In addition, the amount of the etching solution (acetone) and the cleaning liquid (methanol) compared to the initial experimental values can be greatly reduced through optimization of process conditions.

• 한국자동차공학회논문집
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• 제18권4호
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• pp.68-73
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• 2010

Welding conditions in process of spot welding must become optimum and need to guarantee stability and reliability of vehicle body considering dynamic load history. Because welding parameters in process of spot welding are various, it is difficult that the quality of spot weldment was included in the optimum levels. In this paper, we found the optimum welding conditions satisfying KS spot welding qualities using genetic algorithm and spot welding experiments of high tensile strength steel and galvanized steel. Those experiments were dissimilar weld and 2-lap spot welding. Genetic algorithm created random welding condition after that, selected optimum individuals by probability concept.

• Korean Chemical Engineering Research
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• 제53권2호
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• pp.181-192
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• 2015

본 연구는 Liquid Crystal Display (LCD) 세척 후 발생하는 Propylene Glycol Monomethyl Ether Acetate (PGMEA)폐액 재활용을 위한 2기 증류탑을 사용하는 공정의 최적 조건을 산출하였다. 공정조건 최적화 기법으로 다중회귀분석을 이용하여 1차 증류 시 Bottom 온도(BTM 온도), Reflux 량, Feed 량 및 Feed 온도에 따라 PGMEA 함량에 대한 최적 조건과 2차 증류 시 BTM 온도, Reflux 량, Feed 량에 따른 PGMEA 함량에 대한 최적 조건과 공정인자를 산출하였다. 1차 증류탑의 공정인자 중 Reflux 량, Feed 온도 및 Feed 량이 중요한 인자로 산출되었다. 본 연구의 공정조건 범위에서는 BTM 온도범위가 PGMEA함량에 크게 영향을 주지 못하였다. 따라서 최적 공정 조건은 Feed 량 $5,700{\ell}$, Reflux 량 $2,500{\ell}$, BTM 온도 $165^{\circ}C$ 및 Feed 온도 $130^{\circ}C$이며 이때 예측된 PGMEA 함량은 92.12~94.62%로 산출되었다. 2차 증류탑에서는 Reflux 량이 함량에 많은 영향을 미치고 있으며, Feed 량과 BTM 온도도 영향을 미치는 인자로 산출되었다. 다중공선성(Multicollinearity)이 Reflux 량과 BTM 온도 간에 강한 양의 상관관계가 있어, 두 인자 중 다중회귀식에 영향이 지배적인 인자 하나를 선택하였으며, 최적조건은 BTM 온도 $199^{\circ}C$ 기준에서 최적 공정 조건은 Feed 량 $4,275{\ell}$ 및 Reflux 량 $6,200{\ell}$이며, 이때 예측 PGMEA 함량은 99.0~99.5%로 산출되었다.

• Membrane and Water Treatment
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• 제6권4호
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• pp.293-308
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• 2015

Palm oil mill effluent (POME) was produced in huge amounts in Malaysia, and if it discharged into the environment, it causes a serious problem regarding its high content of nutrients and high levels of COD and BOD concentrations. This study was devoted on POME treatment and purification using an integrated process consisting of microalgae treatment followed by membrane filtration. The main objective was to find the optimum conditions as retention time and pH in the biological treatment of POME. Since after the optimum conditions there is a diverse effect of time and the process become costly. According to our knowledge, there is no existing study optimized the retention time and percentage removal of nutrients for microalgae treatment of POME wastewater. In order to achieve with optimization, a second order polynomial model regression coefficients and goodness of fit results in removal percentages of ammonia nitrogen ($NH_3-N$), orthophosphorous ($PO_4{^{-3}}$), COD, TSS, and turbidity were estimated. WinQSB technique was used to optimize the objective function of the developed model, and the optimum conditions were found. Also, ultrafiltration membrane is useful for purification of POME samples as verified by experiments.