• Bulletin of the Korean Chemical Society
• /
• v.35 no.3
• /
• pp.908-912
• /
• 2014

Microgratings whose diffracted field at a fixed angle generate IR spectra of $SF_6$ or $NH_3$ were fabricated by MEMS techniques for the purpose of IR correlation spectroscopy. Each micrograting was composed of 1441 reflecting lines in the area of $19.2{\times}19.2mm^2$. The depth profile of the line elements was determined with a gradient searching method that was described in our previous publication (J. Mod. Opt. 2013, 60, 324-330), and was discretized into 16 levels between 0 and $6.90{\mu}m$. The diffraction field from a given depth profile was calculated with Fraunhofer equation. The fabricated microgratings showed errors in the depth and the width within acceptable ranges. As the result, the diffracted IR spectrum of each micrograting matched well with its target reference spectrum within spectral resolution of our optical setup.

• Journal of Sensor Science and Technology
• /
• v.14 no.5
• /
• pp.337-342
• /
• 2005

A silicon-based micro-reactor to amplify small amount of deoxyribonucleic acid (DNA) has been fabricated using micro-electro-mechanical systems (MEMS) technology. Polymerase chain reaction (PCR) of DNA requires a precise and rapid temperature control. A Pt sensor is integrated directly in the chamber for real-time temperature measurement and an infrared lamp is used as external heating source for non-contact and rapid heating. In addition to the real-time temperature sensing, PCR needs a rapid thermocycling for effective PCR. For a fast thermal response, the thermal mass of the reactor chamber is minimized by removal of bulk silicon volume around the reactor using double-side KOH etching. The transparent optical property of silicon in the infrared wavelength range provides an efficient absorption of thermal energy into the reacting sample without being absorbed by silicon reactor chamber. It is confirmed that the fabricated micro-reactor could be heated up in less than 30 sec to the denaturation temperature by the external infrared lamp and cooled down in 30 sec to the annealing temperature by passive cooling.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.07a
• /
• pp.528-531
• /
• 2000

Deposition of PZT with UV laser ablatio was applied for realization of thin film sensors and actuators. Deposition rate of more than 20nm/min was attained by pulsed KrF excimer laser deposition, which is fairly better than those obtained by the other methods. Perovskite phase was obtained at room temperature deposition with Fast Atom Beam(FAB) treatment and annealing. Smart MEMS(Micro electro-mechanical system) is now a suject of interest in the field of micro optical devices, micro pumps, AFM cantilever devices etc. It can be fabricated by deposition of PZT thin films and micromachining. PZT films of more than 1 micron thickness is difficult to obtain by conventional methods. This is the reason why we applied excimer laser ablation for thin film deposition. The remanent polarization Pr of 700nm PZT thin film was measured, and the relative dielectric constant was determined to about 900 and the dielectric loss tangent was also measured to be about 0.04. XRD analysis shows that, after annealing at 650 degrees C in 1 hour, the perovskite structure would be formed with some amount of pyrochlore phase, as is the case of the annealing at 750 degrees C in 1 hour.

• Journal of Electrical Engineering and Technology
• /
• v.7 no.5
• /
• pp.784-788
• /
• 2012

In this paper, a high-performance optical gating in a junction device based on a vanadium dioxide dioxide ($VO_2$) thin film grown by a sol-gel method was experimentally demonstrated by directly illuminating the $VO_2$ film of the device with an infrared light at ~1554.6 nm. The threshold voltage of the fabricated device could be tuned by ~76.8 % at an illumination power of ~39.8 mW resulting in a tuning efficiency of ~1.930 %/mW, which was ~4.9 times as large as that obtained in the previous device fabricated using the $VO_2$ thin film deposited by a pulsed laser deposition method. The rising and falling times of the optical gating operation were measured as ~50 ms and ~200 ms, respectively, which were ~20 times as rapid as those obtained in the previous device.

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.10 s.175
• /
• pp.195-201
• /
• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.31 no.5
• /
• pp.466-471
• /
• 2011

Optical coherence tomography(OCT) is an emerging medical diagnostic tool that draws great attention in medical and biological fields. It has a 10-100 times higher spatial resolution than that of the clinical ultrasound but lower imaging depth such as 1-2 mm. In order to image internal organs, OCT needs an endoscopic probe. In this paper, the principle of Fourier-domain optical coherence tomography with high-speed imaging capability was introduced. An OCT endoscope based on MEMS technology was developed. It was attached to the Fourier-domain OCT system to acquire three-dimensional tomographic images of gastrointestinal tract of New Zealand white rabbit. The endoscope had a two-axis scanning mirror that was driven by electrostatic force. The mirror stirred an incident light to sweep two-dimensional plane by scanning. The outer diameter of the endoscope was 6 mm and the mirror diameter was 1.2 mm. A three-dimensional image rendered by 200 two-dimensional tomographs with $200{\times}500$ pixels was displayed within 3.5 seconds. The spatial resolution of the OCT system was 8 ${\mu}m$ in air.

• Korean Journal of Optics and Photonics
• /
• v.18 no.2
• /
• pp.162-166
• /
• 2007

In this paper, we propose a WDM optical true time-delay (OTTD) beam former for phased way antenna (PAA) systems. It is composed of a delay lines matrix and a multiwavelength source with discrete DFB laser diodes. The building block of a delay lines matrix is a $2\times2$ optical MEMS switch with proper fiber-optic delay line connected between cross ports. A $4\times3$ matrix using four DFB lasers has been fabricated with unit time-delay difference of 12 ps. Maximum time-delay error was measured to be -1.74 ps and +1.14 ps at a radiation angle of $46.05^{\circ}$, corresponding to error range of $-2.87^{\circ}\sim+1.88^{\circ}$. By measuring time-delays at six different RF frequencies from 5- to 10-GHz, we verified the true time-delay characteristic of our OTTD.

• Journal of the Institute of Electronics and Information Engineers
• /
• v.51 no.6
• /
• pp.78-86
• /
• 2014

In this paper, a novel intensity-based fiber optic vibration sensor using a mass-spring structure, which consists of four serpentine flexure springs and a rectangular aperture within a proof mass, is proposed and its feasibility test is given by the simulation and experiment. An optical collimator is used to broaden the beam which is modulated by the displacement of the rectangular aperture within the proof mass. The proposed fiber optic vibration sensor has been analyzed and designed in terms of the optical and mechanical parts. A mechanical structure has been designed using theoretical analysis, mathematical modeling, and 3D FEM (Finite Element Method) simulation. The relative aperture displacement according to the base vibration is given using FEM simulation, while the output beam power according to the relative displacement is measured by experiment. The simulated sensor sensitivity of $15.731{\mu}W/G$ and detection range of ${\pm}6.087G$ are given. By using reference signal, the output signal with 0.75% relative error shows a good stability. The proposed vibration sensor structure has the advantages of a simple structure, low cost, and multi-point sensing characteristic. It also has the potential to be made by MEMS (Micro-Electro-Mechanical System) technology.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.11 s.188
• /
• pp.116-125
• /
• 2006

MEMS and LIGA technologies have been used for fabricating microstructures, but their shape is not 3D because of difficulty for preparation of many masks. To fabricate 3D microstructures, microstereolithography technology based on Digital Micromirror Device($DMD^{TM}$) was introduced. It has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, STL file is the standard format as the same of conventional rapid prototyping system, and 3D parts are fabricated by layer-by-layer according to 2D section sliced from STL file. The UV light source is illuminated to DMD which makes bitmap images of 2D section, and they are transferred and focused on resin surface. In this paper, we addressed optical design of microstereolithography system in consideration of light path according to DMD operation and image-forming on the resin surface using optical design program. To verify the performance of implemented microstereolithography system, 3D microstructures with complexity and high aspect ratio were fabricated.

• Journal of Mechanical Science and Technology
• /
• v.20 no.12
• /
• pp.2094-2104
• /
• 2006

As demands for complex microstructures with high aspect ratios have increased, the existing methods, MEMS and LIGA, have had difficulties coping with the number of masks and fabricable heights. A microstereolithography technology can meet these demands because it has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, 3D part is fabricated by stacking layers, 2D sections, which are sliced from STL file, and the Dynamic Image Projection process enables the resin surface to be cured by a dynamic image generated with $DMD^{TM}$ (Digital Micromirror Device) and one irradiation. In this paper, we address optical design process for implementing this microstereolithography system that takes the light path based on DMD operation and image-formation on the resin surface using an optical design program into consideration. To verify the performance of this implemented microstereolithography system, complex 3D microstructures with high aspect ratios were fabricated.