• Title/Summary/Keyword: Open-gap

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Effect of Post-CMP Cleaning On Electrochemical Characteristics of Cu and Ti in Patterned Wafer

  • Noh, Kyung-Min;Kim, Eun-Kyung;Lee, Yong-Keun;Sung, Yun-Mo
    • Korean Journal of Materials Research
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    • v.19 no.3
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    • pp.174-178
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    • 2009
  • The effects of post-CMP cleaning on the chemical and galvanic corrosion of copper (Cu) and titanium (Ti) were studied in patterned silicon (Si) wafers. First, variation of the corrosion rate was investigated as a function of the concentration of citric acid that was included in both the CMP slurry and the post-CMP solution. The open circuit potential (OCP) of Cu decreased as the citric acid concentration increased. In contrast with Cu, the OCP of titanium (Ti) increased as this concentration increased. The gap in the OCP between Cu and Ti increased as citric acid concentration increased, which increased the galvanic corrosion rate between Cu and Ti. The corrosion rates of Cu showed a linear relationship with the concentrations of citric acid. Second, the effect of Triton X-$100^{(R)}$, a nonionic surfactant, in a post-CMP solution on the electrochemical characteristics of the specimens was also investigated. The OCP of Cu decreased as the surfactant concentration increased. In contrast with Cu, the OCP of Ti increased greatly as this concentration increased. Given that Triton X-$100^{(R)}$ changes its micelle structure according to its concentration in the solution, the corrosion rate of each concentration was tested.

Manufacturing Automobile Member Part by Multi-Stage Simulation (다공정 성형 해석에 의한 자동차 멤버 부품 개발)

  • Park C. D.;Chung W. J.;Kim B. M.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2004.11a
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    • pp.71-78
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    • 2004
  • Most of member parts have experienced severe springback problems because of their open shape Now it becomes imperative to develop an effective method, which can resolve these problems. However, there remain several obstacles to get accurate estimation of shape error. In analysis, we have to analyze the total process including forming, trimming and flanging. Furthermore, it is another challenge to compare the computed result with the real shape. In this study we developed an analysis program for the springback analysis. We could achive a big enhancement in computation time in springback analysis by using latest equation solving technique and could get a more robust solution conversence by contination method. We have approached this problem in two steps. In the first step, we analyzed forming stage to solve tearing and wrinkling problems. In the second step, we have analyzed full process and have done springback analysis with the same boundary condition as field measuring conditions. We have investigated the accuracy of springback analysis in terms of gap and flush used for insfection of real autobody panels. We found good and effective agreement with the observed results.

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Negative Emotions and Coping Behaviors of Passenger in the Airline Industry, Vietnam

  • HOANG, Canh Chi
    • The Journal of Asian Finance, Economics and Business
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    • v.7 no.10
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    • pp.865-874
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    • 2020
  • In Vietnam, the airline service sector plays an important economic role. However, it is a complicated industry that is open to failures. Negative emotions are an essential variable for the airline service industry because they can trigger a variety of coping behaviors that affect consumer loyalty as well as the image and reputation of the airline service providers. However, negative emotions and the accompanying coping behaviors are often investigated partially or as separate issues, thus leading to an incomplete understanding. This study is conducted to fill this gap by proposing and testing the causal relationship between negative emotions (anger, frustration, regret) and coping behaviors (complaint, negative word-of-mouth (WOM), and switching intention) in the context of the airline industry. Eight research hypotheses are tested. Using the partial least squares structural equation modeling (PLS-SEM) on a sample of 587 passengers in Vietnam, the empirical results show that anger and frustration influence complaints, negative WOM, and switching intention, while regret leads to switching intention and negative WOM. Thus, the research has important academic and practical implications. The empirical outcome could be of major importance for airline companies in planning to provide new services and achieve high performance in the long run.

Study on the Relationship Between Turbulent Normal Stresses in the Fully Developed Bare Rod Bundle Flow (완전히 발달된 맨봉주위의 난류유동장에서 난류 응력사이의 상관 관계에 대한 연구)

  • Lee, Kye-Bock;Lee, Byung-Jin
    • Nuclear Engineering and Technology
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    • v.27 no.6
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    • pp.888-893
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    • 1995
  • The turbulence structure for fully developed flow through the subchannels formed by the bare rod array depends on the pitch to rod diameter ratio. For fairly open spaced bare rod arrays, the distributions of the three components of the turbulent normal stresses are similar to those measured in circular pipe. However, for more closely spaced arrays, the turbulence structure, especially in the gap region, depart markedly from the pipe flow distribution. A linear relationship between turbulent normal stresses and turbulent kinetic energy for fully developed turbulent flow through regularly spaced bare rod arrays has been developed. This correlation can be used in connection with various theoretical analyses applied in turbulence research.

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30kVA Superconducting Generator Development : Design and Performance Test (30kVA 초전도전기 개발(II) ; 설계 및 성능평가)

  • Baik, S.K.;Sohn, M.H.;Kwon, Y..K.;Ko, R.K.;Lee, E.Y.;Ryu, K.S.;Park, D.Y.;Kim, Y.J.;Ahn, J.B.;Kim, K.H.
    • Proceedings of the KIEE Conference
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    • 1999.07a
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    • pp.232-234
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    • 1999
  • A 30kVA superconducting generator (S.G.) has been designed, developed and successfully tested in KERI before the end of last year. The design is based on 2-dimensional electromagnetic field analysis of cylindrical coordinate. The field winding of rotor has been wound with superconducting wire of Nb-Ti alloy and tested after assembled with other rotor components. The stator has air-gap type armature windings which allow higher terminal voltage and more sinusoidal voltage waveform than conventional iron cored machines. Steady-state open & short-circuit test and lamp load test have been conducted also. The results of tests are given in this paper and compared with design quantities. Moreover the cooling scheme and characteristics of test system is included.

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A Surface-Bulk Micromachined Electromagnetic Gyroscope Operating at Atmospheric Pressure (표면 및 몸체 미세 가공 기술로 제작된 대기압에서 동작하는 전자력 검출형 각속도계의 연구)

  • Kim, Seong-Hyok;Kim, Yong-Kweon;Song, Jin-Woo;Lee, Jang-Gyu
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.2230-2232
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    • 2000
  • This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The fabricated structure has comb electrodes which are 400${\mu}m$ thick, 18${\mu}m$ wide, 600${\mu}m$ long and separated by 7${\mu}m$ so that the height-gap ratio is about 57. It also has electroplated gold springs which are 15${\mu}m$ wide, 14${\mu}m$ thick and 500${\mu}m$ long on both sides of the seismic mass. The open-loop characteristics of fabricated gyroscope at atmospheric pressure are measured on a rate table. The fabricated gyroscope has a sensitivity of 30mV/deg/sec, and a resolution of 0.1deg/sec at atmospheric pressure. It is expected that non linearity of full scale output is less than 0.8% with. the dynamic range of $\pm$500deg/sec.

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A Study on the Locality in the Mixed-use Facilities - Focused on the Mixed-use Facilities in Japan - (도시 복합용도시설에 나타난 '지역성'의 특성에 관한 연구 - 일본 복합용도시설을 중심으로 -)

  • Won, Sun-Young;Park, Jung-Ah;Lee, Hyo-Chang;Ha, Mi-Kyoung
    • Proceedings of the Korean Institute of Interior Design Conference
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    • 2008.05a
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    • pp.285-289
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    • 2008
  • There has been a project in Japan recently to develop the mixed-use facility in order to help regenerate its city's vitality. They must make efficient use of resources that contains historical and local identity. In contrast, Korea hasn't considered developing their mixed-use facilities for maintaining their historical identity. This research will analyze how locality is reflected in the 8 mixed-use facilities in Japan. The research method was as follows: Preparatory study and literature research were conducted to extract the elements of locality shown in the mixed-use facilities in Japan. According to the results, the peculiarities of locality are as follows: 1) It's important to make the most of the local Identity by reflecting on the historical peculiarity of the region. 2) Nature and its environmental surroundings should be considered when constructing buildings in order to revitalize its local identity. 3) In the perception aspect, when a mixed-use facility is open for visit, the negative elements such as the 'peripheral regional gap' that may be felt by the visitor must be kept to the minimum.

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Fabrication and test of 100 hp High Tc Superconducting Motor (100마력 고온초전도 모터 제작과 평가(I))

  • Sohn M.H.;Baik S.K.;Lee E.Y.;Kwon Y.K.;Kwon W.S.;Moon T.S.;Park H.J.;Kim Y.C.;Cho C.H.
    • Proceedings of the KIEE Conference
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    • summer
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    • pp.1118-1120
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    • 2004
  • For the first time in Korea, a 100hp high Tc superconducting(HTS) motor has been designed, developed and successfully tested recently. The design was based on 2-dimensional electromagnetic field analysis of cylindrical coordinate. The field winding of rotor was wound with Bi-2223 tapes and tested after assembled with other rotor components. The stator had air-gap type armature windings which allow higher terminal voltage and more sinusoidal voltage waveform than conventional iron cored machines. Steady state open & short-circuit test and resistive load test were conducted also in generator mode. The fabrication and test results of this machine were discussed in this paper.

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The Fabrication and Characteristics of ITO Thin Films and ITO/p-InP Solar Cells (ITO박막과 ITO/p-InP 태양전지의 제작 및 특성)

  • 맹경호;문동찬;송복식;김선태
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.05a
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    • pp.105-109
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    • 1992
  • ITO film, 1500${\AA}$ of thickness, onto glass and p-InP wafer was prepared by e-beam evaporator. The bet ITO film had the resistivity 5.3${\times}$10$\^$-3/ $\Omega$-cm, the concentration 6.5${\times}$10$\^$20/cm$\^$-3/, the transmittance above 80%, and the optical energy gap about 3.5eV. The higher pressure of injected oxygen, the less reverse bias saturation current and the more open circuit voltage. Under the optimum evaporation conditions, the efficiency was 7.19% and the series resistance, and the shunt resistance were respectively 8.5%, 3${\alpha}$, and 26K$\Omega$. The interdependence between activation energy and pre-exponential factor was found. We found he surface of the p-InP became n-type and consquently supposed that the buried homojunction formation, that is, n+-ITO/n-InP/p-InP was caused by Sn diffusion or loss of phosphorus in the interface layer.

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The Study on Design and Dynamic Operation Characteristics of Linear Pulse I for Embroidery Machine (자수기에 맞는 LPM의 설계와 구동 특성에 관한 연구)

  • Park, Chang-Soon;Kwon, Tae-Gun
    • Proceedings of the KIEE Conference
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    • 2001.10a
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    • pp.91-93
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    • 2001
  • Linear pulse Motors(LPM) are widely used in fields where smooth linear motion is required, and their position accuracy is higher than other motors. Hybrid linear pulse motors(HLPM) are regarded as an excellent solution to positioning problems that require high accuracy, rapid acceleration and high-speed. The LPM has low mechanical complexity, high reliability, precise open-loop operation and low inertia etc. In many application areas such as factory automation speed positioning, computer peripherals and numerically controlled machine tools, LPM can be used. This motor drive system is especially suitable for machine tools the high position accuracy and repeatability. This paper describes about that need of the embroider machine, we want to design position-scanning device for the embroidery machine. At first, to be analysed characteristics of the machine and next designed the LPM, we used the field analysis program. The finite element method(FEM) program tool is employed for calculation the force. The reluctance models will be used the magnetic permeance of air gap by static-conditions. The forces between forcer and platen have been calculated using the virtual work method. And we used the simulink to know the dynamic characteristics of LPM.

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