• Title/Summary/Keyword: Nanostructures

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Sintering of High K LTCC Compatible Dielectrics

  • Duguey, Sonia;Lebourgeois, Richard;Heintz, Jean-Marc
    • 한국분말야금학회:학술대회논문집
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    • 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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    • pp.376-376
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    • 2006
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Fabrication of Optically Active Nanostructures for Nanoimprinting

  • Jang, Suk-Jin;Cho, Eun-Byurl;Park, Ji-Yun;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.393-393
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    • 2012
  • Optically active nanostructures such as subwavelength moth-eye antireflective structures or surface enhanced Raman spectroscopy (SERS) active structures have been demonstrated to provide the effective suppression of unwanted reflections as in subwavelength structure (SWS) or effective enhancement of selective signals as in SERS. While various nanopatterning techniques such as photolithography, electron-beam lithography, wafer level nanoimprinting lithography, and interference lithography can be employed to fabricate these nanostructures, roll-to-roll (R2R) nanoimprinting is gaining interests due to its low cost, continuous, and scalable process. R2R nanoimprinting requires a master to produce a stamp that can be wrapped around a quartz roller for repeated nanoimprinting process. Among many possibilities, two different types of mask can be employed to fabricate optically active nanostructures. One is self-assembled Au nanoparticles on Si substrate by depositing Au film with sputtering followed by annealing process. The other is monolayer silica particles dissolved in ethanol spread on the wafer by spin-coating method. The process is optimized by considering the density of Au and silica nano particles, depth and shape of the patterns. The depth of the pattern can be controlled with dry etch process using reactive ion etching (RIE) with the mixture of SF6 and CHF3. The resultant nanostructures are characterized for their reflectance using UV-Vis-NIR spectrophotometer (Agilent technology, Cary 5000) and for surface morphology using scanning electron microscope (SEM, JEOL JSM-7100F). Once optimized, these optically active nanostructures can be used to replicate with roll-to-roll process or soft lithography for various applications including displays, solar cells, and biosensors.

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촉매에 따른 다양한 탄소나노구조체 합성 (Fabrication of various carbon nanostructures by using different catalysts)

  • 최강호;유인준;이희수;이규환;임동찬
    • 한국결정성장학회지
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    • 제20권3호
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    • pp.133-140
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    • 2010
  • 탄소 섬유소재는 가벼우면서고 강건한 특성과 화학적 안정성 등으로 인해 항공기, 자동차, 레저, 우주항공, 풍력, 연료전지, 방위 산업 등의 분야를 비롯하여 최근에는 다양한 산업용 복합재료 및 보강용 분야에서 많이 사용되고 있다. 본 연구에서는 탄소섬유의 기능성 향상 및 다양한 응용 분야 확대를 위하여 물리적, 화학적 특성이 우수한 탄소나노튜브와 같은 다양한 탄소나노구조체를 탄소섬유상에 하이브리드화 하는 연구를 진행하였다. ELP(Electroless plating)법을 이용하여 탄소섬유 표면처리 및 촉매 입자 형성을 동시에 진행하였으며, Thermal CVD법을 이용하여 탄소나노구조체를 형성한 결과, 탄소섬유상 Pd/Ni 복합 촉매의 비율에 따라서 탄소나노튜브, 탄소나노필라멘트 등 다양한 형태의 탄소섬유상 탄소나노구조체가 형성되는 것을 알 수 있었다. Pd촉매의 비율이 높을 수록 다중벽 탄소나노튜브(Multiwall carbon naotube)의 생성 비율이 높아지고, Ni촉매의 비율이 상대적으로 증가할 수록 탄소나노필라멘트(Carbon nanofilament)의 생성 비율이 높아짐을 알 수 있었다.

R-plane Sapphire 기판에 수열합성법으로 제작된 ZnO 나노구조체의 성장 및 특성 (Hydrothermal Growth and Characterization of ZnO Nanostructures on R-plane Sapphire Substrates)

  • 조관식;김민수;임재영
    • 대한금속재료학회지
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    • 제50권8호
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    • pp.605-611
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    • 2012
  • ZnO nanostructures were grown on R-plane sapphire substrates with seed layers annealed at different temperatures ranging from 600 to $800^{\circ}C$. The properties of the ZnO nanostructures were investigated by scanning electron microscopy, high-resolution X-ray diffraction, UV-visible spectrophotometer, and photoluminescence. For the as-prepared seed layers, ZnO nanorods and ZnO nanosheets were observed. However, only ZnO nanorods were grown when the annealing temperature was above $700^{\circ}C$. The crystal qualities of the ZnO nanostructures were enhanced when the seed layers were annealed at $700^{\circ}C$. In addition, the full width at half maximum (FWHM) of near-band-edge emission (NBE) peak was decreased from 139 to 129 meV by increasing the annealing temperature to $700^{\circ}C$. However, the FWHM was slightly increased again by a further increase in the annealing temperature. Optical transmittance in the UV region was almost zero, while that in the visible region was gradually increased as the annealing temperature increased to $700^{\circ}C$. The optical band gap of the ZnO nanostructures was increased as the annealing temperature increased to $700^{\circ}C$. It is found that the optical properties as well as the structural properties of the rod-shaped ZnO nanostructures grown on R-plane sapphire substrates by hydrothermal method are improved when the seed layers are annealed at $700^{\circ}C$.

이산화주석 나노구조물의 성장에서 산소가스 유량이 미치는 영향 (The Influence of Oxygen Gas Flow Rate on Growth of Tin Dioxide Nanostructures)

  • 김종일;김기출
    • 한국산학기술학회논문지
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    • 제19권10호
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    • pp.1-7
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    • 2018
  • 이산화주석은 리튬 이온 전지의 Anode 전극물질, 또는 $H_2$, NO, $NO_2$ 등의 가스 분자가 표면에 흡착되면 전기저항이 변하는 특성을 이용하여 가스센서로 활용되고 있으며, 나노구조를 갖는 이산화주석의 합성과 관련하여 많은 연구가 활발하게 이루어지고 있다. 나노구조물의 경우 Bulk 상태보다 체적 대비 표면적비가 높기 때문에 기체분자의 흡착확률을 높일 수 있으므로 고감도 가스 센서의 구현이 가능하고, Li-ion 이차전지의 경우에도 비정전용량을 향상시킬 수 있다. 본 연구에서는 열화학기상증착 장비를 이용하여 기상수송방법으로 $SnO_2$ 나노구조물을 Si 기판 위에 직접 성장시켰다. 이때 이송가스로 이용되는 고순도 Ar 가스에 고순도 산소가스를 혼합하였고, 산소가스의 혼합량에 따라 다른 형태의 산화주석 나노구조물이 성장되는 것을 확인하였다. 기상수송방법으로 성장된 산화주석 나노구조물의 결정학적 특성은 Raman 분광학 및 XRD 분석을 통하여 확인하였고, 표면형상을 주사전자현미경을 통하여 확인하였다. 분석결과 산화주석 나노구조물은 산소가스 혼합량에 민감하게 영향을 받았으며, 이송가스로 이용되는 고순도 Ar 1000 SCCM에 고순도 산소가스 10 SCCM을 혼합하였을 때, 적당한 두께를 가지면서 Nanodots 형태의 표면형상을 갖는 $SnO_2$ 결정상의 나노구조물이 성장되는 것을 확인하였다.

수열합성법으로 성장된 ZnO 나노구조의 성장조건에 따른 특성 (Effects of Growth Conditions on Properties of ZnO Nanostructures Grown by Hydrothermal Method)

  • 조민영;김민수;김군식;최현영;전수민;임광국;이동율;김진수;김종수;이주인;임재영
    • 한국재료학회지
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    • 제20권5호
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    • pp.262-266
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    • 2010
  • ZnO nanostructures were grown on an Au seed layer by a hydrothermal method. The Au seed layer was deposited by ion sputter on a Si (100) substrate, and then the ZnO nanostructures were grown with different precursor concentrations ranging from 0.01 M to 0.3M at $150^{\circ}C$ and different growth temperatures ranging from $100^{\circ}C$ to $250^{\circ}C$ with 0.3 M of precursor concentration. FE-SEM (field-emission scanning electron microscopy), XRD (X-ray diffraction), and PL (photoluminescence) were carried out to investigate the structural and optical properties of the ZnO nanostructures. The different morphologies are shown with different growth conditions by FE-SEM images. The density of the ZnO nanostructures changed significantly as the growth conditions changed. The density increased as the precursor concentration increased. The ZnO nanostructures are barely grown at $100^{\circ}C$ and the ZnO nanostructure grown at $150^{\circ}C$ has the highest density. The XRD pattern shows the ZnO (100), ZnO (002), ZnO (101) peaks, which indicated the ZnO structure has a wurtzite structure. The higher intensity and lower FWHM (full width at half maximum) of the ZnO peaks were observed at a growth temperature of $150^{\circ}C$, which indicated higher crystal quality. A near band edge emission (NBE) and a deep level emission (DLE) were observed at the PL spectra and the intensity of the DLE increased as the density of the ZnO nanostructures increased.

Synthesis and Applications of Noble Metal and Metal Silicide and Germanide 1-Dimensional Nanostructures

  • Yoon, Ha-Na;Yoo, Young-Dong;Seo, Kwan-Yong;In, June-Ho;Kim, Bong-Soo
    • Bulletin of the Korean Chemical Society
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    • 제33권9호
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    • pp.2830-2844
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    • 2012
  • This review covers recent developments in our group regarding the synthesis, characterization and applications of single-crystalline one-dimensional nanostructures based on a wide range of material systems including noble metals, metal silicides and metal germanides. For the single-crystalline one-dimensional nanostructures growth, we have employed chemical vapor transport approach without using any catalysts, capping reagents, and templates because of its simplicity and wide applicability. Au, Pd, and Pt nanowires are epitaxially grown on various substrates, in which the nanowires grow from seed crystals by the correlations of the geometry and orientation of seed crystals with those of as-grown nanowires. We also present the synthesis of numerous metal silicide and germanide 1D nanostructures. By simply varying reaction conditions, furthermore, nanowires of metastable phase, such as $Fe_5Si_3$ and $Co_3Si$, and composition tuned cobalt silicides (CoSi, $Co_2Si$, $Co_3Si$) and iron germanides ($Fe_{1.3}Ge$ and $Fe_3Ge$) nanowires are synthesized. Such developments can be utilized as advanced platforms or building blocks for a wide range of applications such as plasmonics, sensings, nanoelectronics, and spintronics.