Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2009.10a
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- Pages.33-34
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- 2009
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- 2005-8446(pISSN)
Patterning Line Type Oxide Nanostructures using Atomic Force Microscope(AFM) Lithography
Atomic Force Microscope Lithography를 이용한 선타입 옥사이드 구조물 패터닝
- Published : 2009.10.26