• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.136-141
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• 2023

The continuous shrinking of transistors in integrated circuits leads to difficulties in improving performance, resulting in the emerging transistors such as nanosheet field-effect transistors. In this paper, we propose a TCAD-machine learning framework of nanosheet FETs to model the current-voltage characteristics. Sentaurus TCAD simulations of nanosheet FETs are performed to obtain a large amount of device data. A machine learning model of I-V characteristics is trained using the multi-layer perceptron from these TCAD data. The weights and biases obtained from multi-layer perceptron are implemented in a PSPICE netlist to verify the accuracy of I-V and the DC transfer characteristics of a CMOS inverter. It is found that the proposed machine learning model is applicable to the prediction of nanosheet field-effect transistors device and circuit performance.

• 상하수도학회지
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• 제31권5호
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• pp.373-381
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• 2017

$RuO_2$ is a common active component of Dimensionally Stable Anodes (DSAs) for chlorine evolution that can be used in wastewater treatment systems. The recent improvement of chlorine evolution using nanostructures of $RuO_2$ electrodes to increase the treatment efficiency and reduce the energy consumption of this process has received much attention. In this study, $RuO_2$ nanorod and nanosheet electrodes were simply fabricated using the sol-gel method with organic surfactants as the templates. The obtained $RuO_2$ nanorod and nanosheet electrodes exhibit enhanced electrocatalytic activities for chlorine evolution possibly due to the active surface areas, especially the outer active surface areas, which are attributed to the increase in mass transfers compared with a conventional nanograin electrode. The electrocatalytic activities for chlorine evolution were increased up to 20 % in the case of the nanorod electrode and 35% in the case of the nanosheet electrode compared with the nanograin electrode. The $RuO_2$ nanorod 80 nm in length and 20-30 nm in width and the $RuO_2$ nanosheet 40-60 nm in length and 40 nm in width are formed on the surface of Ti substrates. These results support that the templated $RuO_2$ nanorod and nanosheet electrodes are promising anode materials for chlorine evolution in future applications.

• 한국표면공학회지
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• 제52권3호
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• pp.130-137
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• 2019

In this study, the cobalt sulfide (CoS) nanosheet on stainless steel as a supercapacitor electrode is synthesized by using a facile successive ionic layer adsorption reaction (SILAR) method. The number of cycles for dipping and rinsing can control the nanosheet thickness of CoS on stainless steel. Field emission-scanning electron microscopy (FE-SEM) showed a layer structure of CoS particles coupled as agglomeration. And x-ray diffraction (XRD) showed the crystallinity of the CoS nanosheet. To investigate the characteristics of the CoS nanosheet electrode as the supercapacitor, analysis of electrochemical measurement was conducted. Finally, the CoS nanosheet of 70cycles on stainless steel shows the specific capacitance ($44.25mF/cm^2$ at $0.25mA/cm^2$) with electrochemical stability of 78.5% over during 2000cycles.

• 한국전기전자재료학회논문지
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• 제35권1호
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• pp.50-57
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• 2022

Reliability of CMOS has been severed under aggressive device scaling. Conventional technologies such as lightly doped drain (LDD) and forming gas annealing (FGA) have been applied for better device reliability, but further advances are modest. Alternatively, electro-thermal annealing (ETA) which utilizes Joule heat produced by electrodes in a MOSFET, has been newly introduced for gate dielectric curing. However, concerns about mechanical stability during the electro-thermal annealing, have not been discussed, yet. In this context, this paper demonstrates the mechanical stability of nanosheet FET during the electro-thermal annealing. The effect of mechanical stresses during the electro-thermal annealing was investigated with respect to device design parameters.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2022년도 춘계학술대회
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• pp.560-561
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• 2022

본 논문은 Nanosheet FET(NSFET)와 FinFET의 소자 성능을 3차원 소자 시뮬레이션을 통하여 다양한 구조의 NSFET와 FinFET의 소자 시뮬레이션을 한다. NSFET와 FinFET의 전류-전압 특성을 시뮬레이션하였고, 그 전류-전압 특성으로부터 추출한 문턱전압, 문턱전압이하 기울기 등의 성능을 비교하였다. NSFET이 FinFET보다 전류-전압 특성에서 드레인 전류가 더 많이 흐르며 더 높은 문턱전압을 갖는다. 문턱전압이하 기울기는 NSFET와이 FinFET보다 더 가파른 기울기를 갖는다.

• 센서학회지
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• 제22권3호
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• pp.207-211
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• 2013

In this research, the pH sensor was developed using CNT nanosheet with Nafion coating for the advanced medical sensor such as a blood gas analyzer. The CNT nanosheet was formed by dielectrophoresis and water-meniscus between cantilever-type electrodes. Then, the process of the heat annealing and the Nafion coating was conducted for reducing contact resistance and giving proton selectivity respectively. We measured the response of the pH sensor as the electrolyte-gated CNT-nanosheet field effect transistor. The sensor showed a linear current ratio in a similar range of the normal blood pH. A calibration method for decreasing of the response variation among sensors has also been introduced. Coefficient of variance of the pH sensor was decreased by applying the calibration method. A linear relation between the calibrated response of the sensors and pH variance was also obtained. Finally, the pH sensor with a high resolution was fabricated and we verify the feasibility of the sensor by applying the calibration method.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2022년도 추계학술대회
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• pp.121-122
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• 2022

본 논문은 Nanosheet FET(NSFET)와 FinFET의 구조를 갖는 소자 성능을 조사하기 위해서 3차원 소자 시뮬레이터를 이용하여 시뮬레이션한 결과를 소개한다. NSFET와 FinFET의 채널 도핑 농도에 따른 전류-전압 특성을 시뮬레이션하였고, 그 전류-전압 특성으로부터 추출한 문턱전압, 문턱전압이하 기울기 등의 성능을 비교하였다. NSFET이 FinFET보다 채널 도핑 농도에 따른 전류-전압 특성에서 드레인 전류가 더 많이 흐르며 더 높은 문턱전압을 갖는다. 문턱전압이하 기울기는 NSFET가 FinFET보다 더 가파른 기울기를 갖는다.

• 한국결정성장학회지
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• 제30권5호
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• pp.194-199
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• 2020

2차원 층상결정구조를 갖는 금속산화물 나노시트의 조성을 제어함으로써 재료 물성 및 응용의 확장이 가능하다. 본 연구에서 니오비움(Nb)이 도핑 된 타이타늄산화물(TiO_y) 나노시트 합성에 성공함으로써 나노시트의 조성을 순수조성에서 도핑조성으로 확장할 수 있었다. 상세하게는 출발 물질인 층상 구조 금속산화물 합성 시 도핑 조성을 설계(K_0.8Ti_1.73-xNb_xLi_0.27O₄, x = 0, 0.03, 0.07)하고 고상 합성한 후 유기물처리를 통한 화학적 박리를 수행하였다. 이렇게 함으로써 니오비움이 도핑 된 타이타늄산화물 초박막 나노시트를 수득할 수 있었다. 나노시트의 크기는 x-y 방향에서 긴 길이 기준으로 2 ㎛ 이하였으며 두께(z 방향)는 약 1 nm였다. 니오비움의 도핑 여부는 XRD 및 SEM-EDS 분석을 통해 확인할 수 있었다.

• Bulletin of the Korean Chemical Society
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• 제34권8호
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• pp.2519-2521
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• 2013

• Carbon letters
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• 제22권
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• pp.60-69
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• 2017

Nitrogen-doped carbon nanosheets with a developed porous structure were prepared from polyurethane foams by hydrothermal carbonization following $ZnCl_2$ chemical activation. Scanning electron microscopy, thermogravimetric analysis, Fourier transform infrared spectroscopy, solid state $^{13}C$ nuclear magnetic resonance (NMR) spectra and X-ray photoelectron spectroscopy were used to characterize the nitrogen-doped carbon nanosheet structure and composition. The removal of Cr(VI) by the N-doped carbon nanosheets was investigated. The results showed that the maximum removal capacity for chromium of 188 mg/g was found at pH=2.0 with PHC-Z-3. pH had an important effect on Cr(VI) removal and the optimal pH was 2.0. Moreover, amino groups and carboxyl groups in the nitrogen-doped carbon nanosheet played important roles in Cr(VI) removal, and promoted the reduction of Cr(VI) to Cr(III).