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Fabrication and Calibration of pH Sensor Using Suspended CNT Nanosheet

부양형 탄소나노튜브 나노시트를 이용한 pH센서의 제작과 보정

  • Ryu, Hyobong (Department of Mechanical Engineering, POSTECH) ;
  • Choi, WooSeok (Department of Mechanical Engineering, POSTECH) ;
  • An, Taechang (Department of Mechanical Design Engineering, Andong National University) ;
  • Heo, Joonseong (Department of Mechanical Engineering, POSTECH) ;
  • Lim, Geunbae (Department of Mechanical Engineering, POSTECH)
  • 유효봉 (포항공과대학교 기계공학과) ;
  • 최우석 (포항공과대학교 기계공학과) ;
  • 안태창 (안동대학교 기계설계공학과) ;
  • 허준성 (포항공과대학교 기계공학과) ;
  • 임근배 (포항공과대학교 기계공학과)
  • Received : 2013.04.22
  • Accepted : 2013.05.18
  • Published : 2013.05.31

Abstract

In this research, the pH sensor was developed using CNT nanosheet with Nafion coating for the advanced medical sensor such as a blood gas analyzer. The CNT nanosheet was formed by dielectrophoresis and water-meniscus between cantilever-type electrodes. Then, the process of the heat annealing and the Nafion coating was conducted for reducing contact resistance and giving proton selectivity respectively. We measured the response of the pH sensor as the electrolyte-gated CNT-nanosheet field effect transistor. The sensor showed a linear current ratio in a similar range of the normal blood pH. A calibration method for decreasing of the response variation among sensors has also been introduced. Coefficient of variance of the pH sensor was decreased by applying the calibration method. A linear relation between the calibrated response of the sensors and pH variance was also obtained. Finally, the pH sensor with a high resolution was fabricated and we verify the feasibility of the sensor by applying the calibration method.

Keywords

References

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