• 제목/요약/키워드: Nanoporous substrate

검색결과 27건 처리시간 0.027초

Fabrication of nanoporous gold thin films on glass substrates for amperometric detection of aniline

  • Lee, Keon-U;Kim, Sang Hoon;Shin, Hyung-Joon
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.354.1-354.1
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    • 2016
  • Nanoporous gold (NPG) is a very promising material in various fields such as sensor, actuator, and catalysis because of its high surface to volume ratio and conducting nature. In this study, we fabricated a NPG based amperometric sensor on a glass substrate by means of co-sputtering of Au and Si. During the sputtering process, we found the optimum conditions for heat treatment to reduce the residual stress and to improve adhesion between NPG films and the glass substrate. Subsequently, Si was selectively etched from Au-Si alloy by KOH solution, which forms nanoporous structures. Scanning electron microscopy (SEM) and auger electron spectroscopy (AES) were used to estimate the structure of NPG films and their composition. By employing appropriate heat treatments, we could make very stable NPG films. We tested the performance of NPG sensor with aniline molecules, which shows high sensitivity for sensing low concentration of aniline.

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Alumina Templates on Silicon Wafers with Hexagonally or Tetragonally Ordered Nanopore Arrays via Soft Lithography

  • Park, Man-Shik;Yu, Gui-Duk;Shin, Kyu-Soon
    • Bulletin of the Korean Chemical Society
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    • 제33권1호
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    • pp.83-89
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    • 2012
  • Due to the potential importance and usefulness, usage of highly ordered nanoporous anodized aluminum oxide can be broadened in industry, when highly ordered anodized aluminum oxide can be placed on a substrate with controlled thickness. Here we report a facile route to highly ordered nanoporous alumina with the thickness of hundreds-of-nanometer on a silicon wafer substrate. Hexagonally or tetragonally ordered nanoporous alumina could be prepared by way of thermal imprinting, dry etching, and anodization. Adoption of reusable polymer soft molds enabled the control of the thickness of the highly ordered porous alumina. It also increased reproducibility of imprinting process and reduced the expense for mold production and pattern generation. As nanoporous alumina templates are mechanically and thermally stable, we expect that the simple and costeffective fabrication through our method would be highly applicable in electronics industry.

Porosity-dependent asymmetric thermal buckling of inhomogeneous annular nanoplates resting on elastic substrate

  • Salari, Erfan;Ashoori, Alireza;Vanini, Seyed Ali Sadough
    • Advances in nano research
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    • 제7권1호
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    • pp.25-38
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    • 2019
  • This research is aimed at studying the asymmetric thermal buckling of porous functionally graded (FG) annular nanoplates resting on an elastic substrate which are made of two different sets of porous distribution, based on nonlocal elasticity theory. Porosity-dependent properties of inhomogeneous nanoplates are supposed to vary through the thickness direction and are defined via a modified power law function in which the porosities with even and uneven type are approximated. In this model, three types of thermal loading, i.e., uniform temperature rise, linear temperature distribution and heat conduction across the thickness direction are considered. Based on Hamilton's principle and the adjacent equilibrium criterion, the stability equations of nanoporous annular plates on elastic substrate are obtained. Afterwards, an analytical solution procedure is established to achieve the critical buckling temperatures of annular nanoplates with porosities under different loading conditions. Detailed numerical studies are performed to demonstrate the influences of the porosity volume fraction, various thermal loading, material gradation, nonlocal parameter for higher modes, elastic substrate coefficients and geometrical dimensions on the critical buckling temperatures of a nanoporous annular plate. Also, it is discussed that because of present of thermal moment at the boundary conditions, porous nanoplate with simply supported boundary condition doesn't buckle.

표면 요철구조를 적용한 나노 다공성 Ag 금속박막의 SERS 응답 특성 개선 (Improvement of Surface-enhanced Raman Spectroscopy Response Characteristics of Nanoporous Ag Metal Thin Film with Surface Texture Structures)

  • 김형주;김봉환;이동인;이봉희;조찬섭
    • 센서학회지
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    • 제29권4호
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    • pp.255-260
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    • 2020
  • In this study, we developed a method of improving the surface-enhanced Raman spectroscopy (SERS) response characteristics by depositing a nanoporous Ag metal thin film through cluster source sputtering after forming a pyramidal texture structure on the Si substrate surface. A reactive ion etching (RIE) system with a metal mesh inside the system was used to form a pyramidal texture structure on the Si surface without following a complicated photolithography process, unlike in case of the conventional RIE system. The size of the texture structure increased with the RIE process time. However, after a process time of 60 min, the size of the structure did not increase but tended to saturate. When the RF power increased from 200 to 250 W, the size of the pyramidal texture structure increased from 0.45 to 0.8 ㎛. The SERS response characteristics were measured by depositing approximately 1.5 ㎛ of nanoporous Ag metal thin film through cluster sputtering on the formed texture structure by varying the RIE process conditions. The Raman signal strength of the nanoporous Ag metal thin film deposited on the Si substrate with the texture structure was higher than that deposited on the general silicon substrate by up to 19%. The Raman response characteristics were influenced by the pyramid size and the number of pyramids per unit area but appeared to be influenced more by the number of pyramids per unit area. Therefore, further studies are required in this regard.

양극산화된 TiO2 및 WO3 나노구조체로 구성된 광전기변색 소자 제작 (Fabrication of Photoelectrochromic Devices Composed of Anodized TiO2 and WO3 Nanostructures)

  • 이상훈;차형철;나윤채
    • 한국분말재료학회지
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    • 제22권5호
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    • pp.326-330
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    • 2015
  • In this study, we demonstrate the photoelectrochromic devices composed of $TiO_2$ and $WO_3$ nanostructures prepared by anodization method. The morphology and the crystal structure of anodized $TiO_2$ nanotubes and $WO_3$ nanoporous layers are investigated by SEM and XRD. To fabricate a transparent photoelectrode on FTO substrate, a $TiO_2$ nanotube membrane, which has been detached from Ti substrate, is transferred to FTO substrate and annealed at $450^{\circ}C$ for 1 hr. The photoelectrode of $TiO_2$ nanotube and the counter electrode of $WO_3$ nanoporous layer are assembled and the inner space is filled with a liquid electrolyte containing 0.5 M LiI and 5 mM $I_2$ as a redox mediator. The properties of the photoelectrochromic devices is investigated and Pt-$WO_3$ electrode system shows better electrochromic performance compared to $WO_3$ electrode.

Vibration analysis of FG nanoplates with nanovoids on viscoelastic substrate under hygro-thermo-mechanical loading using nonlocal strain gradient theory

  • Barati, Mohammad Reza
    • Structural Engineering and Mechanics
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    • 제64권6권
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    • pp.683-693
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    • 2017
  • According to a generalized nonlocal strain gradient theory (NSGT), dynamic modeling and free vibrational analysis of nanoporous inhomogeneous nanoplates is presented. The present model incorporates two scale coefficients to examine vibration behavior of nanoplates much accurately. Porosity-dependent material properties of the nanoplate are defined via a modified power-law function. The nanoplate is resting on a viscoelastic substrate and is subjected to hygro-thermal environment and in-plane linearly varying mechanical loads. The governing equations and related classical and non-classical boundary conditions are derived based on Hamilton's principle. These equations are solved for hinged nanoplates via Galerkin's method. Obtained results show the importance of hygro-thermal loading, viscoelastic medium, in-plane bending load, gradient index, nonlocal parameter, strain gradient parameter and porosities on vibrational characteristics of size-dependent FG nanoplates.

3차원 구조의 다공성 금 박막을 이용한 GABA의 전기화학적 측정 (Electrochemical Determination of GABA using a 3-D Nanoporous Gold Thin Film)

  • 표수현;이진호;오병근
    • 공업화학
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    • 제22권5호
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    • pp.575-578
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    • 2011
  • 전기화학적 증착 기법을 이용하여 간단하고 빠르게 3차원적 구조를 가지는 다공성 금 박막(NPGF : nanoporous gold thin film)을 금 기판 위에 제작하였다. 제작된 3차원적 구조의 NPGF는 주사 전자 현미경(SEM)을 이용하여 표면을 분석하였고, 이를 통하여 표면상에 30~50 nm 크기의 균일한 다공성 박막이 생성되었음을 확인하였다. Differential pulse voltammetry(DPV) 기법을 기반으로 3차원적 구조체를 가진 NPGF기판을 전극으로 사용하여 GABA를 농도별($10{\sim}100{\mu}M$)로 측정하였다. 본 연구에서 제안된 방법은 향후, 바이오센서 응용분야에 널리 사용될 수 있을 것으로 기대된다.

윤활액이 담지된 나노다공성 표면의 최신 응용분야 (Recent applications of lubricant-impregnated nanoporous surface : A Review)

  • 한경완;배기창;이정훈
    • 한국표면공학회지
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    • 제56권1호
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    • pp.1-11
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    • 2023
  • Lubricant-impregnated nanoporous surfaces (LIS), which is created by impregnating water-immiscible oil into nanoporous surface structure, have been explored considering wide range of application fields. Due to the lubricant impregnated in nanoporous structure, the surface shows extreme de-wetting with a high mobility of water droplets, so that various functionalities can be realized. The lubricant layer inhibits the contact of corrosive media to porous structure as well as metal substrate, thus the surface improves the corrosion resistance. The water on the surface freeze without any contact to solid porous structure, showing a low ice adhesion for de-icing an anti-icing. The extremely high mobility of water droplets on lubricant-impregnated porous surfaces also contributes the enhancement of condensation heat transfer as well as water harvesting from fog and moisture. Moreover, the bacteria adhesion on metal surface forming biofilms causing serious hygiene issues can be inhibited on the lubricantimpregnated surfaces. Despite of such superior functionalities, the lubricant-impregnated porous surface has a limitation of lubricant depletion by external flow of fluids. Therefore, extensive efforts to improve the durability of lubricant-impregnated surface are required for practical applications.

나노기공성 기판을 사용한 산화물박막의 제조 (Fabrication of Oxide Thin Films Using Nanoporous Substrates)

  • 박용일
    • 한국세라믹학회지
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    • 제41권12호
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    • pp.900-906
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    • 2004
  • 현재까지 개발되어 온 고체산화물 연료전지는 전해질로 사용되는 산소이온전도성 산화물의 저온에서의 낮은 전도도로 인해 그 사용영역이 제한되어 왔으며, 기판재료가 연료가스 확산층으로 사용되어야 한다는 점 때문에 저온작동을 위한 박막화 역시 명확한 한계를 가지고 있다. 이러한 문제점은 고도의 평활도를 갖는 균일한 나노기공성 기판재를 도입함으로써 해결될 수 있으며, 본 연구에서는 나노기공성 기판에 비정질 금속박막을 증착/산화하는 방안을 제시한다. 초박막형 성공정으로서, 산화 후 산소이온전도성 산화물을 구성하는 합금 타겟을 장착한 DC-magnetron sputter를 사용하여 $20{\sim}200nm$의 기공크기를 갖는 나노기공성 양극산화 알루미나 기판에 비정질 금속합금막을 형성하여 산화/열처리 과정을 거쳐 초박막 산화물 전해질의 제조공정을 실현하였다. 얻어진 박막의 가스투과특성, 입자/입계의 관찰, 상전이에 따른 결정구조/미세구조변화를 관찰하여 초박막 증착 및 전해질의 나노구조제어에 필요한 제반 기본물성데이터를 확보하였다.