Browse > Article
http://dx.doi.org/10.46670/JSST.2020.29.4.255

Improvement of Surface-enhanced Raman Spectroscopy Response Characteristics of Nanoporous Ag Metal Thin Film with Surface Texture Structures  

Kim, Hyeong Ju (School of Electronics Engineering, Kyungpook National University)
Kim, Bonghwan (School of Electronic and Electrical Engineering, Daegu Catholic University)
Lee, Dongin (Department of Information and Communication Engineering, Yeungnam University)
Lee, Bong-Hee (Department of Steel Industry, Pohang University)
Cho, Chanseob (School of Electronics Engineering, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.29, no.4, 2020 , pp. 255-260 More about this Journal
Abstract
In this study, we developed a method of improving the surface-enhanced Raman spectroscopy (SERS) response characteristics by depositing a nanoporous Ag metal thin film through cluster source sputtering after forming a pyramidal texture structure on the Si substrate surface. A reactive ion etching (RIE) system with a metal mesh inside the system was used to form a pyramidal texture structure on the Si surface without following a complicated photolithography process, unlike in case of the conventional RIE system. The size of the texture structure increased with the RIE process time. However, after a process time of 60 min, the size of the structure did not increase but tended to saturate. When the RF power increased from 200 to 250 W, the size of the pyramidal texture structure increased from 0.45 to 0.8 ㎛. The SERS response characteristics were measured by depositing approximately 1.5 ㎛ of nanoporous Ag metal thin film through cluster sputtering on the formed texture structure by varying the RIE process conditions. The Raman signal strength of the nanoporous Ag metal thin film deposited on the Si substrate with the texture structure was higher than that deposited on the general silicon substrate by up to 19%. The Raman response characteristics were influenced by the pyramid size and the number of pyramids per unit area but appeared to be influenced more by the number of pyramids per unit area. Therefore, further studies are required in this regard.
Keywords
SERS; Cluster Sputtering; Nanoporous; Maskless RIE; Pyramid structure;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 M. Fan, G. F. Andrade, and A. G. Brolo, "A review on recent advances in the applications of surface-enhanced Raman scattering in analytical chemistry", Anal. Chim. Acta., Vol.1097, pp.1-29, 2020.   DOI
2 D. J. Gardiner and P. R. Graves, Practical Raman Spectroscopy, Springer, Verlag Berlin Heidelberg, 1989.
3 S. Schlucker, "Surface-Enhanced Raman Spectroscopy: Concepts and Chemical Applications", Angew. Chem. Int. Ed., Vol. 53, No. 19, pp.4756-4795, 2014.   DOI
4 A. Otto, I. Mrozek, H. Grabhorn, and W. Akemann, "Surface-enhanced Raman scattering", J. Phys. Condens. Matter, Vol. 4, No. 5, pp.1143-1212, 1992.   DOI
5 C. L. Haynes, A. D. McFarland, and R. P. Van Duyne, "Surface-Enhanced RAMAN SPECTROSCOPY", Anal. Chem., Vol. 77, No. 17, pp. 338A-346A, 2005.   DOI
6 M. Fleischmann, P. J. Hendra, and A. J. McQuillan, "Raman spectra of pyridine adsorbed at a silver electrode", Chem. Phys. Lett., Vol. 26, No. 2, pp. 163-166, 1974.   DOI
7 Y. Xia and N. J. Halar, "Shape-controlled synthesis and surface plasmonic properties of metallic nanostructures", NRS Bull., Vol. 30, No. 5, pp. 338-348, 2005.
8 D. V. Talapin, J. S. Lee, M. V. Kovalenko, and E. V. Shevchenko, "Prospects of colloidal nanocrystals for electronic and optoelectronic applications", Chem. Rev., Vol. 110, No. 1, pp. 389-458, 2010.   DOI
9 Z. Wang, L. Tang, H. Tan, J. Li, and Y. Lu, "Discovery of the DNA "genetic code" for abiological gold nanoparticle morphologies", Angew. Chem. Int. Ed., Vol. 51, No. 36, pp. 9078-9082, 2012.   DOI
10 E. D. Diebold, N. H. Mack, S. K. Doorn, and E. Mazur, "Femtosecond laser-nanostructured substrates for surface-enhanced Raman scattering", Langmuir, Vol. 25, No. 3, pp. 1790-1794, 2009.   DOI
11 D. Kong, J. Oh, D. Pyo, B. Kim, C. Cho, and J. Lee, "Fabrication of Silicon Pyramid-Nanocolumn Structures with Lowest Reflectance by Reactive Ion Etching Method", Jap. J. Appl. Phys., Vol. 52, No. 6S, pp. 06GL06(1)-06GL06(7), 2013.
12 S. Yun, Y. Hong, Y. Yang, D. Lee, B. Kim, and C. Cho, "Porous nanostructures by low vacuum sputtering for surface enhanced raman scattering", J. Nanosci. Nanotechnol., Vol. 17, No. 11, pp. 8528-8533, 2017.   DOI
13 S. Yun, J. Lee, J. Yang, D. Lee, B. Kim, and C. Cho, "Nanoporous Ag films prepared by cluster-source sputtering as substrates for surface-enhanced raman scattering", Phys. Status Solidi A, Vol. 215, No. 20, pp. 1701010(1)-1701010(8), 2018.   DOI
14 S. Yun, D. Lee, B. Kim, and C. Cho, "Highly Manufacturable Nanoporous Ag Films Using New Sputtering System for Surface Enhanced Raman Scattering Substrate", J. Nanosci. Nanotechnol., Vol. 19, No. 10, pp. 1-8, 2019.   DOI
15 J. H. Jo, D. Y. Kong, C. S. Cho, B. H. Kim, Y. H. Bae, and J. H. Lee, "Black Silicon of Pyramid Structure Formation According to the RIE Process Condition", J. Sens. Sci. Technol., Vol. 20, No. 3, pp. 207-212, 2011.   DOI
16 D. S. Pyo, J. H. Jo, P. H. Hong, J. H. Lee, B. H. Kim, and C. S. Cho, "Pyramid and Half-Sphere Type of Surface Texturing for Si-Solar Cell", J. Sens. Sci. Technol., Vol. 22, No. 6 pp. 433-438, 2013.   DOI
17 H. Jansen, M. de Boer, J. Burger, R. Legtenberg, and M. Elwenspoek, "The black silicom method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches", Microelectron. Eng., Vol. 27, No. 1-4, pp. 475-480, 1995.   DOI