• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.3168-3172
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• 2007

As the minimum feature size decreases, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT and designed a particle deposition system which consists of scanning mobility particle sizer (SMPS) and deposition chamber. Charged monodisperse particles are generated using SMPS and deposited on the wafer by electrostatic force. The experimental results agreed with the simulation results well in terms of particle number and deposition area according to particle size, flow rate and deposition voltage.

• Journal of Information Display
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• 제6권2호
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• pp.19-24
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• 2005

The density controlled carbon nanotubes (CNTs) are grown on the iron acetate nanoparticles by using the freeze-dry method. The iron-acetate [Fe(II)$(CH_3COO)_2$] solution is used to prepare the catalytic iron nanoparticles. The density of CNTs is controlled in order to enhance the field emission process. Furthermore, the patterning of the iron nanoparticle catalyst-layer for the fabrication of electronic devices is simply achieved by using alkaline solution, TMAH (tetramethylammonium hydroxide). We applied this patterning process of catalyst layer to form the electron emitter with under-gate type triode structure.

• Advances in nano research
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• 제1권2호
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• pp.111-124
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• 2013

Surface-enhanced Raman scattering (SERS) effect deals with the enhancement of the Raman scattering intensity by molecules in the presence of a nanostructured metallic surface. The first observation of surface-enhanced Raman spectra was in 1974, when Fleischmann and his group at the University of Southampton, reported the first high-quality Raman spectra of monolayer-adsorbed pyridine on an electrochemically roughened Ag electrode surface. Over the last thirty years, it has developed into a versatile spectroscopic and analytical technique due to the rapid and explosive progress of nanoscience and nanotechnology. This review article describes the recent development in field of surface-enhanced Raman scattering research, especially fabrication of various SERS active substrates, mechanism of SERS effect and its various applications in both surface sciences and analytical sciences.

• 반도체디스플레이기술학회지
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• 제6권4호
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• pp.49-52
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• 2007

As the minimum feature size decrease, control of contamination by nanoparticles is getting more attention in semiconductor process. Cleaning technology which removes nanoparticles is essential to increase yield. A reference wafer on which particles with known size and number are deposited is needed to evaluate the cleaning process. We simulated particle trajectories in the chamber by using FLUENT. Charged monodisperse particles are generated using SMPS (Scanning Mobility Particle Sizer) and deposited on the wafer by electrostatic force. The Experimental results agreed with the simulation results well. We calculate the particles loss in pipe flow theoretically and compare with the experimental results.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1539-1542
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• 2005

Self-assembled monolayers (SAMs) formed by the adsorption of alkanethiols, $HS(CH_2)_nX$, where X is an organic functional group, onto gold surfaces have attracted widespread interest as templates for the fabrication of molecular and biomolecular microstructures. Previously photopatterning has been thought of as being restricted to the micron scale, because of the wellknown diffraction limit. So, we have explored a novel approach to nanofabrication by utilizing a femtosecond laser coupled to a near-field scanning optical microscope (NSOM).

• 한국분말재료학회지
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• 제18권6호
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• pp.526-531
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• 2011

Fecralloy is the promising materials for high temperature exhaust filtering system due to the excellent its oxidation resistance property. In this research, Fecralloy nanoparticles coated Fecralloy thin foil was prepared by a single nozzle electrospray system in order to increase surface area of Fecralloy foil. Fecralloy nanoparticles were fabricated by electrical wire explosion method in ethanol using Fecralloy wires as a source material. Electrospray modes with applied D.C voltages to Fecralloy colloidal solution were investigated to make a stable cone-jet mode. Coated layers with and without additional heat treatment were observed by FE-SEM (field emission-scanning electron microscope) and tape test for evaluating their adhesion to substrate were performed as well.

• 통합자연과학논문집
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• 제8권3호
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• pp.147-152
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• 2015

Photoluminescent porous silicon (PSi) were prepared by an electrochemical etch of n-type silicon under the illumination with a 300 W tungsten filament bulb for the duration of etch. The red photoluminescence emitting at 620 nm with an excitation wavelength of 450 nm is due to the quantum confinement of silicon nanocrystal in porous silicon. As-prepared PSi was sonicated, fractured, and centrifuged in toluene to obtain photoluminescence silicon quantum dots. BET and BHJ methods were employed to study the specific surface area of as-prepared PSi. Optical characterization of red photoluminescent silicon nanocrystal was investigated by UV-vis and fluorescence spectrometer. Also SEM and TEM images of porous silicon and nanoparticles were investigated.

• 세라미스트
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• 제22권3호
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• pp.230-242
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• 2019

Functional ceramics are widely utilized in a variety of application fields such as structural materials, sensors, energy devices, purification filter and etc due to their high strength, stability and chemical activity. With the breakthrough development of nanotechnology, many researchers have studied new types of nanomaterials including nanoparticle, nanorod, nanowire and nanoplate to realize high-performance ceramics. Especially several groups have focused on the 3D nanostructured ceramics because of their large surface area, efficient load transfer, ultra-fast ion diffusion and superior electrical (or thermal) conductivity. In this review, we introduce the reported fabrication strategies of the 3D nanostructured and functional ceramics, also summarized the 3D nanostructured ceramic based high-performance applications containing photocatalysts, structural materials, energy harvesting and storage devices.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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• pp.1016-1019
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• 2005

We studied the density control of carbon nanotubes (CNTs) which were grown on the iron nanoparticles prepared from iron-acetate [$Fe(II)(CH_3COO)_2$] solution using freeze-dry method. The density of CNTs was controlled for the enhancement of field emission. The patterning process of iron-acetate catalyst-layer for the fabrication of electronic device was simply achieved by using alkaline solution, TMAH (tetramethylammonium hydroxide). We applied this patterning process of catalyst layer to formation of the electron emitter with under gate type triode structure.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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• pp.1455-1458
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• 2005

We studied the density control of carbon nanotubes (CNTs) which were grown on the iron nanoparticles prepared from iron-acetate $[Fe(II)(CH_3COO)_2]$ solution using freeze-dry method. The density of CNTs was controlled for the enhancement of field emission. The patterning process of iron-acetate catalyst-layer for the fabrication of electronic device was simply achieved by using alkaline solution, TMAH (tetramethylammonium hydroxide). We applied this patterning process of catalyst layer to formation of the electron emitter with under-gate type triode structure.