Nano-scale Au nanopaticles Pattern and Application by Using NSOM Lithography

근접상 주사 현미경(NSOM)을 이용한 금(Au)나노입자의 패터닝과 기술응용

  • Huh K.S. (Korea Institute of Machinery & Materials) ;
  • Chang W.S. (Korea Institute of Machinery & Materials)
  • Published : 2005.06.01

Abstract

Self-assembled monolayers (SAMs) formed by the adsorption of alkanethiols, $HS(CH_2)_nX$, where X is an organic functional group, onto gold surfaces have attracted widespread interest as templates for the fabrication of molecular and biomolecular microstructures. Previously photopatterning has been thought of as being restricted to the micron scale, because of the wellknown diffraction limit. So, we have explored a novel approach to nanofabrication by utilizing a femtosecond laser coupled to a near-field scanning optical microscope (NSOM).

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