• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.04a
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• pp.45-48
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• 2007

Conventional force sensors such as piezoelectric sensor has limitations for measuring micro/nano-scale thrust. In this study we developed nano-scale measurement system using laser displacement sensor and cantilever. And electrospray microthruster was fabricated by using stainless capillary and extraction electrode, to generate nano-scale thrust. The measurement system can measure the around 90 nN thrust from this thruster. In addition, we designed and fabricated electrospray micro thruster based on PMMA(Polymethyl methacrylate), which has a nozzle protruded from the substrate.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.4
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• pp.32-38
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• 2008

This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.

• Bulletin of the Korean Chemical Society
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• v.34 no.1
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• pp.237-242
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• 2013

This experiment was conducted for the purpose of developing such a sensor that can quickly sense dopamine concentration by using chitosan-gold nanoshell. Chitosan nano particles were reacted with gold nano particles so as to synthesize chitosan-gold nanoshell, and the size of the synthesized product was about 150 nm. When dopamine was reacted with chitosan-gold nanoshell, the size of it was not definitely changed, but dopamine was well reacted with chitosan-gold nanoshell, and it generated SERS (surface-enhanced Raman scattering), which led to a clear difference in the intensity of Raman scattering within the range of dopamine concentration (1 mM-10 mM). When Raman scattering was intensity marked on chitosan-gold nanoshell by employing a calibration curve according to dopamine concentration, a straight line whose margin of error was narrow was earned.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 2006.09a
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• pp.358-359
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• 2006

Ru-C nano-composite films were prepared by MOCVD, and their microstructures and their electrode properties for oxygen gas sensors were investigated. Deposited films contained Ru particles of 5-20 nm in diameter dispersed in amorphous C matrix. The AC conductivities associating to the interface charge transfer between Ru-C composite electrode and YSZ electrolyte were 100-1000 times higher than that of conventional paste-Pt electrodes. The emf values of the oxygen gas concentration cell constructed from the nano-composite electrodes and YSZ electrolyte showed the Nernstian theoretical values at low temperatures around 500 K. The response time of the concentration cell was 900 s at 500 K.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.521-522
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• 2006

• Bulletin of the Korean Chemical Society
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• v.30 no.3
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• pp.719-721
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• 2009

• Journal of the Korea Institute of Information and Communication Engineering
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• v.10 no.9
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• pp.1641-1647
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• 2006

A dual micro gas sensor way for detecting reducing gas and bad order was fabricated using nano sized $SnO_2$ thin film fabrication method. To make nano-sized thin gas sensitive $SnO_2$ thin rilm, thin tin metal layer $2500{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2,\;SnO_2(+Pt)\;and\;SnO_2(+CuO)$ were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2(Pt)$ and $SnO_2(+CuO)$ showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• Korean Journal of Materials Research
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• v.17 no.8
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• pp.437-441
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• 2007

Preparation and morphology control of $TiO_2$ nano powders for gas sensor applications are investigated. $TiO_2$ nanopowders with rutile and anatase structures were prepared by controlling the pH value of a precursor solution without any heat treatment. The mean particle size of $TiO_2$ powders were below 10nm. The prepared $TiO_2$ nano powders were hydrothermal treated by NaOH solution. The sample was washed in HCl solution. As a result and $TiO_2$ nanotubes were formed. The lengths of $TiO_2$ nanotube were $1{\mu}m$ and the diameters were 10nm. Crystal structure and microstructure of $TiO_2$ nanotube were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscope (TEM). As-prepared $TiO_2$ nanotube powders have several advantages of nano particle size and high surface area and could be a prominent candidate for nano-sensors. The sensitivity of $TiO_2$ nanotube sensor was measured for toluene and NO in this study.

• Transactions of Materials Processing
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• v.14 no.5 s.77
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• pp.473-476
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• 2005

The demand of on-chip total analyzing system with MEMS (micro electro mechanical system) bio/chemical sensor is rapidly increasing. In on-chip total analyzing system, to detect the bio/chemical products with submicron feature size, a filtration system with nano-filter is required. One of the conventional methods to fabricate nano-filter is to use direct patterning or RIE (reactive ion etching). However, those procedures are very costly and are not suitable fur mass production. In this study, we suggested new fabrication method for a nano-filter based on replication process, which is simple and low cost process. After the Si master was fabricated by laser interference lithography and reactive ion etching process, the polymeric mold was replicated by UV-imprint process. Metallic nano-filter was fabricated after removing the polymeric part of metal deposited polymeric mold. Finally, our fabrication method was applied to metallic nano-filter with $1{\mu}m$ pitch size and $0.4{\mu}m$ hole size for bacteria sensor application.

• 전자공학회논문지 IE
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• v.46 no.4
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• pp.8-15
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• 2009

In this paper, we are indicated CMOS Image sensor circuit SPICE analysis for the Photo Diode and pixel Modeling. We get a characteristic of the photoelectric current using a device simulator Medici and develop the Photodiode model for applying a SPICE simulation. For verifying the result, We compared the result of SPICE simulation with the result of mixed mode simulation about the testing circuit structure consisted photodiode and NMOS.