Characteristics of TiO2 Nanotube Gas Sensor Preparedby Hydrothermal Treatment

Preparation and morphology control of $TiO_2$ nano powders for gas sensor applications are investigated. $TiO_2$ nanopowders with rutile and anatase structures were prepared by controlling the pH value of a precursor solution without any heat treatment. The mean particle size of $TiO_2$ powders were below 10nm. The prepared $TiO_2$ nano powders were hydrothermal treated by NaOH solution. The sample was washed in HCl solution. As a result and $TiO_2$ nanotubes were formed. The lengths of $TiO_2$ nanotube were $1{\mu}m$ and the diameters were 10nm. Crystal structure and microstructure of $TiO_2$ nanotube were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscope (TEM). As-prepared $TiO_2$ nanotube powders have several advantages of nano particle size and high surface area and could be a prominent candidate for nano-sensors. The sensitivity of $TiO_2$ nanotube sensor was measured for toluene and NO in this study.

수열처리에 의한 TiO2 나노 튜브 센서의 가스 검지 특성