Browse > Article

Fabrication of Large-area Micro-lens Arrays with Fast Tool Control  

Noh, Young-Jin (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University)
Arai, Yoshikazu (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University)
Tano, Makoto (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University)
Gao, Wei (Nano-metrology and Control Laboratory, Department of Nanomechanics, Tohoku University)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.9, no.4, 2008 , pp. 32-38 More about this Journal
Abstract
This paper describes a fast tool control (FTC)-based diamond turning process for fabricating large-area high-quality micro-lens arrays. The developed FTC unit has a stroke of $48{\mu}m$ and a resonance frequency of 4.9 kHz. Micro-lens arrays were fabricated using a micro-cutting tool with a nose radius of $50{\mu}m$. The FTC unit was integrated with a force sensor so that the initial position of the micro-cutting tool with respect to the workpiece surface could be detected through monitoring the contacting force. The length and depth of the designed parabolic micro-lens profile were $190{\mu}m$ and $20{\mu}m$, respectively. A micro-lens array was fabricated on a cylinder surface over an area of ${\phi}55 mm{\times}40 mm$.
Keywords
Fast tool control; Force sensor; Micro-lens arrays;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
Times Cited By Web Of Science : 4  (Related Records In Web of Science)
연도 인용수 순위
1 He, M., Yuan, X. C. and Ngo, N. Q., 'Single-step Fabrication of a Microlens Array in Sol-gel Material by Direct Laser Writing and its Application in Optical Coupling,' Journal of Pure Optics, Vol. 6, No. 1, pp. 94-97, 2004   DOI   ScienceOn
2 http://www.precitech.com
3 Tano, M., Gao, W., Kimura, A., Sanuki, T., Noh, Y. J. and Kiyono, S., 'Integration of a Force Sensor into a Fast-Tool-Control Unit for Fabrication of Large Area Microlens Array,' Journal of the Chinese Society of Mechanical Engineers, Vol. 27, No. 5, pp. 555-560, 2006
4 Gao, W., Hocken, R., Patten, J. and Lucca, D., 'Construction and Testing of a Nano-machining Instrument,' Precision Engineering, Vol. 24, No. 4, pp. 320-328, 2000   DOI   ScienceOn
5 Sharma, V. S, Dhiman, S., Sehgal, R. and Sharma, K., 'Assessment and Optimization of Cutting Parameters while Turning AISI 52100 Steel,' International Journal of Precision Engineering and Manufacturing, Vol. 9, No. 2, pp. 54-62, 2008   과학기술학회마을
6 Gao, W., Araki, T., Kiyono, S., Okazaki, Y. and Yamanaka, M., 'Precision Nano-fabrication and Evaluation of a Large Area Sinusoidal Grid Surface for a Surface Encoder,' Precision Engineering, Vol. 27, No. 3, pp. 289-298, 2003   DOI   ScienceOn
7 Kim, H. S. and Kim, E. J., 'Feed-forward Control of Fast Tool Servo for Real-time Correction of Spindle Error in Diamond Turning of Flat Surface,' International Journal of Machine Tools & Manufacture, Vol. 43, Issue 12, pp. 1177-1183, 2003   DOI   ScienceOn
8 Dubey, A. K. and Yadava, V., 'Simultaneous Optimization of Multiple Quality Characteristics in Laser Beam Cutting Using Taguchi Method,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 4, pp. 10-15, 2007   과학기술학회마을
9 Kim, D. S., Chang, I. C. and Kim, S. W., 'Microscopic Topographical Analysis of Tool Vibration Effects on Diamond Turned Optical Surfaces,' Precision Engineering, Vol. 26, No. 2, pp. 168-174, 2002   DOI   ScienceOn
10 Sim, J. H., Lee, E. D. and Kweon, H. J., 'Effect of the Laser Beam Size on the Cure Properties of a Photopolymer in Stereolithography,' International Journal of Precision Engineering and Manufacturing, Vol. 8, No. 4, pp. 50-55, 2007   과학기술학회마을
11 Gao, W., Hocken, R., Patten, J. and Lovingood, J., 'Force Measurement in a Nanomachining Instruments,' Review of Scientific Instruments, Vol. 71, No. 11, pp. 4325-4329, 2000   DOI   ScienceOn
12 Yang, R., Soper, S. A. and Wang, W. J., 'Microfabrication of Pre-aligned Fiber Bundle Couplers Using Ultraviolet Lithography of SU-8,' Sensors and Actuators A-Physical, Vol. 127, No. 1, pp. 123-130, 2006   DOI   ScienceOn
13 Huang, Y. P., Shien, H. P. D. and Wu, S. T., 'Applications of Multidirectional Asymmetrical Micro-lens Aarray Light-Control Films on Reflective Liquid Cristal Displays for Image Quality Enhancement,' Applied Optics, Vol. 43, No. 18, pp. 3656-3663, 2004   DOI
14 Holman, A. E., Scholte, P. M. L. O, Heerens, W. Chr. and Tuinstra, F., 'Analysis of Piezo Actuator in Translation Construction,' Review of Scientific Instruments, Vol. 66, No. 5, pp. 3208-3215, 1995   DOI   ScienceOn
15 Woronko, A., Huang, J. and Altintas, Y., 'Piezoelectric Tool Actuator for Precision Machining on Conventional CNC Turning Centers,' Precision Engineering, Vol. 27, pp. 335-345, 2003   DOI   ScienceOn