• Title/Summary/Keyword: Nano Scale

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Reduction of Barrier Height between Ni-silicide and p+ source/drain for High Performance PMOSFET (고성능 PMOSFET을 위한 Ni-silicide와 p+ source/drain 사이의 barrier height 감소)

  • Kong, Sun-Kyu;Zhang, Ying-Ying;Park, Kee-Young;Li, Shi-Guang;Zhong, Zhun;Jung, Soon-Yen;Yim, Kyoung-Yean;Lee, Ga-Won;Wang, Jin-Suk;Lee, Hi-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.157-157
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    • 2008
  • As the minimum feature size of semiconductor devices scales down to nano-scale regime, ultra shallow junction is highly necessary to suppress short channel effect. At the same time, Ni-silicide has attracted a lot of attention because silicide can improve device performance by reducing the parasitic resistance of source/drain region. Recently, further improvement of device performance by reducing silicide to source/drain region or tuning the work function of silicide closer to the band edge has been studied extensively. Rare earth elements, such as Er and Yb, and Pd or Pt elements are interesting for n-type and p-type devices, respectively, because work function of those materials is closer to the conduction and valance band, respectively. In this paper, we increased the work function between Ni-silicide and source/drain by using Pd stacked structure (Pd/Ni/TiN) for high performance PMOSFET. We demonstrated that it is possible to control the barrier height of Ni-silicide by adjusting the thickness of Pd layer. Therefore, the Ni-silicide using the Pd stacked structure could be applied for high performance PMOSFET.

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Anodizing of pure Al foil for AAO as a Nanowire Template (Al 양극산화에 의한 나노선재용 AAO template제조)

  • Lee Kwan Hyi;Lee Hwa Young;Jeung Won Young
    • Journal of the Korean Electrochemical Society
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    • v.4 no.2
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    • pp.47-52
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    • 2001
  • AAO template having nano scale pores of high aspect ratio has been prepared through anodizing of aluminum foil in sulfuric acid electrolyte. The effect of anodizing parameters on the pore size and distribution was also examined to obtain the proper AAO as a template material of nanowire. The surface of AAO template prepared was observed by SEM to examine the mean size and distribution of pores generated by the anodizing and Fe nanowires obtained by AC electroforming using AAO template were also observed with TEM to determine the length and shape of them. From the results of work, it was found that the mean size or distribution of pores was influenced significantly by the anodizing parameters such as voltage and temperature of electrolyte. Mean length and aspect ratio of Fe nanowires prepared in the work were found to be $10{\mu}m\;and\;300\;to\;1,000$, respectively.

Influence of Cooling Rate and Alloy Composition on The Microstructural Evolution of Al-Ag Eutectic System ($Al-Ag_2Al$ 공정계 합금의 조성 및 냉각 속도에 따른 미세조직 고찰)

  • Sohn, Sung-Woo;Park, Jin-Man;Kim, Tae-Eung;Lim, Ka-Ram;Kim, Won-Tae;Kim, Do-Hyang
    • Journal of Korea Foundry Society
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    • v.29 no.2
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    • pp.64-69
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    • 2009
  • In the present study the effect of cooling rate during solidification on the microstructural characteristics of Al-xAg (x = 31, 33, 35 at.%) in-situ binary eutectic composites has been investigated. To provide a wide range of cooling rate three different casting techniques, i.e. conventional casting, injection casting, and melt spinning have been used. The observed microstructure is very much dependent on the cooling rate. The fcc ${\alpha}$-Al and hcp $Ag_2Al$ phases exhibits an orientation of (111)Al//(0001)$Ag_2Al$, [1-10]Al//[11- 20]$Ag_2Al$. The microstructure of the melt-spun samples contains Widmanstatten structure resulting from solid-state transformation and nano scale two-phase structure resulting from solid-state phase separation. The microstructure of injection-cast samples contains eutectic structure and solid state phase-separated structure. On the other hand, conventional-cast samples exhibit a microstructure consisted of plate-type eutectic structure.

Genotoxicity of Aluminum Oxide ($Al_2O_3$) Nanoparticle in Mammalian Cell Lines

  • Kim, Youn-Jung;Choi, Han-Saem;Song, Mi-Kyung;Youk, Da-Young;Kim, Ji-Hee;Ryu, Jae-Chun
    • Molecular & Cellular Toxicology
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    • v.5 no.2
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    • pp.172-178
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    • 2009
  • Nanoparticles are small-scale substances (<100 nm) with unique properties, complex exposure and health risk implications. Aluminum oxide ($Al_2O_3$) nanoparticles (NP) have been widely used as abrasives, wear-resistant coatings on propeller shafts of ships, to increase the specific impulse per weight of composite propellants used in solid rocket fuel and as drug delivery systems to increase solubility. However, recent studies have shown that nano-sized aluminum (10 nm in diameter) can generate adverse effects, such as pulmonary response. The cytotoxicity and genotoxicity of $Al_2O_3$ NP were investigated using the dye exclusion assay, the comet assay, and the mouse lymphoma thymidine kinase (tk$^{+/-}$) gene mutation assay (MLA). IC$_{20}$ values of $Al_2O_3$ NP in BEAS-2B cells were determined the concentration of 273.44 $\mu$g/mL and 390.63 $\mu$g/mL with and without S-9. However IC$_{20}$ values of $Al_2O_3$ NP were found nontoxic in L5178Y cells both of with and without S-9 fraction. In the comet assay, L5178Y cells and BEAS-2B cells were treated with $Al_2O_3$ NP which significantly increased 2-fold tail moment with and without S-9. Also, the mutant frequencies in the $Al_2O_3$ NP treated L5178Y cells were increased compared to the vehicle controls with S-9. The results of this study indicate that $Al_2O_3$ NP can cause primary DNA damage and cytotoxicity but not mutagenicity in cultured mammalian cells.

Microchips and their Significance in Isolation of Circulating Tumor Cells and Monitoring of Cancers

  • Sahmani, Mehdi;Vatanmakanian, Mousa;Goudarzi, Mehdi;Mobarra, Naser;Azad, Mehdi
    • Asian Pacific Journal of Cancer Prevention
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    • v.17 no.3
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    • pp.879-894
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    • 2016
  • In micro-fluid systems, fluids are injected into extremely narrow polymer channels in small amounts such as micro-, nano-, or pico-liter scales. These channels themselves are embedded on tiny chips. Various specialized structures in the chips including pumps, valves, and channels allow the chips to accept different types of fluids to be entered the channel and along with flowing through the channels, exert their effects in the framework of different reactions. The chips are generally crystal, silicon, or elastomer in texture. These highly organized structures are equipped with discharging channels through which products as well as wastes of the reactions are secreted out. A particular advantage regarding the use of fluids in micro-scales over macro-scales lies in the fact that these fluids are much better processed in the chips when they applied as micro-scales. When the laboratory is miniaturized as a microchip and solutions are injected on a micro-scale, this combination makes a specialized construction referred to as "lab-on-chip". Taken together, micro-fluids are among the novel technologies which further than declining the costs; enhancing the test repeatability, sensitivity, accuracy, and speed; are emerged as widespread technology in laboratory diagnosis. They can be utilized for monitoring a wide spectrum of biological disorders including different types of cancers. When these microchips are used for cancer monitoring, circulatory tumor cells play a fundamental role.

Pilot-Scale Simulation of Desalination Process Using Water Integrated Forward Osmosis System (물통합형 정삼투 시스템을 이용한 파일럿 스케일 담수 공정 모사)

  • Kim, Bongchul;Hong, Seungkwan;Choi, Juneseok
    • Journal of Korean Society on Water Environment
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    • v.33 no.4
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    • pp.403-408
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    • 2017
  • In these days, wastewater reclamation and seawater desalination play essential role in addressing the challenge of worldwide water scarcity. Particularly, reverse osmosis (RO) for seawater desalination process is commonly used due to less energy consumption than conventional thermodynamic systems. However, membrane fouling and electrical energy consumption during operation of RO system for seawater desalination haver continued to be a obstruction to its application. In this study, therefore, wastewater secondary effluent is used for osmotic dilution of seawater. Firstly, fouling behaviour of RO by simulating wastewater effluent in osmotic dilution process was measured and we calculated energy consumption of overall desalination process by theoretical equations and commercial program. Our results reveal that RO membrane fouling can be efficiently controlled by pre-treatment systems such as nano filtration (NF) or forward osmosis (FO) process. Especially FO system for osmotic dilution process is a non-pressurized membrane system and, therefore, the operating energy consumption of overall desalination system was the lowest. Moreover, fouling layer on FO membrane is comparatively weak and reversible enough to be disrupted by physical cleaning. Thus, RO system with low salinity feed water through FO process is possible as a less energy consuming desalination system with efficient membrane fouling control.

A Study on the Surface Oxidation Behavior of Cube-textured Nickel Substrate (양축 정렬된 니켈기판의 표면 산화반응 연구)

  • Ahn Ji-hyun;Kim Byeong-Joo;Kim Jae-Geun;Kim Ho-Jin;Hong Gye-Won;Lee Hee-Gyoun;Yoo Jai-Moo;Pradeep Halder
    • Progress in Superconductivity
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    • v.7 no.1
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    • pp.58-63
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    • 2005
  • We investigated the surface oxidation behavior of cube-textured polycrystalline nickel at various oxidation conditions. Cube-textured NiO film was formed on a cube-textured polycrystalline nickel regardless of oxidation conditions but different growth behavior of NiO crystals was observed depending on the oxidation conditions. The introduction of water vapor into $O_2$ did not affect the texture evolution, but rough and porous microstructure was developed. Microstructure of NiO film tends to be denser as the oxygen partial pressure increases. It is interesting that (111) peak of theta - two theta diffraction pattern started to get stronger in air atmosphere and (111) plane became the major texture in the substrate oxidized in high purity argon gas. Small amount of high index crystallographic plane NiO peak crystal was observed when $N_{2}O$ was used as an oxidant while only (200) plane crystal was formed in dry $O_2$ atmosphere. Flat and smooth surface was changed into rough faceted one when ramping rate to oxidation temperature was faster. The grain size of NiO was decreased when the oxygen partial pressure was low. It was also observed that the modification of nickel surface suppressed the development of (200) texture.

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Effects of Excess Yttrium Addition on YBCO Thin Films Prepared by TFA-MOD Process (MOD-TFA 공정에 의한 YBCO박막제조시 과잉 yttrium첨가 효과에 관한 연구)

  • Lee Seung-Yi;Song Seul-A;Kim Byeong-Joo;Park Jin-A;Kim Ho-Jin;Lee Hee-Gyoun;Hong Gye-Won;Jang Seog Heon;Joo Jinho;Yoo Jai-Moo;Pradeep Halder
    • Progress in Superconductivity
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    • v.7 no.1
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    • pp.87-91
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    • 2005
  • [ $YBa_{2}Cu_{3}O_{7-x}$ ] thin films were fabricated on $LaAlO_3$(100) substrate by TFA-MOD process. Yttrium-excess (0, 2.5, 5, 10, 15, 20 $at\%$) coating solution was prepared by adding extra amount of yttrium into a stoichiometric(Y:Ba:Cu=1:2:3) TFA precursor solution. Results are presented concerning the influence of excess yttrium additions on the microstructure development and superconducting properties of $YBa_{2}Cu_{3}O_{7-x}$ film. Large sized CuO particles was observed by SEM EDS investigation. The addition of excess yttrium affected little on $T_c$ of $YBa_{2}Cu_{3}O_{7-x}$ film. $J_c$ of YBCO film was enhanced with excess yttrium addition. Jc maximum of $2.21\;MA/cm^2$ (77 K, self field) appeared with the $15\;at\%$ addition of excess yttrium. With further yttrium addition up to $20\;at\%$, Jc decreased down to $0.9\;MA/cm^2$.

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A Study on The Comparison of The Program Efficiency in The Conventional CHE Injection Method and a novel Hot Electron Injection Method Using A Substrate forward Bias (CHE 주입방법과 기판 순바이어스를 이용한 새로운 고온 전자 주입방법의 프로그램 효율성 비교에 관한 연구)

  • Zhang, Yong-Jie;An, Ho-Myoung;Kim, Hee-Dong;Kim, T.G.
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.47 no.1
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    • pp.1-5
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    • 2010
  • In this paper, we directly compare the program efficiency of conventional channel hot electron (CHE) injection methods and a novel hot electron injection methods using substrate forward biases in our silicon-oxide-nitride-oxide-silicon (SONOS) cell. Compared with conventional CHE injection methods, the proposed injection method showed improved program efficiency including faster program operation at lower bias voltages as well as localized trapping features for multi-bit operation with a threshold voltage difference of 1 V at between the forward and reverse read. This program method is expected to be useful and widely applied for future nano-scale multi-bit SONOS memories.

Mechanical analysis of cutout piezoelectric nonlocal nanobeam including surface energy effects

  • Eltaher, Mohamed A.;Omar, Fatema-Alzahraa;Abdalla, Waleed S.;Kabeel, Abdallah M.;Alshorbagy, Amal E.
    • Structural Engineering and Mechanics
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    • v.76 no.1
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    • pp.141-151
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    • 2020
  • This manuscript tends to investigate influences of nanoscale and surface energy on a static bending and free vibration of piezoelectric perforated nanobeam structural element, for the first time. Nonlocal differential elasticity theory of Eringen is manipulated to depict the long-range atoms interactions, by imposing length scale parameter. Surface energy dominated in nanoscale structure, is included in the proposed model by using Gurtin-Murdoch model. The coupling effect between nonlocal elasticity and surface energy is included in the proposed model. Constitutive and governing equations of nonlocal-surface perforated Euler-Bernoulli nanobeam are derived by Hamilton's principle. The distribution of electric potential for the piezoelectric nanobeam model is assumed to vary as a combination of a cosine and linear variation, which satisfies the Maxwell's equation. The proposed model is solved numerically by using the finite-element method (FEM). The present model is validated by comparing the obtained results with previously published works. The detailed parametric study is presented to examine effects of the number of holes, perforation size, nonlocal parameter, surface energy, boundary conditions, and external electric voltage on the electro-mechanical behaviors of piezoelectric perforated nanobeams. It is found that the effect of surface stresses becomes more significant as the thickness decreases in the range of nanometers. The effect of number of holes becomes significant in the region 0.2 ≤ α ≤ 0.8. The current model can be used in design of perforated nano-electro-mechanical systems (PNEMS).