• Journal of the Korean Vacuum Society
• /
• v.14 no.1
• /
• pp.35-39
• /
• 2005

In the UV-NIL process using an elementwise patterned stamp (EPS), which includes channels formed to separate each element with patterns, low-viscosity resin droplets with a nano-liter volume are dispensed on all elements of the EPS. Following pressing of the EPS, the EPS is illuminated with UV-light to cure the resin; and then the EPS is separated from several thin patterned elements on a wafer. Experiments on UV-NIL were performed on an EVG620-NIL. 50 - 100nm features of the EPS with 3m channels were successfully transferred to 4 in. wafers. Especially, the wafer deformation during imprint was analyzed using the finite element method (FEM) in order to study the effect of the wafer deformation on the UV-NIL using EPS.

• Journal of Powder Materials
• /
• v.11 no.6 s.47
• /
• pp.486-492
• /
• 2004

We report the crystallization and magnetic properties of non-equilibrium $Al_{0.6}(Fe_{x}Cu_{1-x})_{0.4}(x=0.25, 0.50, 0.75)$ alloy powders produced by rod-milling as well as by new chemical leaching. X-ray diffractometry, transmission electron microscopy, differential scanning calorimetry and vibrating sample magnetometry were used to characterize the as-milled and leached specimens. After 400 h or 500 h milling, only the broad peaks of nano bcc crystalline phases were detected in the XRD patterns. The crystallite size, the peak and the crystallization temperatures increased with increasing Fe. After being annealed at $600{^\circ}C$ for 1 h for as-milled alloy powders, the peaks of bcc $AlCu_{4}\;and\;Al_{13}Cu_{4}Fe_{3}\;for\;x=0.25,\;bcc\;AlCu_{4}\;and\;Al_{5}Fe_{2}\;for\;x=0.50,\;and\;Al_{5}Fe_{2},\;and\;Al_{0.5}Fe_{0.5}\;for\;x=0.75$ are observed. After being annealed at $500{^\circ}\;and\;600{^\circ}C$for 1 h for leached specimens, these non-equi-librium phases transformed into fcc Cu and $CuFe_{2}O_{4}$phases for the x=0.25 specimen, and into bcc ${\alpha}-Fe,\;fcc\;Cu,\;and\;CuFe_{2}O_{4}$ phases for both the x=0.50 and the x=0.75 specimens. The saturation magnetization decreased with increasing milling time for $Al_{0.6}(Fe_{x}Cu_{1-x})_{0.4}$ alloy powders. On cooling the leached specimens from $800{\~}850^{\circ}C$,\;the magnetization first sharply increase at about $491.4{\circ}C,\;745{\circ}C,\;and\;750.0{\circ}C$ for x=0.25, x=0.50, and x=0.75 specimens, repectively.

• Clean Technology
• /
• v.19 no.3
• /
• pp.327-332
• /
• 2013

Space- and time-resolved in-situ optical and fluorescence microspectroscopy techniques have been applied to investigate the coke formation during aromatization of C5 paraffin and olefin over H-ZSM-5 crystal. In-situ UV/vis absorption measurement offers space- and time-resolved information for the coke formation. Different coking trends have been observed with respect to the location of a crystal as well as the reactant types. From in-situ confocal fluorescence microspectroscopy study, it is revealed that the concentration of certain species photo-excited at 488 nm becomes high at the central region, whereas the compounds emitting fluorescence by 561 nm laser move towards the boundary region of the crystal. The different fluorescence patterns obtained varying excitation lasers suggest the existence of distinct fluorescence emitting species having different degree of coke growth.

• Journal of the Korean Ceramic Society
• /
• v.52 no.6
• /
• pp.497-501
• /
• 2015

Inkjet printing is a widespread technology, offering advantages such as high-quality decoration, a continuous process, and the accurate direct reproduction of patterns or pictures. In inkjet printing technology, the dispersion stability of ceramic ink is one of the most important factors. In this study, the dispersion stability of blue $CoAl_2O_4$ ink for ceramic inkjet printing is systematically investigated. Blue $CoAl_2O_4$ pigment was synthesized by a solid-state reaction and then milled to less than 300nm in size. In order to investigate the influence of the viscosity on the dispersion stability, two types of $CoAl_2O_4$ ceramic inks (termed here Blue L and Blue H) were prepared using different volume ratios of ethylene glycol and ethanol. The Blue L and Blue H ink solutions contained cetyltrimethylammonium bromide(CTAB) as a dispersive agent. The viscosity, surface tension and jetting stability of the $CoAl_2O_4$ ceramic inks were analyzed using a rheometer, a surface tension meter and a dropwatcher. The dispersion stability of the $CoAl_2O_4$ ceramic ink was investigated by a multiple light-scattering method. Blue H, a ceramic ink with higher viscosity, showed much better dispersion stability than the Blue L ceramic ink.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.22 no.1
• /
• pp.29-35
• /
• 2012

Special attention in the role of convection in vapor crystal growth has been paid since some single crystals under high gravity acceleration of $10g_0$ appear considerably larger than those under normal gravity acceleration ($1g_0$). With increasing the gravity acceleration from $1g_0$ up to $10g_0$, the total molar flux for ${\Delta}T$ = 30 K increases by a factor of 4, while for ${\Delta}T$ = 90, by a factor of 3. The maximum molar fluxes for three different gravity levels of $1g_0$, $4g_0$ and $10g_0$, appear approximately in the neighborhood of y = 0.5 cm, and the molar fluxes show asymmetrical patterns, which indicate the occurrence of either one single or more than one convective cell. As the gravitational level is enhanced form $1g_0$ up to $10g_0$, the intensity of convection is increased significantly through the maximum molar fluxes for ${\Delta}T$ = 30 K and 90 K. At $10g_0$, the maximum total molar flux is nearly invariant for for ${\Delta}T$ = 30 K and 90 K. The total molar flux increases with increasing the gravity acceleration, for $1g_0{\leq}g_y{\leq}10g_0$, and decreases with increasing the partial pressure of component B, a noble gas called as Kr (Krypton), $P_B$. The ${{\mid}U{\mid}}_{max}$ is directly proportional to the gravity acceleration for 20 Torr $P_B{\leq}300$ Torr. As the partial pressure of $P_B$ (Torr) decreases from 300 Torr to 20 Torr, the slopes of the ${{\mid}U{\mid}}_{max}s$ versus the gravity accelerations increase from 0.29 sec to 0.54 sec, i.e. by a factor of 2. The total molar flux of $Hg_2Cl_2$ is first order exponentially decayed with increasing the partial pressure of component B, $P_B$ (Torr) from 20 Torr up to 300 Torr.

• Journal of the Microelectronics and Packaging Society
• /
• v.23 no.4
• /
• pp.35-41
• /
• 2016

Ceramic-metal based high power LED array package was developed via thick film LTCC technology using a glass-ceramic insulation layer and a silver conductor patterns directly printed on the aluminum heat sink substrate. The thermal resistance measurement using thermal transient tester revealed that ceramic-metal base LED package exhibited a superior heat dissipation property to compare with the previously known packaging method such as FR-4 based MCPCB. A prototype LED package sub-module with 50 watts power rating was fabricated using a ceramic-metal base chip-on-a board technology with minimized camber deformation during heat treatment by using partially covered glass-ceramic insulation layer design onto the aluminum heat spread substrate. This modified circuit design resulted in a camber-free packaging substrate and an enhanced heat transfer property compared with conventional MCPCB package. In addition, the partially covered design provided a material cost reduction compared with the fully covered one.

• Korean Chemical Engineering Research
• /
• v.53 no.2
• /
• pp.174-180
• /
• 2015

The flow pattern and the solid-liquid mass transfer coefficient in figure-eight shaking vessels were observed by experimental method. The flow patterns, mixing time, power consumption and mass transfer coefficient in the figureeight shaking vessels changed irregularly with increase in the shaking frequency. Any frequency, even in the Fr = 0.095 or more became clear experimentally. The region of the optimum operating condition of the figure-eight shaking was larger than that of the reciprocal shaking. The solid-liquid mass transfer coefficient was correlated with the same correlation as that of the rotary shaking vessel of existing. The gas-liquid mass transfer coefficient of the figure-eight shaking vessel was also correlated with the same type of correlation as that of the rotary shaking vessel of existing.

• Korean Journal of Materials Research
• /
• v.30 no.9
• /
• pp.447-452
• /
• 2020

In this work, α-Fe₂O₃ nanocrystals are synthesized by co-precipitation method and used as adsorbent to remove Cr⁶⁺, Cd²⁺, and Pb²⁺ from wastewater at room temperature. The prepared sample is evaluated by XRD, BET surface area, and FESEM for structural and morphological characteristics. XRD patterns confirm the formation of a pure hematite structure of average particle size of ~ 40 nm, which is further supported by the FESEM images of the nanocrystals. The nanocrystals are found to have BET specific surface area of ~ 39.18 m² g^-1. Adsorption experiments are carried out for the different values of pH of the solutions, contact time, and initial concentration of metal ions. High efficiency Cr⁶⁺, Cd²⁺, and Pb²⁺ removal occur at pH 3, 7, and 5.5, respectively. Equilibrium study reveals that the heavy metal ion adsorption of the α-Fe₂O₃ nanocrystals followed Langmuir and Freundlich isotherm models. The Cr⁶⁺, Cd²⁺, and Pb²⁺ adsorption equilibrium data are best fitted to the Langmuir model. The maximum adsorption capacities of α-Fe₂O₃ nanocrystals related to Cr⁶⁺, Cd²⁺, and Pb²⁺ are found to be 15.15, 11.63, and 20 mg g^-1, respectively. These results clearly suggest that the synthesized α-Fe₂O₃ nanocrystals can be considered as potential nano-adsorbents for future environmental and health related applications.

• Polymer(Korea)
• /
• v.30 no.5
• /
• pp.407-411
• /
• 2006

The SiC-based ceramic nanopatterns were prepared by placing polydimethylsiloxane (PDMS) mold from DVD master on the spincoated polyvinylsilaeane (PVS) or allylhydridopolycaybosilane (AHPCS) as ceramic precursors to fabricate line pattern via UV-nanoimprint lithography (UV-NIL), and subsequent pyrolysis at $800^{\circ}C$ in nitrogen atmosphere. As the dimensional change of polymeric and ceramic patterns was comparatively investigated by AFM and SEM, the shrinkage in height was 38.5% for PVS derived pattern and 24.1% for AHPCS derived pattern while the shrinkage in width was 18.8% for PVS and 16.7% for AHPCS. It indicates that higher ceramic yield of the ceramic precursor resulted in less shrinkage, and the strong adhesion between the substrate and the pattern caused anisotropic shrinkage. This preliminary work suggests that NIL is a promissing route for fabricating ceramic MEMS devices, with the development on the shrinkage control.

• Korean Journal of Materials Research
• /
• v.19 no.5
• /
• pp.253-258
• /
• 2009

Mn-substituted $BiFeO_3$(BFO) thin films were prepared by r.f. magnetron sputtering under an Ar/$O_2$ mixture of various deposition pressures at room temperature. The effects of the deposition pressure and annealing temperature on the crystallization and electrical properties of BFO films were investigated. X-ray diffraction patterns revealed that BFO films were crystallized for films annealed above $500^{\circ}C$. BFO films annealed at $550^{\circ}C$ for 5 min in $N_2$ atmosphere exhibited the crystallized perovskite phase. The (Fe+Mn)/Bi ratio decreased with an increase in the deposition pressure due to the difference of sputtering yield. The grain size and surface roughness of films increased with an increase in the deposition pressure. The dielectric constant of BFO films prepared at various conditions shows $127{\sim}187$ at 1 kHz. The leakage current density of BFO films annealed at $500^{\circ}C$ was approximately two orders of magnitude lower than that of $550^{\circ}C$. The leakage current density of the BFO films deposited at $10{\sim}30\;m$ Torr was about $5{\times}10^{-6}{\sim}3{\times}10^{-2}A/cm^2$ at 100 kV/cm. Due to the high leakage current, saturated P-E curves were not obtained in BFO films. BFO film annealed at $500^{\circ}C$ exhibited remnant polarization(2Pr) of $26.4{\mu}C/cm^2$ at 470 kV/cm.