The effect of wafer deformation on UV-nanoimprint lithography using an EPS(elementwise patterned stamp) |
Sim Young-suk
(Dept. of intelligent precision machine, Korea Institute of Machinery & Materials)
Jeong Jun-ho (Dept. of intelligent precision machine, Korea Institute of Machinery & Materials) Sohn Hyonkee (Dept. of advanced industrial technology, Korea Institute of Machinery & Materials) Lee Eung-sug (Dept. of intelligent precision machine, Korea Institute of Machinery & Materials) Fang Lingmei (Dept. of Mechanical Engineering, Mokpo National University) Lee Sang-chan (Dept. of Mechanical Engineering, Mokpo National University) |
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