Fabrication of Ceramic Line Pattern by UV-Nanoimprint Lithography of Inorganic Polymers |
Park Jun-Hong
(Department of Fine Chemical Engineering, Chungnam National University)
Pham Tuan-Anh (Department of Fine Chemical Engineering, Chungnam National University) Lee Jae-Jong (Nano-Mechnical Systems Technology, Korea Institute of Machinery & Materials) Kim Dong-Pyo (Department of Fine Chemical Engineering, Chungnam National University) |
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