• Journal of the Korean Society for Precision Engineering
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• v.33 no.1
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• pp.11-16
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• 2016

Lithography techniques are generally used to manufacture nano-patterns on silicon, however, it is difficult to make a V-shaped pattern using these techniques. Although silicon is a brittle material, it can be treated as a ductile material if mechanically machined at extremely low force scale. The manufacturing technique of nano-patterns on single crystal silicon using a mechanical method was developed in this study. First, the linear pattern was machined on the silicon with increasing thrust force. Then, the correlation between measured cutting force and machined pattern was analyzed. Based on the analysis, the critical thrust force was quantitatively determined, and then the silicon was machined at a force lower than the critical thrust force. The machined pattern was observed using SEM and AFM to check for the occurrence of brittle fractures. Finally, the sharp V-shaped nano-pattern was manufactured on the single crystal silicon.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.4
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• pp.369-374
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• 2009

In micro/nano-scale contacts in MEMS and NEMS, capillary and van der Waals forces generated around contacting micro-asperities significantly influence the performance of concerning device as they are closely related to adhesion and stiction of interacting surfaces. In this regard, it is of prime importance to accurately estimate the magnitude of surface forces so that an optimal solution for reducing friction and adhesion of micro/nano-surfaces may be obtained We introduced an effective method to calculate these surface forces based on topography information obtained from an atomic force microscope. This method was used to calculate surface forces generated in the contact interface formed between diamond-like carbon coating and $Si_3N_4$ ball. This method is shown to effectively demonstrate the influence of capillary force in the contact area, especially in humid atmosphere.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.367-370
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• 2003

In this study, application of SAM (self-assembled monolayer) to nano replication process as an anti-adhesion layer was presented to reduce the surface energy between the nano mold and the replicated polymeric nano patterns. The electron beam lithography was used for master nano patterns and the electorforming process was used to fabricate the nickel nano stamper. Alkanethiol SAM as an anti-adhesion layer was deposited on metallic nano stamper using solution deposition method. To analyze wettability and adhesion force of SAM, contact angle and LFM (Lateral Force Microscopy) were measured at the actual processing temperature and pressure for the case of nano compression molding and at the actual UV dose for the case of nano UV molding. It was found that the surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the quality of SAM on the nickel stamper maintained under the actual molding environments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.215-218
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• 2003

Nano-scale experiments for adhesion force and friction force were performed with AFM/FFM. In macro-scale, the friction coefficient is constant without relating to the change of contact area. However, many papers have indicated that in nano-scale, the friction coefficient is related to the contact area. Contact area would increase with the normal force. Therefore, in this study, we analyzed the trend of the friction coefficient of Si(100) and Mica according to the normal force and then. the contact area was calculated by JKR-theory. Results showed the friction coefficient was constant under 180 nm$^2$ contact area and over 180 nm$^2$ contact area, it was degraded. Moreover. the friction coefficient was constant according to the adhesion force.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.260-263
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• 2008

The bending test of an individual ZnO nanorod was performed with a nano-manipulator and a force sensor inside the scanning electron microscope (SEM), and the bending properties of ZnO nanorod were also discussed. The ZnO nanorod used in this experiment was fabricated by means of solution base process. The force sensor used for bending test of ZnO nanorod was typed with cantilever. The force sensor was mounted on the nano-manipulator. The nano-manipulator was controlled and manipulated by a personal computer. The each end of an individual ZnO nanorod was attached on the rigid support and the tip of the force sensor with an electron beam exposure, and then the bending test was carried out by controlling of the nano-manipulator. The bending modulus of a ZnO nanorod was calculated at 69.35GPa after the bending test.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.59-62
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• 2005

Small force measurements ranging from 1 pN to $100{\mu}N$, we call it Nano Force, become the questions of common interests of biomechanics, nanomechanics, material researches, and so on. However, unfortunately, quantitative and accurate force measurements have not been taken so far. This is because there ,are no traceable force standards and a calibration scheme. This paper introduces a quantitative force metrology, which provides traceable link to SI (International Systems of Units). We realize SI traceable force ranging from 1 nN to $100{\mu}N$ using an electrostatic balance and disseminate it through transfer standards, which are self-sensing cantilevers that have integrated piezoresistive strain gages. We have been built a prototype electrostatic balance and Nano Force Calibrator (NFC), which is an AFM cantilever calibration system. As a first experiment, we calibrated normal spring constants of commercial AFM cantilevers using NFC. Calibration results show that the spring constants of them are quite differ from each other and nominal values provided by a manufacturer (up to 240% deviation).

• Journal of Mechanical Science and Technology
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• v.18 no.5
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• pp.789-797
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• 2004

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in micro robotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a micro robotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2001.06a
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• pp.127-134
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• 2001

Nano adhesion and friction between a Sj$_3$N$_4$ AFM tip and thin silver films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM(atomic force microscope) and LFM(lateral force microscope) modes in various ranges of normal load. Thin silver films deposited by IBAD (ion beam assisted deposition) on Si-wafer (100) and Si-wafer of different surface roughness were used. Results showed that nano adhesion and friction decreased as the surface roughness increased. When the Si surfaces were coated by pure silver, the adhesion and friction decreased. But the adhesion and friction were not affected by the thickness of IBAD silver coating. As the normal force increased, the adhesion forces of bare Si-wafer and IBAD silver coating film remained constant, but the friction forces increased linearly. Test results suggested that the friction was mainly governed by the adhesion as long as the normal load was low.

• Tribology and Lubricants
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• v.28 no.2
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• pp.62-69
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• 2012

Atomic force microscopy (AFM) has been widely utilized as a versatile tool not only for imaging surfaces but also for understanding nano-scale interfacial phenomena. By measuring the responses of the photo detector due to bending and torsion of the cantilever, which are caused by the interactions between the probe and the sample surface, various interfacial phenomena and properties can be explored. One of the challenges faced by AFM researchers originates in the physics of measuring the small forces that act between the probe of a force sensing cantilever and the sample. To understand the interactions between the probe and the sample quantitatively, the force calibration is essential. In this work, the procedures used to calibrate AFM instrumentation for nano-scale force measurement in normal and lateral directions are reviewed.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.27-32
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• 2002