Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Study on Ductile Machining Technology for Manufacturing Nano-Patterns on Single Crystal Silicon through Quantitative Analysis of Thrust Force

배분력의 정량적인 분석을 통한 단결정실리콘의 나노패턴 연성가공법 연구

  • Choi, Dae-Hee (Department of Nano Mechatronics, University of Science and Technology) ;
  • Jeon, Eun-chae (Department of Nano Mechatronics, University of Science and Technology) ;
  • Yoon, Min-Ah (Department of Nano Mechatronics, University of Science and Technology) ;
  • Kim, Kwang-Seop (Department of Nano Mechatronics, University of Science and Technology) ;
  • Je, Tae-Jin (Department of Nano Mechatronics, University of Science and Technology) ;
  • Jeong, Jun-Ho (Department of Nano Mechatronics, University of Science and Technology)
  • 최대희 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 전은채 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 윤민아 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 김광섭 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 제태진 (과학기술연합대학원대학교 나노메카트로닉스 전공) ;
  • 정준호 (과학기술연합대학원대학교 나노메카트로닉스 전공)
  • Received : 2015.06.29
  • Accepted : 2015.10.01
  • Published : 2016.01.01
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Abstract

Lithography techniques are generally used to manufacture nano-patterns on silicon, however, it is difficult to make a V-shaped pattern using these techniques. Although silicon is a brittle material, it can be treated as a ductile material if mechanically machined at extremely low force scale. The manufacturing technique of nano-patterns on single crystal silicon using a mechanical method was developed in this study. First, the linear pattern was machined on the silicon with increasing thrust force. Then, the correlation between measured cutting force and machined pattern was analyzed. Based on the analysis, the critical thrust force was quantitatively determined, and then the silicon was machined at a force lower than the critical thrust force. The machined pattern was observed using SEM and AFM to check for the occurrence of brittle fractures. Finally, the sharp V-shaped nano-pattern was manufactured on the single crystal silicon.

Keywords

References

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