Tribology and Lubricants

Korean Tribology Society (한국트라이볼로지학회)
권호 표지
DOI QR코드

DOI QR Code

Quantitative Measurement of Nano-scale Force using Atomic Force Microscopy

AFM을 이용한 나노스케일 힘의 정량적 측정

  • Received : 2012.01.25
  • Accepted : 2012.03.05
  • Published : 2012.04.30
Download PDF
⟨ Previous Next ⟩

Abstract

Atomic force microscopy (AFM) has been widely utilized as a versatile tool not only for imaging surfaces but also for understanding nano-scale interfacial phenomena. By measuring the responses of the photo detector due to bending and torsion of the cantilever, which are caused by the interactions between the probe and the sample surface, various interfacial phenomena and properties can be explored. One of the challenges faced by AFM researchers originates in the physics of measuring the small forces that act between the probe of a force sensing cantilever and the sample. To understand the interactions between the probe and the sample quantitatively, the force calibration is essential. In this work, the procedures used to calibrate AFM instrumentation for nano-scale force measurement in normal and lateral directions are reviewed.

Keywords

References

  1. Binnig, G., Quate, C. F., and Gerber, Ch., "Atomic Force Microscope," Phys. Rev. Lett., Vol. 56, pp. 930-933, 1986. https://doi.org/10.1103/PhysRevLett.56.930
  2. Mamin, H. J. and Rugar, D., "Thermomechanical Writing with an Atomic Force Microscope Tip," Appl. Phys. Lett., Vol. 61, pp. 1003-1005, 1992. https://doi.org/10.1063/1.108460
  3. Sung, I.H., Yang, J.-C., Kim, D.E., and Shin, B.-S., "Micro/Nano-tribological Characteristics of Self-Assembled Monolayer and Its Application in Nano-Structure Fabrication," Wear, Vol. 255, pp. 808-818, 2003. https://doi.org/10.1016/S0043-1648(03)00058-9
  4. Erlandsson, R., McClelland, G.M., Mate, C.M., and Chiang, S., "Atomic Force Microscopy Using Optical Interferometry," J. Vac. Sci. Technol. A, Vol. 6, pp. 266-270, 1988. https://doi.org/10.1116/1.575440
  5. Lee, C., Wei, X., Kysar, J.W., and Hone, J., "Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene," Science, Vol. 321, pp. 385-388, 2008. https://doi.org/10.1126/science.1157996
  6. Chung, K.-H., Lee, J.-W., and Kim, D.-E., "Nano-mechanical and Tribological Characteristics of Ultra-Thin Amorphous Carbon Film Investigated by AFM," J. Mech. Sci. Technol., Vol. 18, pp. 1772-1781, 2004.
  7. Thundat, T., Allison, D. P., and Warmack, R. J., "Stretched DNA Structures Observed with Atomic Force Microscopy," Nucleic Acids Res., Vol. 22, pp. 4224-4228, 1994. https://doi.org/10.1093/nar/22.20.4224
  8. Mahaffy, R. E., Shih, C. K., and MacKintosh, F. C., and Kas, J., "Scanning Probe-Based Frequency-Dependent Microrheology of Polymer Gels and Biological Cells," Phys. Rev. Lett., Vol. 85, pp. 880-883, 2000. https://doi.org/10.1103/PhysRevLett.85.880
  9. Chung, K.-H., Bhadriraju, K., Spurlin, T.A., Cook, R., and Plant, A.L., "Nanomechanical Properties of Thin Films of Type I Collagen Fibrils," Langmuir, Vol. 26, pp. 3629-3636, 2010. https://doi.org/10.1021/la903073v
  10. Guthold, M., Liu, W., Stephens, B., Lord, S.T., Hantgan, R.R., Erie, D.A., Taylor Jr. R. M., and Superfine, R., "Visualization and Mechanical Manipulations of Individual Fibrin Fibers Suggest that Fiber Cross Section Has Fractal Dimension 1.3," Biophys. J., Vol. 87, pp. 4226-4236, 2004. https://doi.org/10.1529/biophysj.104.042333
  11. Cleveland, J.P., Manne, S., Bocek, D., and Hansma, P.K., "A Nondestructive Method for Determining the Stiffness of Cantilevers for Scanning Force Microscopy," Rev. Sci. Instrum., Vol. 64, pp. 403-405 1995.
  12. Cain, R.G., Biggs, S., and Page, N.W., "Force Calibration in Lateral Force Microscopy," J. Colloid Interface Sci., Vol. 227, pp. 55-65, 2001.
  13. Pratt, J.R., Smith, D.T., Newell, D.B., Kramar, J.A., and Whitenton, E., "Progress toward Système International d'Unités traceable force metrology for nanomechanics," J. Mater. Res., Vol. 19, pp. 366-379, 2004. https://doi.org/10.1557/jmr.2004.19.1.366
  14. Ogletree, D. F., Carpick, R. W., and Salmeron, M., "Calibration of Frictional Forces in Atomic Force Microscopy," Rev. Sci. Instrum., Vol. 67, pp. 3298-3306, 1996. https://doi.org/10.1063/1.1147411
  15. Higgins, M.J., Proksch, R., Sader, J.E., Polcik, M., Endoo, S. Mc, Cleveland, J. P., and Jarvis, S.P., "Noninvasive Determination of Optical Lever Sensitivity in Atomic Force Microscopy," Rev. Sci. Instrum., Vol. 77, pp. 013701, 2006. https://doi.org/10.1063/1.2162455
  16. Wagner, K., Cheng, P., and Vezenov, D., "Noncontact Method for Calibration of Lateral Forces in Scanning Force Microscopy," Langmuir, Vol. 27, pp. 4635-4644, 2011. https://doi.org/10.1021/la1046172
  17. Chung, K.-H., Shaw, G.A., and Pratt, J.R., "Accurate Noncontact Calibration of Colloidal Probe Sensitivities in Atomic Force Microscopy Using Electrostatics," Rev. Sci. Instrum., Vol. 80, pp. 065107, 2009. https://doi.org/10.1063/1.3152335
  18. Cannara, R.J., Eglin, M., and Carpick, R.W., "Lateral Force Calibration in Atomic Force Microscopy: A New Lateral Force Calibration Method and General Guidelines for Optimization," Rev. Sci. Instrum., Vol. 77, pp. 053701, 2006. https://doi.org/10.1063/1.2198768
  19. Craig, V.S.J. and Neto, C., "In Situ Calibration of Colloid Probe Cantilevers in Force Microscopy:Hydrodynamic Drag on a Sphere Approaching a Wall," Langmuir, Vol. 17, pp. 6018-6022, 2001. https://doi.org/10.1021/la010424m
  20. Sader, J.E., "Parallel Beam Approximation for Vshaped Atomic Force Microscope Cantilevers," Rev. Sci. Instrum., Vol. 66, pp. 4583-4587, 1995. https://doi.org/10.1063/1.1145292
  21. Hutter, J.L. and Bechhoefer, J., "Calibration of Atomic Force Microscope Tips," Rev. Sci. Instrum., Vol. 6, pp. 1868-1873, 1993.
  22. Butt, H.-J. and Jaschke, M., "Calculation of Thermal Noise in Atomic Force Microscopy," Nanotechnol., Vol. 6, pp. 1-7, 1995. https://doi.org/10.1088/0957-4484/6/1/001
  23. Proksch, R., Schäffer, T.E., Cleveland, J.P., Callahan, R.C., and Viani, M.B., "Finite Optical Spot Size and Position Corrections in Thermal Spring Constant Calibration," Nanotechnol., Vol. 15, pp. 1344-1350, 2004. https://doi.org/10.1088/0957-4484/15/9/039
  24. Heim, L.-O., Kappl, M., and Butt, H.-J., "Tilt of Atomic Force Microscope Cantilevers: Effect on Spring Constant and Adhesion Measurements," Langmuir, Vol. 20, pp. 2760-2764, 2004. https://doi.org/10.1021/la036128m
  25. Sader, J.E., Chon, J.W.M., and Mulvaney, P., "Calibration of Rectangular Atomic Force Microscope Cantilevers," Rev. Sci. Instrum., Vol. 70, pp. 3967-3969, 1999. https://doi.org/10.1063/1.1150021
  26. Chung, K.-H., Lee, Y.-H., and Kim, D.-E., "Characteristics of Fracture during the Approach Process and Wear Mechanism of a Silicon AFM Tip," Ultramicroscopy, Vol. 102, pp. 161-171, 2005. https://doi.org/10.1016/j.ultramic.2004.09.009
  27. Torii, A., Sasaki, M., Hane, K., and Okuma, S., "A Method for Determining the Spring Constant of Cantilevers for Atomic Force Microscopy," Meas. Sci. Technol., Vol. 7, pp. 179-184, 1996. https://doi.org/10.1088/0957-0233/7/2/010
  28. Gates, R.S. and Reitsma, M.G., "Precise Atomic Force Microscope Cantilever Spring Constant Calibration using a Reference Cantilever Array," Rev. Sci. Instrum., Vol. 78, pp. 086101, 2007. https://doi.org/10.1063/1.2764372
  29. Sader, J.E. and Green, C.P., "In-plane Deformation of Cantilever Plates with Applications to Lateral Force Microscopy," Rev. Sci. Instrum., Vol. 75, pp. 878-883, 2004. https://doi.org/10.1063/1.1667252
  30. Green, C.P., Lioe, H., Cleveland, J.P., Proksch, R., Mulvaney, P., and Sader, J.E., "Normal and Torsional Spring Constants of Atomic Force Microscope Cantilevers," Rev. Sci. Instrum., Vol. 75, pp. 1988-1996, 2004. https://doi.org/10.1063/1.1753100
  31. Feiler, A., Attard, P., and Larson, I., "Calibration of the Torsional Spring Constants and the Lateral Photodiode Response of Frictional Force Microscopes," Rev. Sci. Instrum., Vol. 71, pp. 2746-2750, 2000. https://doi.org/10.1063/1.1150686
  32. Chung K.-H. and Reitsma, M.G., "Lateral Force Microscope Calibration using Multiple Location Pivot Loading of Rectangular Cantilevers," Rev. Sci. Instrum., Vol. 81, pp. 026104, 2010. https://doi.org/10.1063/1.3276709
  33. Xie, H., Vitard, J., Haliyo, S., Regnier, S., and Boukallel, M., "Calibration of Lateral Force Measurements in Atomic Force Microscopy with a Piezoresistive Force Sensor," Rev. Sci. Instrum., Vol. 79, pp. 033708, 2008. https://doi.org/10.1063/1.2894209
  34. Li, Q., Kim, K.-S., and Rydberg, A., "Lateral Force Calibration of an Atomic Force Microscope with a Diamagnetic Levitation Spring System," Rev. Sci. Instrum., Vol. 77, pp. 065105, 2006. https://doi.org/10.1063/1.2209953
  35. Wang, F. and Zha, X., "Effect of Contact Stiffness on Wedge Calibration of Lateral Force in Atomic Force Microscopy," Rev. Sci. Instrum., Vol. 78, pp. 043701, 2007. https://doi.org/10.1063/1.2720723
  36. Varenberg, M., Etsion, I., and Halperin, G., "An Improved Wedge Calibration Method for Lateral Force in Atomic Force Microscopy," Rev. Sci. Instrum., Vol. 74, pp. 3362-3367, 2003. https://doi.org/10.1063/1.1584082
  37. Reitsma, M.G., Gates, R.S., Friedman, L.H., and Cook, R.F., "Prototype Cantilevers for Quantitative Lateral Force Microscopy," Rev. Sci. Instrum., Vol. 82, pp. 093706, 2011. https://doi.org/10.1063/1.3624700
  38. Chung, K.-H., Pratt, J.R., and Reitsma, M. G., "Lateral Force Calibration: Accurate Procedures for Colloidal Probe Friction Measurements in Atomic Force Microscopy," Langmuir, Vol. 26, pp. 1368-1394, 2010.