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The State of Art in Nano-Force Standards and Measurement  

Park, Yon-Kyu (Korea Reserch Institute of Standards and Science)
Kang, Dae-Im (Korea Reserch Institute of Standards and Science)
Kim, Jong-Ho (Korea Reserch Institute of Standards and Science)
Publication Information
Journal of the Korean Society for Precision Engineering / v.19, no.3, 2002 , pp. 27-32 More about this Journal
Keywords
Nano Force; Force Standards; Electrostatic Force; Transfer Standard; Force Measurement; Atomic Force Microscope; Cantilever;
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  • Reference
1 W. Hoffmann, S. Loheide, T. Kleine-Besten, U. Brand and A. Schlachetzki, 'Methods of Characterising Micro Mechanical Beams and its Calibration for the Application in Micro force Measurement System,' Proc. of the MICRO rec 2000 Conference, pp. 819-823, 2000
2 L. Doering and U. Brand, 'Si-Cantilevers with Integrated Piezo Resistive Elements as Micro Force Transfer Standards,' Pro. Nanoscale 2001, 2001
3 D.B. Newell, J.R. Pratt, J.A. Kramar, D.T. Smith, L.A. Feeney and E.R. Williams, 'Si Traceability of Force at the Nano Newton Level,' 2001 NCSL International Workshop & Symposium, 2001