• 제목/요약/키워드: N $O_{}$ x/

검색결과 2,140건 처리시간 0.032초

온도에 따른 $SiO_2$, $SiN_X$ 게이트 절연막 ITZO 산화물 반도체 트랜지스터 전기적 특성 연구

  • 김상섭;고선욱;최병덕
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.243.2-243.2
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    • 2013
  • 본 실험에서 $SiO_2$, $SiN_x$ 게이트 절연막에 따른 ITZO 산화물 반도체 트랜지스터를 제작하여, 온도변화에 따라 전달 특성 변화를 측정하여 열에 대한 소자의 안정성을 비교, 분석하였다. 온도가 증가함에 따라 carrier가 증가하는 온도 의존성을 보이며, 이로 인해 Ioff가 증가하였다. multiple-trapping 모델을 적용하여, 이동도 증가와 문턱 전압이 감소를 확인하였다. 또한 M-N rule을 적용하여 $SiO_2$, $SiN_x$ 게이트 절연막을 가진 ITZO 산화물 박막 트랜지스터의 활성화 에너지를 추출하고, sub-threshold 지역에서 활성화 에너지의 변화량이 $SiO_2$, SiNX 각각 0.37 eV/V, 0.24 eV/V로 차이를 통해 $SiN_x$ 게이트 절연체를 가진 ITZO 산화물 반도체 트랜지스터의 이동도와 문턱 전압의 변화가 더 컸음을 확인하였다.

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EXISTENCE AND NON-EXISTENCE FOR SCHRÖDINGER EQUATIONS INVOLVING CRITICAL SOBOLEV EXPONENTS

  • Zou, Henghui
    • 대한수학회지
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    • 제47권3호
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    • pp.547-572
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    • 2010
  • We study existence of positive solutions of the classical nonlinear Schr$\ddot{o}$dinger equation $-{\Delta}u\;+\;V(x)u\;-\;f(x,\;u)\;-\;H(x)u^{2*-1}\;=\;0$, u > 0 in $\mathbb{R}^n$ $u\;{\rightarrow}\;0\;as\;|x|\;{\rightarrow}\;{\infty}$. In fact, we consider the following more general quasi-linear Schr$\ddot{o}$odinger equation $-div(|{\nabla}u|^{m-2}{\nabla}u)\;+\;V(x)u^{m-1}$ $-f(x,\;u)\;-\;H(x)u^{m^*-1}\;=\;0$, u > 0 in $\mathbb{R}^n$ $u\;{\rightarrow}\;0\;as\;|x|\;{\rightarrow}\;{\infty}$, where m $\in$ (1, n) is a positive number and $m^*\;:=\;\frac{mn}{n-m}\;>\;0$, is the corresponding critical Sobolev embedding number in $\mathbb{R}^n$. Under appropriate conditions on the functions V(x), f(x, u) and H(x), existence and non-existence results of positive solutions have been established.

MoOx 기반의 고성능 투명 광검출기 (MoOx-Windowed High-Performing Transparent Photodetector)

  • 박왕희;이경남;김준동
    • 한국전기전자재료학회논문지
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    • 제30권6호
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    • pp.387-392
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    • 2017
  • A high-performing all-transparent photodetector was created by configuring a $MoO_x$/NiO/ZnO/ITO structure on a glass substrate. The ITO bottom layer was applied as a back contact. To achieve the transparent p/n junction, p-type NiO was coated on the n-type ZnO layer. Reactive sputtering was used to spontaneously form the ZnO or NiO layer. In order to improve the transparent photodetector performance, the functional $MoO_x$ window layer was used. Optically, the $MoO_x$ window provided a refractive index layer (n=1.39) lower than that of NiO (n=2), increasing the absorption of the incident light wavelengths (${\lambda}s$). Moreover, the $MoO_x$ window can provide a lower sheet resistance to improve the carrier collection for the photoresponses. The $MoO_x$/NiO/ZnO/ITO device showed significantly better photoresponses of 877.05 (at ${\lambda}$=460nm), 87.30 (${\lambda}$=520 nm), and 30.38 (${\lambda}$=620 nm), compared to 197.28 (${\lambda}$=460 nm), 51.74 (${\lambda}$=520 nm) and 25.30 (${\lambda}$=620 nm) of the NiO/ZnO/ITO device. We demonstrated the high-performing transparent photodetector by using the multifunctional $MoO_x$ window layer.

Enhanced Anti-reflective Effect of SiNx/SiOx/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source

  • Choi, Min-Jun;Kwon, O Dae;Choi, Sang Dae;Baek, Ju-Yeoul;An, Kyoung-Joon;Chung, Kwun-Bum
    • Applied Science and Convergence Technology
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    • 제25권4호
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    • pp.73-76
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    • 2016
  • Multi-layer films of $SiN_x/SiO_x$/InSnO with anti-reflective effect were grown by new-concept plasma enhanced chemical vapor deposition system (PECVD) with hybrid plasma source (HPS). Anti-reflective effect of $SiN_x/SiO_x$/InSnO was investigated as a function of ratio of $SiN_x$ and $SiO_x$ thickness. Multi-layers deposited by PECVD with HPS represents the enhancement of anti-reflective effect with high transmittance, comparing to the layers by conventional radio frequency (RF) sputtering system. This change is strongly related to the optical and physical properties of each layer, such as refractive index, composition, film density, and surface roughness depending on the deposition system.

$(1-y)Pb(Mg_{(1-x)/3}Zn_{x/3}Zn_{x/3}Nb_{2/3})O_3-yBaTiO_3$ 세라믹스의 구조 및 유전 성질 (Structural and Dielectric Properties of $(1-y)Pb(Mg_{(1-x)/3}Zn_{x/3}Zn_{x/3}Nb_{2/3})O_3-yBaTiO_3$Ceramics)

  • 홍영식;박휴범;김시중
    • 한국세라믹학회지
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    • 제32권8호
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    • pp.938-944
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    • 1995
  • Dielectric properties and the stabilization of perovskite phase for the (1-y)Pb(Mg(1-x)/3Znx/3Znx/3Nb2/3)O3-yBaTiO3 ((1-y)PM1-xZxN-yBT) ceramics have been investigated as a function of amount of x and y. In the (1-y)PM0.6Z0.4N-yBT ceramics, the amount of pyrochlore phae was decreased by the addition of 2 mol% BT and the dielectric constant was increased. However, the dielectric constant decreased with further addition of BT even though pyrochlore phase was decreased. Dielectric prooperties in (1-y)PM0.6Z0.4N-yBT ceracmis were affected by the character of the BT rather than the amount of pyrochlore phase. The phase transitions were broadened and phase transition temperatures were lowered by the increase of BT contents.

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$Si_3N_4-Al_2O_3-SiO_2$계의 1,$700^{\circ}C$에서 생성하는 화합물의 상관계 및 미구조 (Phase Relations and Microstructure of Comounds in the $Si_3N_4-Al_2O_3-SiO_2$ system at $1700^{\cire}C$)

  • 이의종;김환
    • 한국세라믹학회지
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    • 제16권4호
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    • pp.206-212
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    • 1979
  • The phase relations and microstructure appeared at 1700℃ in a system of Si3N4-Al2O3-SiO2 were studied. The samples were pressurelessly sintered at 1700℃ for 1hr and reheated at 1600℃ for 1hr under nitrogen atmosphere. The compounds formed were identified by X-ray diffraction method and the microstrues were observed by SEM. The stable phases appeared in this system were X-phase, Si2ON2, β'-Si3N4 and Mullite. From the results of those experiments, it was concluded that the X-phase has very close composition to that proposed by G, K. Layden, Si3Al6O12N2. SEM photographs showed that Si2ON2 was a plate phase and X-phase was a rectagular plate phase.

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결정상에 대한 고용체가 $Bi_2Sr_2Ca{_{n-1}}Cu_nO_x$(n=0,1,2) 박막의 특성에 미치는 영향 (Influence of the Solid Solution for Crystalline Phase on the Characterization of $Bi_2Sr_2Ca{_{n-1}}Cu_nO_x$(n=0,1,2) Thin Films)

  • 양승호;이호식;박용필
    • 한국정보통신학회논문지
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    • 제11권6호
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    • pp.1115-1121
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    • 2007
  • 이온 빔 스퍼터법을 이용하여 저속성장으로 동시 증착에 의해 $Bi_2Sr_2Ca{_{n-1}}Cu_nO_x$(n=0,1,2) 박막을 제작하였다. Bi 2212 상은 기판온도 $750{\sim}795^{\circ}C$의 범위에서 나타났으며, $750^{\circ}C$보다 저온 측에서는 Bi 2201의 단일상이 존재하였다. 그러나, 조성과 관계되는 $PO_3$은 압력 변화에 대해서는 관찰되지 않았다. 그리고 $45{\sim}90K$의 임계온도(Tc)를 갖는 c축 배향한 고품질의 Bi 2212 박막을 얻었다. 소수의 박막에서는 소량의 CuO가 불순물로 관찰되었으며, 얻어진 모든 박막에서 $CaCuO_2$ 의 불순물 상은 관찰되지 않았다.

Formation and Intergrowth of the Superconducting Phase in the Bi2Sr2Can-1CunOx (n=2~4) System

  • Cheon, Min-Woo;Park, Yong-Pil
    • Transactions on Electrical and Electronic Materials
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    • 제5권5호
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    • pp.199-203
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    • 2004
  • Superconducting B $i_2$S $r_2$C $a_{n-l}$C $u_{n}$ $O_{x}$(n=2~4) thin films were prepared by single target DC-magnetron sputtering. And, that was compared with the B $i_2$S $r_2$C $a_{n-l}$C $u_{n}$ $O_{x}$(n=1~3) thin film fabricated by using the ion beam sputtering. Phase intergrowth among n=2-3, 3-4 and 4-5 phases was observed. The molar fraction of each phase in the mixed crystal of the deposited films was determined by x-ray diffraction analyses and investigated as a function of $O_2$ gas pressure during sputtering. We investigated the changes of the superconducting properties by molar fraction of each phase. Also, the thin film surface observation was carried out by atomic force microscope. The images show the average particle size decreases, and the distribution density of particles on the film surface was to increase with lower gas pressures. The fabrication conditions for selective growth of the single n=2, 3 and 4 phases in BiSrC $a_{n-l}$C $u_{n}$ $O_{x}$(n=2~4) thin film are discussed.e discussed.ussed.

부착율 개선을 위해 증발 법으로 제작한 Bi2Sr2CanCun+1Ox 박막의 부착 특성 (Sticking Characteristics in Bi2Sr2CanCun+1Ox Thin Films Fabricated by using the Evaporation Method to Improve the Sticking Ratio)

  • 천민우;박용필
    • 한국전기전자재료학회논문지
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    • 제16권11호
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    • pp.1029-1034
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    • 2003
  • The Bi$_2$Sr$_2$Ca$_{n}$Cu$_{n+1}$ O$_{x}$, superconducting thin films arc fabricated by using the sputtering and evaporation method. Because we confirmed the sticking ratio of Bi element in the Bi$_2$Sr$_2$Ca$_{n}$Cu$_{n+1}$ O$_{x}$ superconducting thin film fabricated by using the sputtering method was much lower than the expected value, to get the enough number of the flakes of Bi, faraday cup was used to evaporate Bi clement. As a result of the fabrication, Bi 2201 and Bi 2212 single phases could be made by the optima of deposition condition. And we confirmed the sticking coefficient of Bi element was clearly related to the temperature change of the substrate and the generation of Bi22l2 phase