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http://dx.doi.org/10.4313/JKEM.2003.16.11.1029

Sticking Characteristics in Bi2Sr2CanCun+1Ox Thin Films Fabricated by using the Evaporation Method to Improve the Sticking Ratio  

천민우 (동신대학교 전기전자공학과)
박용필 (동신대학교 전기전자공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.16, no.11, 2003 , pp. 1029-1034 More about this Journal
Abstract
The Bi$_2$Sr$_2$Ca$_{n}$Cu$_{n+1}$ O$_{x}$, superconducting thin films arc fabricated by using the sputtering and evaporation method. Because we confirmed the sticking ratio of Bi element in the Bi$_2$Sr$_2$Ca$_{n}$Cu$_{n+1}$ O$_{x}$ superconducting thin film fabricated by using the sputtering method was much lower than the expected value, to get the enough number of the flakes of Bi, faraday cup was used to evaporate Bi clement. As a result of the fabrication, Bi 2201 and Bi 2212 single phases could be made by the optima of deposition condition. And we confirmed the sticking coefficient of Bi element was clearly related to the temperature change of the substrate and the generation of Bi22l2 phase
Keywords
Sputtering system; Evaporation system; Bi$_2$Sr$_2$Ca$_{}$ n/Cu$_{}$ n+1/O$_{}$ x/ thin film; Bi 2201 phase; Bi;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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2 Analysis of sticking coefficient in Bi-superconducting thin film /
[ M.W.Cheon;Y.P.Park;S.I.Lee ] / J. of KIEEME   과학기술학회마을
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[ D.G.Lee;Y.P.Park ] / J. of KIEEME   과학기술학회마을
4 吉田 貞史, 簿模 /
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5 In-situ growth of Bi-Sr-Ca-Cu oxide superconducting thin films by molecular beam epitaxy with a pure ozone source /
[ Y.Kasai;S.Sakai ] / Journal of Crystal Growth   DOI   ScienceOn
6 Characteristics of Bi-superconducting thin film fabricated by layer-by-layer and co-sputtering method /
[ Y.P.Park ] / J. of EEIS
7 Evaluation of sticking coefficient in BSCCO thin film fabricated by co-sputtering /
[ H.K.Lee;Y.P.Park;K.H.Lee;J.U.Lee ] / J. of KIEEME   과학기술학회마을
8 Molecular beam epitaxial growth of layered Bi-Sr-Ca-Cu-O compounds /
[ D.G.Schlom;A.F.Marshall;J.T.Sizemore;Z.J.Chen;J.M.Ecdstein;I.Bozovic;K.E.von Dessonneck ] / Journal of Crystal Growth   DOI   ScienceOn
9 Evaluation of ozone condensation system by T. D. method /
[ Y.P.Park ] / Trans. on EEM   과학기술학회마을
10 A charged particle oscillator /
[ A.H.Mcilraith ] / J. Vac. Sci. Technol   DOI
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[ 高梔淸 ] / 分子綠エピタキシ一技術